| Patent | Date |
|---|
Methods For Detection Using Optical Emission Spectroscopy
App 20220283029 - ZHU; Zuoming ; et al. | 2022-09-08 |
Chamber Body Feedthrough For In Chamber Resistive Heating Element
App 20220254634 - BURROWS; Brian Hayes ; et al. | 2022-08-11 |
Temperature Profile Measurement And Synchronized Control On Substrate And Susceptor In An Epitaxy Chamber
App 20220155148 - ZHU; Zuoming ; et al. | 2022-05-19 |
Method And System For Foreline Deposition Diagnostics And Control
App 20220129698 - MORADIAN; Ala ; et al. | 2022-04-28 |
In-situ Temperature Mapping For Epi Chamber
App 20220090293 - MORADIAN; Ala ; et al. | 2022-03-24 |
Parameter Sensing And Computer Modeling For Gas Delivery Health Monitoring
App 20220092241 - Moradian; Ala ; et al. | 2022-03-24 |
In-situ temperature mapping for epi chamber
Grant 11,261,538 - Moradian , et al. March 1, 2 | 2022-03-01 |
Substrate positioning apparatus and methods
Grant 11,162,168 - Moradian , et al. November 2, 2 | 2021-11-02 |
Substrate positioning apparatus and methods
Grant 11,036,125 - Moradian , et al. June 15, 2 | 2021-06-15 |
Ultrasonic Needles and Transducer Assemblies Formed of Non-Metal Materials or a Combination of Materials
App 20210145639 - Moradian; Ala ; et al. | 2021-05-20 |
Methods and apparatus for gallium nitride deposition
Grant 10,995,419 - Burrows , et al. May 4, 2 | 2021-05-04 |
Ultrasonic needles and transducer assemblies formed of non-metal materials or a combination of materials
Grant 10,932,948 - Moradian , et al. March 2, 2 | 2021-03-02 |
Methods and apparatus for wafer temperature measurement
Grant 10,930,530 - Hu , et al. February 23, 2 | 2021-02-23 |
Substrate Processing Monitoring
App 20210028075 - ZHU; Zuoming ; et al. | 2021-01-28 |
Methods And Apparatus For Gallium Nitride Deposition
App 20200332437 - BURROWS; Brian H. ; et al. | 2020-10-22 |
Method for controlling heat flow within a silicon melt using a heat diffusion barrier assembly
Grant 10,801,125 - Kellerman , et al. October 13, 2 | 2020-10-13 |
Semiconductor workpiece temperature measurement system
Grant 10,739,208 - Petry , et al. A | 2020-08-11 |
Substrate Positioning Apparatus And Methods
App 20200024726 - Moradian; Ala ; et al. | 2020-01-23 |
Substrate Positioning Apparatus And Methods
App 20200026177 - Moradian; Ala ; et al. | 2020-01-23 |
Apparatus For Controlling Heat Flow Within A Silicon Melt
App 20190338442 - Kellerman; Peter L. ; et al. | 2019-11-07 |
Substrate handling and heating system
Grant 10,443,934 - Evans , et al. Oc | 2019-10-15 |
Apparatus For Controlling Heat Flow Within A Silicon Melt
App 20190284715 - Kellerman; Peter L. ; et al. | 2019-09-19 |
Apparatus for controlling heat flow within a silicon melt
Grant 10,415,151 - Kellerman , et al. Sept | 2019-09-17 |
Methods And Apparatus For Wafer Temperature Measurement
App 20190228997 - HU; Ji-Dih ; et al. | 2019-07-25 |
Semiconductor Workpiece Temperature Measurement System
App 20190170591 - Petry; Klaus ; et al. | 2019-06-06 |
System and method for crystalline sheet growth using a cold block and gas jet
Grant 9,957,636 - Kellerman , et al. May 1, 2 | 2018-05-01 |
Semiconductor workpiece temperature measurement system
Grant 9,933,314 - Petry , et al. April 3, 2 | 2018-04-03 |
Device and method for substrate heating during transport
Grant 9,899,242 - Schaller , et al. February 20, 2 | 2018-02-20 |
System And Method For Crystalline Sheet Growth Using A Cold Block And Gas Jet
App 20180047864 - Kellerman; Peter L. ; et al. | 2018-02-15 |
Semiconductor Workpiece Temperature Measurement System
App 20180003567 - Petry; Klaus ; et al. | 2018-01-04 |
System For Measuring Material Thicknesses At High Temperatures
App 20170247810 - Kellerman; Peter L. ; et al. | 2017-08-31 |
Electrostatic chuck with LED heating
Grant 9,728,430 - Schaller , et al. August 8, 2 | 2017-08-08 |
Apparatus for heating and processing a substrate
Grant 9,685,303 - Evans , et al. June 20, 2 | 2017-06-20 |
Hybrid thermal electrostatic clamp
Grant 9,633,886 - Evans , et al. April 25, 2 | 2017-04-25 |
Electrostatic Chuck With LED Heating
App 20160379853 - Schaller; Jason M. ; et al. | 2016-12-29 |
Apparatus For Heating And Processing A Substrate
App 20160329190 - Evans; Morgan D. ; et al. | 2016-11-10 |
Substrate Handling And Heating System
App 20160329458 - Evans; Morgan D. ; et al. | 2016-11-10 |
Hybrid Thermal Electrostatic Clamp
App 20160307786 - Evans; Morgan D. ; et al. | 2016-10-20 |
Ultrasonic Needles and Transducer Assemblies Formed of Non-Metal Materials or a Combination of Materials
App 20160302966 - Moradian; Ala ; et al. | 2016-10-20 |
Device And Method For Substrate Heating During Transport
App 20160293458 - Schaller; Jason M. ; et al. | 2016-10-06 |
Capsulotomy device and method using electromagnetic induction heating
Grant 8,591,577 - Moradian , et al. November 26, 2 | 2013-11-26 |
Tube Set Insertion Apparatus
App 20130096529 - Moradian; Ala | 2013-04-18 |
Capsulotomy Device And Method Using Electromagnetic Induction Heating
App 20120158130 - Moradian; Ala ; et al. | 2012-06-21 |
Capsulotomy Methods And Apparatus Using Heat
App 20120158027 - Moradian; Ala ; et al. | 2012-06-21 |
| 