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Patent applications and USPTO patent grants for Moorthy; Madhu.The latest application filed is for "atomic layer deposition of tungsten materials".
Patent | Date |
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Atomic layer deposition of tungsten materials Grant 8,513,116 - Khandelwal , et al. August 20, 2 | 2013-08-20 |
Atomic Layer Deposition Of Tungsten Materials App 20120244699 - KHANDELWAL; AMIT ;   et al. | 2012-09-27 |
Atomic layer deposition of tungsten materials Grant 8,211,799 - Khandelwal , et al. July 3, 2 | 2012-07-03 |
Atomic Layer Deposition Of Tungsten Materials App 20110244682 - KHANDELWAL; AMIT ;   et al. | 2011-10-06 |
Atomic layer deposition of tungsten materials Grant 7,964,505 - Khandelwal , et al. June 21, 2 | 2011-06-21 |
Methods for depositing tungsten layers employing atomic layer deposition techniques Grant 7,745,333 - Lai , et al. June 29, 2 | 2010-06-29 |
Ruthenium or cobalt as an underlayer for tungsten film deposition Grant 7,691,442 - Gandikota , et al. April 6, 2 | 2010-04-06 |
Ruthenium As An Underlayer For Tungsten Film Deposition App 20090142474 - Gandikota; Srinivas ;   et al. | 2009-06-04 |
Atomic Layer Deposition Of Tungsten Materials App 20090053893 - Khandelwal; Amit ;   et al. | 2009-02-26 |
Methods For Depositing Tungsten Layers Employing Atomic Layer Deposition Techniques App 20080280438 - Lai; Ken Kaung ;   et al. | 2008-11-13 |
Ruthenium as an underlayer for tungsten film deposition Grant 7,429,402 - Gandikota , et al. September 30, 2 | 2008-09-30 |
Methods for depositing tungsten layers employing atomic layer deposition techniques Grant 7,405,158 - Lai , et al. July 29, 2 | 2008-07-29 |
Ruthenium as an underlayer for tungsten film deposition App 20060128150 - Gandikota; Srinivas ;   et al. | 2006-06-15 |
Methods for depositing tungsten layers employing atomic layer deposition techniques App 20060009034 - Lai; Ken Kaung ;   et al. | 2006-01-12 |
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