Moors; Johannes Hubertus Josephina

Patent Applications and Registrations

Patent applications and USPTO patent grants for Moors; Johannes Hubertus Josephina.The latest application filed is for "prolonging optical element lifetime in an euv lithography system".

Company Profile

4.103.89

Moors; Johannes Hubertus Josephina - Helmond NL
Moors; Johannes Hubertus Josephina - Roosteren NL
Moors; Johannes Hubertus Josephina - MT Helmond NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Prolonging Optical Element Lifetime In An Euv Lithography System App 20220291591 - Ma; Yue ; et al.	2022-09-15
Prolonging optical element lifetime in an EUV lithography system Grant 11,340,532 - Ma , et al. May 24, 2	2022-05-24
Lithographic apparatus Grant 11,294,291 - Van De Kerkhof , et al. April 5, 2	2022-04-05
Prolonging Optical Element Lifetime In An Euv Lithography System App 20210109452 - Ma; Yue ; et al.	2021-04-15
Lithographic Apparatus App 20210026258 - Van De Kerkhof; Marcus Adrianus ; et al.	2021-01-28
Lithographic apparatus, a projection system and a device manufacturing method Grant 10,310,394 - Van De Vijver , et al.	2019-06-04
Radiation source Grant 10,222,702 - Bleeker , et al.	2019-03-05
Lithographic apparatus, spectral purity filter and device manufacturing method Grant 10,001,709 - Banine , et al. June 19, 2	2018-06-19
Optical element comprising oriented carbon nanotube sheet and lithographic apparatus comprising such optical element Grant 9,897,930 - Sjmaenok , et al. February 20, 2	2018-02-20
Radiation Source App 20180031979 - BLEEKER; Arno Jan ; et al.	2018-02-01
Lithographic Apparatus, Spectral Purity Filter and Device Manufacturing Method App 20170160646 - BANINE; Vadim Yevgenyevich ; et al.	2017-06-08
Radiation source Grant 9,632,419 - Van Schoot , et al. April 25, 2	2017-04-25
Lithographic Apparatus, A Projection System And A Device Manufacturing Method App 20170097579 - VAN DE VIJVER; Yuri Johannes Gabriel ; et al.	2017-04-06
Lithographic apparatus, spectral purity filter and device manufacturing method Grant 9,594,306 - Banine , et al. March 14, 2	2017-03-14
Radiation source, lithographic apparatus, and device manufacturing method Grant 9,529,283 - Yakunin , et al. December 27, 2	2016-12-27
Source-collector device, lithographic apparatus, and device manufacturing method Grant 9,411,238 - Yakunin , et al. August 9, 2	2016-08-09
Module and method for producing extreme ultraviolet radiation Grant 9,363,879 - Van Empel , et al. June 7, 2	2016-06-07
Radiation source with a debris mitigation system, lithographic apparatus with a debris mitigation system, method for preventing debris from depositing on collector mirror, and device manufacturing method Grant 9,207,548 - Banine , et al. December 8, 2	2015-12-08
Radiation source, lithographic apparatus and device manufacturing method Grant 9,164,403 - Kempen , et al. October 20, 2	2015-10-20
Module And Method For Producing Extreme Ultraviolet Radiation App 20150077729 - VAN EMPEL; Tjarko Adriaan Rudolf ; et al.	2015-03-19
Method for removing a contamination layer from an optical surface and arrangement therefor Grant 8,980,009 - Ehm , et al. March 17, 2	2015-03-17
Radiation source, lithographic apparatus and device manufacturing method Grant 8,946,661 - Loopstra , et al. February 3, 2	2015-02-03
Lithographic apparatus comprising an internal sensor and a mini-reactor, and method for treating a sensing surface of the internal sensor Grant 8,928,855 - Moors , et al. January 6, 2	2015-01-06
Source-collector Device, Lithographic Apparatus, And Device Manufacturing Method App 20140375974 - Yakunin; Andrei Mikhailovich ; et al.	2014-12-25
Module and method for producing extreme ultraviolet radiation Grant 8,901,521 - Van Empel , et al. December 2, 2	2014-12-02
Radiation Source App 20140253894 - Van Schoot; Jan Bernard Plechelmus ; et al.	2014-09-11
Lithographic Apparatus, Spectral Purity Filter and Device Manufacturing Method App 20140085619 - Banine; Vadim Yevgenyevich ; et al.	2014-03-27
Thermal conditioning system for thermal conditioning a part of a lithographic apparatus and a thermal conditioning method Grant 8,610,089 - Donders , et al. December 17, 2	2013-12-17
Radiation Source, Lithographic Apparatus And Device Manufacturing Method App 20130327955 - Loopstra; Erik Roelof ; et al.	2013-12-12
Optical arrangement, in particular projection exposure apparatus for EUV lithography, as well as reflective optical element with reduced contamination Grant 8,585,224 - Ehm , et al. November 19, 2	2013-11-19
Lithographic apparatus and contamination detection method Grant 8,547,551 - Bruinsma , et al. October 1, 2	2013-10-01
Radiation source and lithographic apparatus Grant 8,507,882 - Swinkels , et al. August 13, 2	2013-08-13
Method For Removing A Contamination Layer From An Optical Surface And Arrangement Therefor App 20130186430 - Ehm; Dirk Heinrich ; et al.	2013-07-25
Particle cleaning of optical elements for microlithography Grant 8,477,285 - Ehm , et al. July 2, 2	2013-07-02
Lithographic apparatus and method of manufacturing an electrostatic clamp for a lithographic apparatus Grant 8,476,167 - Van Mierlo , et al. July 2, 2	2013-07-02
Optical Arrangement, In Particular Projection Exposure Apparatus For Euv Lithography, As Well As Reflective Optical Element With Reduced Contamination App 20130148200 - Ehm; Dirk Heinrich ; et al.	2013-06-13
System and method for detecting at least one contamination species in a lithographic apparatus Grant 8,445,873 - Banine , et al. May 21, 2	2013-05-21
Lithographic apparatus comprising a magnet, method for the protection of a magnet in a lithographic apparatus and device manufacturing method Grant 8,446,560 - Moors , et al. May 21, 2	2013-05-21
Source module, radiation source and lithographic apparatus Grant 8,405,055 - Labetski , et al. March 26, 2	2013-03-26
Optical arrangement, in particular projection exposure apparatus for EUV lithography, as well as reflective optical element with reduced contamination Grant 8,382,301 - Ehm , et al. February 26, 2	2013-02-26
Radiation system and lithographic apparatus Grant 8,368,040 - Loopstra , et al. February 5, 2	2013-02-05
Optical element, lithographic apparatus including such an optical element, device manufacturing method, and device manufactured thereby Grant 8,345,223 - Soer , et al. January 1, 2	2013-01-01
Radiation Source, Lithographic Apparatus and Device Manufacturing Method App 20120295205 - Kempen; Antonius Theodorus Wilhelmus ; et al.	2012-11-22
Thermal Conditioning System For Thermal Conditioning A Part Of A Lithographic Apparatus And A Thermal Conditioning Method App 20120267550 - DONDERS; Sjoerd Nicolaas Lambertus ; et al.	2012-10-25
Method for removing contamination on optical surfaces and optical arrangement Grant 8,279,397 - Ehm , et al. October 2, 2	2012-10-02
System and Method for Detecting at Least One Contamination Species in a Lithographic Apparatus App 20120241610 - BANINE; Vadim Yevgenyevich ; et al.	2012-09-27
Illumination system and filter system Grant 8,269,179 - Wassink , et al. September 18, 2	2012-09-18
System and method for detecting at least one contamination species in a lithographic apparatus Grant 8,217,347 - Banine , et al. July 10, 2	2012-07-10
Lithographic apparatus and device manufacturing method Grant 8,094,288 - Banine , et al. January 10, 2	2012-01-10
Particle Cleaning Of Optical Elements For Microlithography App 20110188011 - EHM; Dirk Heinrich ; et al.	2011-08-04
Radiation Source, Lithographic Apparatus And Device Manufacturing Method App 20110188014 - Banine; Vadim Yevgenyevich ; et al.	2011-08-04
Radiation Source, Lithographic Apparatus, And Device Manufacturing Method App 20110143269 - Yakunin; Andrei Mikhailovich ; et al.	2011-06-16
Optical arrangement and EUV lithography device with at least one heated optical element, operating methods, and methods for cleaning as well as for providing an optical element Grant 7,959,310 - Ehm , et al. June 14, 2	2011-06-14
Lithographic Apparatus and Method of Manufacturing an Electrostatic Clamp for a Lithographic Apparatus App 20110126406 - VAN MIERLO; Hubert Adriaan ; et al.	2011-06-02
System and Method for Detecting at Least One Contamination Species in a Lithographic Apparatus App 20110121177 - BANINE; Vadim Yevgenyevich ; et al.	2011-05-26
Optical apparatus, lithographic apparatus and device manufacturing method Grant 7,935,218 - Moors , et al. May 3, 2	2011-05-03
Lithographic Apparatus And Contamination Detection Method App 20110090495 - Bruinsma; Anastasius Jacobus Anicetus ; et al.	2011-04-21
Lithographic apparatus, and device manufacturing method Grant 7,928,412 - Van Herpen , et al. April 19, 2	2011-04-19
Multilayer Mirror And Lithographic Apparatus App 20110080573 - Glushkov; Denis Alexandrovich ; et al.	2011-04-07
System and method for detecting at least one contamination species in a lithographic apparatus Grant 7,897,110 - Banine , et al. March 1, 2	2011-03-01
Lithographic Apparatus, Device Manufacturing Method, Cleaning System And Method For Cleaning A Patterning Device App 20110037960 - Scaccabarozzi; Luigi ; et al.	2011-02-17
Lithographic Apparatus Comprising An Internal Sensor And A Mini-reactor, And Method For Treating A Sensing Surface Of The Internal Sensor App 20110037961 - Moors; Johannes Hubertus Josephina ; et al.	2011-02-17
Optical Element, Lithographic Apparatus Including Such An Optical Element, Device Manufacturing Method, And Device Manufactured Thereby App 20110019174 - Soer; Wouter Anthon ; et al.	2011-01-27
Lithographic Apparatus Comprising A Magnet, Method For The Protection Of A Magnet In A Lithographic Apparatus And Device Manufacturing Method App 20110013157 - Moors; Johannes Hubertus Josephina ; et al.	2011-01-20
Radiation System And Lithographic Apparatus App 20110013166 - Loopstra; Erik Roelof ; et al.	2011-01-20
Method for removal of deposition on an optical element, lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 7,868,304 - Bakker , et al. January 11, 2	2011-01-11
Lithographic Apparatus, A Projection System And A Device Manufacturing Method App 20100309447 - Van de Vijver; Yuri Johannes Gabriel ; et al.	2010-12-09
Method for removing a contamination layer from an optical surface and arrangement therefor as well as a method for generating a cleaning gas and arrangement therefor App 20100288302 - Ehm; Dirk Heinrich ; et al.	2010-11-18
Extreme ultra-violet lithographic apparatus and device manufacturing method Grant 7,816,658 - Van Schoot , et al. October 19, 2	2010-10-19
Radical cleaning arrangement for a lithographic apparatus Grant 7,812,330 - Banine , et al. October 12, 2	2010-10-12
Assembly for detection of radiation flux and contamination of an optical component, lithographic apparatus including such an assembly and device manufacturing method Grant 7,800,079 - Banine , et al. September 21, 2	2010-09-21
Optical system for radiation in the EUV-wavelength range and method for measuring a contamination status of EUV-reflective elements Grant 7,763,870 - Ehm , et al. July 27, 2	2010-07-27
System for Contactless Cleaning, Lithographic Apparatus and Device Manufacturing Method App 20100151394 - Scaccabarozzi; Luigi ; et al.	2010-06-17
Lithographic apparatus and device manufacturing method Grant 7,714,306 - Moors , et al. May 11, 2	2010-05-11
Apparatus And Method For Measuring The Outgassing And Euv Lithography Apparatus App 20100112494 - Kraus; Dieter ; et al.	2010-05-06
Source Module, Radiation Source And Lithographic Apparatus App 20100085547 - Labetski; Dzmitry ; et al.	2010-04-08
Lithographic device, device manufacturing method and device manufactured thereby Grant 7,684,012 - Jacobs , et al. March 23, 2	2010-03-23
Radiation Source And Lithographic Apparatus App 20100053581 - SWINKELS; Gerardus Hubertus Petrus Maria ; et al.	2010-03-04
Cleaning method, apparatus and cleaning system Grant 7,671,347 - Ehm , et al. March 2, 2	2010-03-02
Multi-layer spectral purity filter, lithographic apparatus including such a spectral purity filter, device manufacturing method, and device manufactured thereby Grant 7,639,418 - Banine , et al. December 29, 2	2009-12-29
Method For Removing Contamination On Optical Surfaces And Optical Arrangement App 20090314931 - EHM; Dirk Heinrich ; et al.	2009-12-24
Lithographic apparatus, and device manufacturing method Grant 7,629,594 - Van Herpen , et al. December 8, 2	2009-12-08
Lithographic apparatus and cleaning method therefor Grant 7,598,503 - Van Herpen , et al. October 6, 2	2009-10-06
Optical Arrangement, In Particular Projection Exposure Apparatus For Euv Lithography, As Well As Reflective Optical Element With Reduced Contamination App 20090231707 - EHM; Dirk Heinrich ; et al.	2009-09-17
Lithographic Apparatus, and Device Manufacturing Method App 20090173360 - VAN HERPEN; Maarten Marinus Johannes Wilhelmus ; et al.	2009-07-09
Illumination system and filter system App 20090115980 - Wassink; Arnoud Cornelis ; et al.	2009-05-07
Module And Method For Producing Extreme Ultraviolet Radiation App 20090090877 - Van Empel; Tjarko Adriaan Rudolf ; et al.	2009-04-09
Lithographic apparatus and device manufacturing method Grant 7,515,245 - Moors , et al. April 7, 2	2009-04-07
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 7,508,487 - Mulkens , et al. March 24, 2	2009-03-24
Radical cleaning arrangement for a lithographic apparatus App 20090072168 - Banine; Vadim Yevgenyevich ; et al.	2009-03-19
Radiation source Grant 7,501,642 - Moors , et al. March 10, 2	2009-03-10
Lithographic apparatus, system and device manufacturing method Grant 7,491,951 - Van Der Velden , et al. February 17, 2	2009-02-17
Device manufacturing method, device manufactured thereby and a mask for use in the method Grant 7,492,443 - Van Der Werf , et al. February 17, 2	2009-02-17
Lithographic apparatus, illumination system, filter system and method for cooling a support of such a filter system Grant 7,485,881 - Wassink , et al. February 3, 2	2009-02-03
Getter and cleaning arrangement for a lithographic apparatus and method for cleaning a surface Grant 7,473,908 - Van Herpen , et al. January 6, 2	2009-01-06
Optical System For Radiation In The Euv-wavelength Range And Method For Measuring A Contamination Status Of Euv-reflective Elements App 20080315134 - EHM; Dirk Heinrich ; et al.	2008-12-25
Radical cleaning arrangement for a lithographic apparatus Grant 7,462,850 - Banine , et al. December 9, 2	2008-12-09
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 7,459,690 - Van Der Werf , et al. December 2, 2	2008-12-02
Lithographic apparatus and device manufacturing method App 20080259298 - Banine; Vadim Yevgenyevich ; et al.	2008-10-23
Method for the removal of deposition on an optical element, method for the protection of an optical element, device manufacturing method, apparatus including an optical element, and lithographic apparatus Grant 7,414,700 - Van Herpen , et al. August 19, 2	2008-08-19
Lithographic apparatus having a monitoring device for detecting contamination Grant 7,405,417 - Stevens , et al. July 29, 2	2008-07-29
Lithographic apparatus and method App 20080151201 - Storm; Arnoldus Jan ; et al.	2008-06-26
Multi-layer spectral purity filter, lithographic apparatus including such a spectral purity filter, device manufacturing method, and device manufactured thereby App 20080151361 - Banine; Vadim Yevgenyevich ; et al.	2008-06-26
Optical Arrangement And Euv Lithography Device With At Least One Heated Optical Element, Operating Methods, And Methods For Cleaning As Well As For Providing An Optical Element App 20080143981 - EHM; Dirk Heinrich ; et al.	2008-06-19
Multi-layer spectral purity filter, lithographic apparatus including such a spectral purity filter, device manufacturing method, and device manufactured thereby Grant 7,372,623 - Banine , et al. May 13, 2	2008-05-13
Lithographic system, method for adapting transmission characteristics of an optical pathway within a lithographic system, semiconductor device, method of manufacturing a reflective element for use in a lithographic system, and reflective element manufactured thereby Grant 7,369,216 - Moors , et al. May 6, 2	2008-05-06
Lithographic apparatus and device manufacturing method Grant 7,361,911 - Moors , et al. April 22, 2	2008-04-22
Cleaning method, apparatus and cleaning system App 20080083878 - Ehm; Dirk Heinrich ; et al.	2008-04-10
Lithographic apparatus, and device manufacturing method App 20080083885 - Wilhelmus Van Herpen; Maarten Marinus Johannes ; et al.	2008-04-10
Method for the removal of deposition on an optical element, method for the protection of an optical element, device manufacturing method, apparatus including an optical element, and lithographic apparatus Grant 7,355,672 - Van Herpen , et al. April 8, 2	2008-04-08
Lithographic apparatus and device manufacturing method App 20080054189 - Moors; Johannes Hubertus Josephina ; et al.	2008-03-06
Getter and cleaning arrangement for a lithographic apparatus and method for cleaning a surface App 20080011967 - Van Herpen; Maarten Marinus Johannes Wilhelmus ; et al.	2008-01-17
Lithographic apparatus and device manufacturing method Grant 7,279,690 - Bakker , et al. October 9, 2	2007-10-09
Radiation system and lithographic apparatus Grant 7,262,423 - Van Herpen , et al. August 28, 2	2007-08-28
Lithographic apparatus having a debris-mitigation system, a source for producing EUV radiation having a debris mitigation system and a method for mitigating debris Grant 7,251,012 - Banine , et al. July 31, 2	2007-07-31
Lithographic apparatus and patterning device transport Grant 7,248,340 - Ham , et al. July 24, 2	2007-07-24
Lithographic apparatus and device manufacturing method Grant 7,245,357 - Van Zwet , et al. July 17, 2	2007-07-17
Optical apparatus, lithographic apparatus and device manufacturing method App 20070158579 - Moors; Johannes Hubertus Josephina ; et al.	2007-07-12
Radiation source App 20070152175 - Moors; Johannes Hubertus Josephina ; et al.	2007-07-05
Lithographic apparatus and method of manufacturing an electrostatic clamp for a lithographic apparatus App 20070139855 - Van Mierlo; Hubert Adriaan ; et al.	2007-06-21
System and method for detecting at least one contamination species in a lithographic apparatus App 20070140910 - Banine; Vadim Yevgenyevich ; et al.	2007-06-21
Lithographic apparatus having a monitoring device for detecting contamination App 20070138414 - Stevens; Lucas Henricus Johannes ; et al.	2007-06-21
Radiation System And Lithographic Apparatus App 20070125963 - Van Herpen; Maarten Marinus Johannes Wilhelmus ; et al.	2007-06-07
Lithographic projection apparatus, device manufacturing method and device manufactured thereby App 20070085984 - Banine; Vadim Yevgenyevich ; et al.	2007-04-19
Lithographic apparatus and device manufacturing method Grant 7,202,934 - Moors , et al. April 10, 2	2007-04-10
Lithographic apparatus comprising an electrical discharge generator and method for cleaning an element of a lithographic apparatus App 20070062557 - Rakhimova; Tatyana Victorovna ; et al.	2007-03-22
Lithographic apparatus, illumination system and method for mitigating debris particles Grant 7,193,229 - Banine , et al. March 20, 2	2007-03-20
Lithographic apparatus and radiation source comprising a debris-mitigation system and method for mitigating debris particles in a lithographic apparatus Grant 7,167,232 - Banine , et al. January 23, 2	2007-01-23
Lithographic apparatus and cleaning method therefor App 20060289811 - Wilhelmus Van Herpen; Maarten Marinus Johannes ; et al.	2006-12-28
Lithographic apparatus and patterning device transport Grant 7,151,589 - Ham , et al. December 19, 2	2006-12-19
Lithographic device, device manufacturing method and device manufactured thereby App 20060268246 - Jacobs; Johannes Henricus Wilhelmus ; et al.	2006-11-30
Multi-layer spectral purity filter, lithographic apparatus including such a spectral purity filter, device manufacturing method, and device manufactured thereby App 20060221440 - Banine; Vadim Yevgenyevich ; et al.	2006-10-05
Lithographic apparatus and device manufacturing method App 20060219950 - Bakker; Levinus Pieter ; et al.	2006-10-05
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 7,098,994 - Moors , et al. August 29, 2	2006-08-29
Lithographic apparatus, device manufacturing method and device manufactured thereby Grant 7,095,479 - Stevens , et al. August 22, 2	2006-08-22
Calibration apparatus and method of calibrating a radiation sensor in a lithographic apparatus Grant 7,092,072 - Moors , et al. August 15, 2	2006-08-15
Lithographic apparatus and device manufacturing method Grant 7,088,431 - Ottens , et al. August 8, 2	2006-08-08
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 7,075,620 - Van Der Werf , et al. July 11, 2	2006-07-11
Lithographic apparatus, illumination system and method for mitigating debris particles App 20060138350 - Banine; Vadim Yevgenyevich ; et al.	2006-06-29
Lithographic apparatus, illumination system, filter system and method for cooling a support of such a filter system App 20060139604 - Wassink; Arnoud Cornelis ; et al.	2006-06-29
Lithographic apparatus and device manufacturing method App 20060131682 - Moors; Johannes Hubertus Josephina ; et al.	2006-06-22
Lithographic Apparatus And Device Manufacturing Method App 20060097201 - Neerhof; Hendrik Antony Johannes ; et al.	2006-05-11
Lithographic apparatus and device manufacturing method Grant 7,041,989 - Neerhof , et al. May 9, 2	2006-05-09
Lithographic system, method for adapting transmission characteristics of an optical pathway within a lithographic system, semiconductor device, method of manufacturing a reflective element for use in a lithographic system, and reflective element manufactured thereby App 20060082751 - Moors; Johannes Hubertus Josephina ; et al.	2006-04-20
Method for the removal of deposition on an optical element, method for the protection of an optical element, device manufacturing method, apparatus including an optical element, and lithographic apparatus App 20060072084 - Van Herpen; Maarten Marinus Johannes Wilhelmus ; et al.	2006-04-06
Calibration apparatus and method of calibrating a radiation sensor in a lithographic apparatus App 20060001856 - Moors; Johannes Hubertus Josephina ; et al.	2006-01-05
Lithographic apparatus and patterning device transport App 20050286041 - Ham, Erik Leonardus ; et al.	2005-12-29
Lithographic apparatus and patterning device transport App 20050286029 - Ham, Erik Leonardus ; et al.	2005-12-29
Lithographic apparatus and device manufacturing method Grant 6,980,281 - Moors , et al. December 27, 2	2005-12-27
Lithographic apparatus and a measurement system Grant 6,940,587 - Van Der Laan , et al. September 6, 2	2005-09-06
Lithographic apparatus and device manufacturing method App 20050162629 - Moors, Johannes Hubertus Josephina ; et al.	2005-07-28
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20050157284 - Moors, Johannes Hubertus Josephina ; et al.	2005-07-21
Lithographic apparatus and radiation source comprising a debris-mitigation system and method for mitigating debris particles in a lithographic apparatus App 20050139785 - Banine, Vadim Yevgenyevich ; et al.	2005-06-30
Assembly for detection of radiation flux and contamination of an optical component, lithographic apparatus including such an assembly and device manufacturing method App 20050133727 - Banine, Vadim Yevgenyevich ; et al.	2005-06-23
Lithographic apparatus and device manufacturing method App 20050134828 - Ottens, Joost Jeroen ; et al.	2005-06-23
Lithographic apparatus and device manufacturing method App 20050128459 - Zwet, Erwin Van ; et al.	2005-06-16
Lithographic apparatus and device manufacturing method App 20050083504 - Moors, Johannes Hubertus Josephina ; et al.	2005-04-21
Device manufacturing method, device manufactured thereby and a mask for use in the method Grant 6,879,374 - Van Der Werf , et al. April 12, 2	2005-04-12
Method and device for measuring contamination of a surface of a component of a lithographic apparatus App 20040227102 - Kurt, Ralph ; et al.	2004-11-18
Mask handling apparatus, lithographic projection apparatus, device manufacturing method and device manufactured thereby Grant 6,781,673 - Moors , et al. August 24, 2	2004-08-24
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20040160583 - Hubertus Mulkens, Johannes Catharinus ; et al.	2004-08-19
Lithographic apparatus and a measurement system App 20040114119 - Van Der Laan, Hans ; et al.	2004-06-17
Lithographic apparatus and device manufacturing method Grant 6,750,949 - Loopstra , et al. June 15, 2	2004-06-15
Lithographic apparatus and device manufacturing method Grant 6,741,329 - Leenders , et al. May 25, 2	2004-05-25
Lithographic projection apparatus and device manufacturing method Grant 6,597,431 - Benschop , et al. July 22, 2	2003-07-22
Lithographic apparatus and device manufacturing method App 20030063266 - Leenders, Martinus Hendrikue Antonius ; et al.	2003-04-03
Lithographic apparatus and device manufacturing method App 20030058422 - Loopstra, Erik Roelof ; et al.	2003-03-27
Device manufacturing method, device manufactured thereby and a mask for use in the method App 20030003383 - Van Der Werf, Jan Evert ; et al.	2003-01-02
Mask handling apparatus, lithographic projection apparatus, device manufacturing method and device manufactured thereby App 20020109828 - Moors, Johannes Hubertus Josephina ; et al.	2002-08-15
Mask handling apparatus, lithographic projection apparatus, device manufacturing method and device manufactured thereby App 20020096647 - Moors, Johannes Hubertus Josephina ; et al.	2002-07-25
Lithographic projection apparatus and device manufacturing method App 20020018194 - Benschop, Jozef Petrus Henricus ; et al.	2002-02-14