Patent | Date |
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Method and apparatus for gas flow control Grant 10,401,202 - Monkowski , et al. Sep | 2019-09-03 |
Method and apparatus for gas flow control Grant 9,983,595 - Monkowski , et al. May 29, 2 | 2018-05-29 |
Method and apparatus for gas flow control Grant 9,904,297 - Monkowski , et al. February 27, 2 | 2018-02-27 |
Method And Apparatus For Gas Flow Control App 20170052546 - Monkowski; Adam J. ;   et al. | 2017-02-23 |
Method And Apparatus For Gas Flow Control App 20170010625 - Monkowski; Joseph R. ;   et al. | 2017-01-12 |
Method and apparatus for gas flow control Grant 9,523,435 - Monkowski , et al. December 20, 2 | 2016-12-20 |
Transient measurements of mass flow controllers Grant 9,400,004 - Monkowski , et al. July 26, 2 | 2016-07-26 |
Method And Apparatus For Gas Flow Control App 20140367596 - Monkowski; Adam J. ;   et al. | 2014-12-18 |
Method And Apparatus For Gas Flow Control App 20140366952 - Monkowski; Adam J. ;   et al. | 2014-12-18 |
Method and apparatus for in situ testing of gas flow controllers Grant 8,857,456 - Monkowski , et al. October 14, 2 | 2014-10-14 |
Method and apparatus for in situ testing of gas flow controllers Grant 8,667,830 - Monkowski , et al. March 11, 2 | 2014-03-11 |
Method and apparatus for the measurement of atmospheric leaks in the presence of chamber outgassing Grant 8,393,197 - Monkowski , et al. March 12, 2 | 2013-03-12 |
Method And Apparatus For In Situ Testing Of Gas Flow Controllers App 20120304781 - MONKOWSKI; Joseph R. ;   et al. | 2012-12-06 |
Method and apparatus for enhancing in-situ gas flow measurement performance Grant 8,271,210 - Chung , et al. September 18, 2 | 2012-09-18 |
Method and apparatus for enhancing in-situ gas flow measurement performance Grant 8,271,211 - Chung , et al. September 18, 2 | 2012-09-18 |
Method and apparatus for enhancing in-situ gas flow measurement performance Grant 8,265,888 - Chung , et al. September 11, 2 | 2012-09-11 |
Method and apparatus for in situ testing of gas flow controllers Grant 8,240,324 - Monkowski , et al. August 14, 2 | 2012-08-14 |
Method and apparatus for identifying the chemical composition of a gas Grant 8,237,928 - Monkowski , et al. August 7, 2 | 2012-08-07 |
Transient Measurements Of Mass Flow Controllers App 20120132291 - MONKOWSKI; Joseph R. ;   et al. | 2012-05-31 |
Method And Apparatus For Identifying The Chemical Composition Of A Gas App 20110177625 - Monkowski; Joseph R. ;   et al. | 2011-07-21 |
Method And Apparatus For Enhancing In-situ Gas Flow Measurement Performance App 20110137581 - CHUNG; Sherk ;   et al. | 2011-06-09 |
Method And Apparatus For Enhancing In-situ Gas Flow Measurement Performance App 20110137583 - CHUNG; Sherk ;   et al. | 2011-06-09 |
Method And Apparatus For Enhancing In-situ Gas Flow Measurement Performance App 20110137582 - Chung; Sherk ;   et al. | 2011-06-09 |
Method And Apparatus For Gas Flow Control App 20110108126 - MONKOWSKI; Adam J. ;   et al. | 2011-05-12 |
Method and apparatus for identifying the chemical composition of a gas Grant 7,940,395 - Monkowski , et al. May 10, 2 | 2011-05-10 |
Method And Apparatus For In Situ Testing Of Gas Flow Controllers App 20110011183 - MONKOWSKI; Joseph R. ;   et al. | 2011-01-20 |
Method and apparatus for in situ testing of gas flow controllers Grant 7,823,436 - Monkowski , et al. November 2, 2 | 2010-11-02 |
Techniques for calibration of gas flows Grant 7,757,541 - Monkowski , et al. July 20, 2 | 2010-07-20 |
Use of modeled parameters for real-time semiconductor process metrology applied to semiconductor processes Grant 7,695,984 - Monkowski , et al. April 13, 2 | 2010-04-13 |
Method And Apparatus For The Measurement Of Atmospheric Leaks In The Presence Of Chamber Outgassing App 20100018293 - Monkowski; Joseph R. ;   et al. | 2010-01-28 |
Method And Apparatus For In Situ Testing Of Gas Flow Controllers App 20090183548 - Monkowski; Joseph R. ;   et al. | 2009-07-23 |
Method And Apparatus For In Situ Testing Of Gas Flow Controllers App 20090183549 - Monkowski; Joseph R. ;   et al. | 2009-07-23 |
Method And Apparatus For Identifying The Chemical Composition Of A Gas App 20090180113 - Monkowski; Joseph R. ;   et al. | 2009-07-16 |
Thermoelectric module having reduced spacing between semiconductor elements Grant 5,515,238 - Fritz , et al. May 7, 1 | 1996-05-07 |
Thermoelectric module having reduced spacing between semiconductor elements Grant 5,434,744 - Fritz , et al. July 18, 1 | 1995-07-18 |
Simultaneous glass deposition and viscoelastic flow process Grant 5,104,482 - Monkowski , et al. April 14, 1 | 1992-04-14 |
Chemical vapor deposition method Grant 5,091,219 - Monkowski , et al. * February 25, 1 | 1992-02-25 |
Chemical vapor deposition reactor and method of use thereof Grant 4,976,996 - Monkowski , et al. December 11, 1 | 1990-12-11 |