loadpatents
Patent applications and USPTO patent grants for Momonoi; Yoshinori.The latest application filed is for "charged particle beam apparatus".
Patent | Date |
---|---|
Charged particle beam apparatus Grant 10,714,304 - Fukuda , et al. | 2020-07-14 |
Charged particle beam apparatus Grant 10,665,420 - Takasugi , et al. | 2020-05-26 |
Charged particle beam device Grant 10,546,715 - Hoque , et al. Ja | 2020-01-28 |
Measurement device, calibration method of measurement device, and calibration member Grant 10,438,771 - Hatano , et al. O | 2019-10-08 |
Charged Particle Beam Apparatus App 20190304740 - FUKUDA; Muneyuki ;   et al. | 2019-10-03 |
Charged Particle Beam Apparatus App 20190295815 - TAKASUGI; Yasunori ;   et al. | 2019-09-26 |
Charged particle beam apparatus Grant 10,340,115 - Fukuda , et al. | 2019-07-02 |
Charged particle beam apparatus Grant 10,217,604 - Sakakibara , et al. Feb | 2019-02-26 |
Scanning electron microscope Grant 10,186,399 - Osaki , et al. Ja | 2019-01-22 |
Height measurement device and charged particle beam device Grant 10,101,150 - Kawada , et al. October 16, 2 | 2018-10-16 |
Charged Particle Beam Apparatus App 20180286629 - SAKAKIBARA; Makoto ;   et al. | 2018-10-04 |
Charged Particle Beam Device App 20180269026 - HOQUE; Shahedul ;   et al. | 2018-09-20 |
Charged Particle Beam Apparatus App 20180138010 - FUKUDA; Muneyuki ;   et al. | 2018-05-17 |
Charged particle beam apparatus Grant 9,892,887 - Fukuda , et al. February 13, 2 | 2018-02-13 |
Height Measurement Device and Charged Particle Beam Device App 20170343340 - KAWADA; Hiroki ;   et al. | 2017-11-30 |
Scanning Electron Microscope App 20170301513 - OSAKI; Mayuka ;   et al. | 2017-10-19 |
Charged Particle Beam Apparatus App 20170110285 - FUKUDA; Muneyuki ;   et al. | 2017-04-20 |
Measurement Device, Calibration Method Of Measurement Device, And Calibration Member App 20170092462 - HATANO; Michio ;   et al. | 2017-03-30 |
Pattern measuring apparatus, pattern measuring method, and computer-readable recording medium on which a pattern measuring program is recorded Grant 9,521,372 - Momonoi , et al. December 13, 2 | 2016-12-13 |
Scanning electron microscope Grant 9,472,376 - Yokosuka , et al. October 18, 2 | 2016-10-18 |
Semiconductor inspection device and semiconductor inspection method using the same Grant 9,123,504 - Yamaguchi , et al. September 1, 2 | 2015-09-01 |
Scanning Electron Microscope App 20150008322 - Yokosuka; Toshiyuki ;   et al. | 2015-01-08 |
Pattern Measuring Apparatus, Pattern Measuring Method, And Computer-readable Recording Medium On Which A Pattern Measuring Program Is Recorded App 20130321610 - Momonoi; Yoshinori ;   et al. | 2013-12-05 |
Apparatus for evaluating degradation of pattern features Grant 8,401,273 - Momonoi , et al. March 19, 2 | 2013-03-19 |
Semiconductor Inspection Device And Semiconductor Inspection Method Using The Same App 20120098954 - Yamaguchi; Atsuko ;   et al. | 2012-04-26 |
Apparatus For Evaluating Degradation Of Pattern Features App 20110176718 - MOMONOI; Yoshinori ;   et al. | 2011-07-21 |
Manufacturing method for semiconductor devices Grant 6,977,229 - Yokogawa , et al. December 20, 2 | 2005-12-20 |
Method for manufacturing semiconductor device Grant 6,713,401 - Yokogawa , et al. March 30, 2 | 2004-03-30 |
Manufacturing method for semiconductor devices App 20040018727 - Yokogawa, Kenetsu ;   et al. | 2004-01-29 |
Apparatus for cleaning semiconductor wafers in a vacuum environment Grant 6,643,893 - Momonoi , et al. November 11, 2 | 2003-11-11 |
Method for cleaning semiconductor wafers in a vacuum environment Grant 6,629,538 - Yokogawa , et al. October 7, 2 | 2003-10-07 |
Plasma processing system and method for manufacturing a semiconductor device by using the same Grant 6,551,445 - Yokogawa , et al. April 22, 2 | 2003-04-22 |
Plasma treatment apparatus and plasma treatment method Grant 6,475,918 - Izawa , et al. November 5, 2 | 2002-11-05 |
Dry cleaning apparatus App 20020092121 - Momonoi, Yoshinori ;   et al. | 2002-07-18 |
Method for manufacturing semiconductor device App 20020094691 - Yokogawa, Kenetsu ;   et al. | 2002-07-18 |
Dry cleaning method App 20020092541 - Yokogawa, Kenetsu ;   et al. | 2002-07-18 |
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