Momma; Toru

Patent Applications and Registrations

Patent applications and USPTO patent grants for Momma; Toru.The latest application filed is for "substrate cleaning device, substrate processing apparatus, substrate cleaning method and substrate processing method".

Company Profile

12.12.14

Momma; Toru - Kyoto JP
MOMMA; Toru - Kyoto-shi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Treating solution supply apparatus Grant 11,404,629 - Nishimura , et al. August 2, 2	2022-08-02
Substrate cleaning device, substrate processing apparatus, substrate cleaning method and substrate processing method Grant 11,203,094 - Murachi , et al. December 21, 2	2021-12-21
Pumping apparatus, treatment solution supplying device, and substrate treating apparatus Grant 11,000,783 - Nishimura , et al. May 11, 2	2021-05-11
Pumping apparatus, treatment solution supplying device, substrate treating apparatus, liquid draining method, and liquid replacing method Grant 10,920,764 - Nishimura , et al. February 16, 2	2021-02-16
Substrate Cleaning Device, Substrate Processing Apparatus, Substrate Cleaning Method And Substrate Processing Method App 20200230778 - MURACHI; Hiromi ; et al.	2020-07-23
Substrate cleaning device, substrate processing apparatus and substrate cleaning method Grant 10,668,591 - Murachi , et al.	2020-06-02
Treating liquid vaporizing apparatus Grant 10,651,056 - Tanaka , et al.	2020-05-12
Pumping apparatus and substrate treating apparatus Grant 10,627,836 - Momma , et al.	2020-04-21
Thermal processing apparatus and thermal processing method Grant 10,629,463 - Momma , et al.	2020-04-21
Substrate cleaning device and substrate processing apparatus including the same Grant 10,331,049 - Murachi , et al.	2019-06-25
Exposure device and substrate processing apparatus Grant 10,236,200 - Miyagi , et al.	2019-03-19
Pumping Apparatus, Treatment Solution Supplying Device, And Substrate Treating Apparatus App 20190060789 - NISHIMURA; Junki ; et al.	2019-02-28
Pumping Apparatus, Treatment Solution Supplying Device, Substrate Treating Apparatus, Liquid Draining Method, And Liquid Replacing Method App 20190063415 - NISHIMURA; Junki ; et al.	2019-02-28
Treating Solution Supply Apparatus App 20190060963 - NISHIMURA; Junki ; et al.	2019-02-28
Pumping Apparatus And Substrate Treating Apparatus App 20190064853 - MOMMA; Toru ; et al.	2019-02-28
Substrate treating apparatus and treatment gas supplying nozzle Grant 10,214,814 - Fukumoto , et al. Feb	2019-02-26
Exposure device, substrate processing apparatus, exposure method for substrate and substrate processing method Grant 9,972,516 - Miyagi , et al. May 15, 2	2018-05-15
Substrate Cleaning Device, Substrate Processing Apparatus And Substrate Cleaning Method App 20180071884 - MURACHI; Hiromi ; et al.	2018-03-15
Substrate Cleaning Device, Substrate Processing Apparatus, Substrate Cleaning Method And Substrate Processing Method App 20180071883 - Murachi; Hiromi ; et al.	2018-03-15
Substrate Cleaning Device And Substrate Processing Apparatus Including The Same App 20180067407 - MURACHI; Hiromi ; et al.	2018-03-08
Thermal Processing Apparatus And Thermal Processing Method App 20180033660 - MOMMA; Toru ; et al.	2018-02-01
Treating Liquid Vaporizing Apparatus And Substrate Treating Apparatus App 20170221731 - TANAKA; Atsushi ; et al.	2017-08-03
Nozzle Standby Device And Substrate Treating Apparatus App 20170128962 - KASHIYAMA; Masahito ; et al.	2017-05-11
Exposure Device And Substrate Processing Apparatus App 20160279651 - MIYAGI; Tadashi ; et al.	2016-09-29
Exposure Device, Substrate Processing Apparatus, Exposure Method For Substrate And Substrate Processing Method App 20160282725 - MIYAGI; Tadashi ; et al.	2016-09-29
Substrate Treating Apparatus And Treatment Gas Supplying Nozzle App 20160281235 - FUKUMOTO; Yasuhiro ; et al.	2016-09-29

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