| Patent | Date |
|---|
Method for in-die overlay control using FEOL dummy fill layer
Grant 10,115,621 - Moll , et al. October 30, 2 | 2018-10-30 |
Method For In-die Overlay Control Using Feol Dummy Fill Layer
App 20170330782 - MOLL; Peter ; et al. | 2017-11-16 |
Method of forming a semiconductor device and according semiconductor device
Grant 9,761,689 - Thurmer , et al. September 12, 2 | 2017-09-12 |
Method Of Forming A Semiconductor Device And According Semiconductor Device
App 20160079086 - Thurmer; Dominic ; et al. | 2016-03-17 |
Tensile nitride profile shaper etch to provide void free gapfill
Grant 9,196,684 - Frohberg , et al. November 24, 2 | 2015-11-24 |
Tensile Nitride Profile Shaper Etch To Provide Void Free Gapfill
App 20150303261 - FROHBERG; Kai ; et al. | 2015-10-22 |
Integrated circuits with close electrical contacts and methods for fabricating the same
Grant 9,159,661 - Frohberg , et al. October 13, 2 | 2015-10-13 |
Transistor Device With Strained Layer
App 20150179740 - Triyoso; Dina H. ; et al. | 2015-06-25 |
Integrated Circuits With Close Electrical Contacts And Methods For Fabricating The Same
App 20150137385 - Frohberg; Kai ; et al. | 2015-05-21 |
Method for producing a structure on the surface of a substrate
Grant 8,003,538 - Nolscher , et al. August 23, 2 | 2011-08-23 |
Method for fabricating a capacitor
Grant 7,863,149 - Kundalgurki , et al. January 4, 2 | 2011-01-04 |
Methods for forming an integrated circuit, including openings in a mold layer from nanowires or nanotubes
Grant 7,776,759 - Lahnor , et al. August 17, 2 | 2010-08-17 |
Storage capacitor, a memory device and a method of manufacturing the same
Grant 7,687,343 - Moll , et al. March 30, 2 | 2010-03-30 |
Method for forming a capacitor structure
Grant 7,615,444 - Wunnicke , et al. November 10, 2 | 2009-11-10 |
Method for manufacturing a capacitor electrode structure
Grant 7,544,562 - Moll , et al. June 9, 2 | 2009-06-09 |
Stacked capacitor array and fabrication method for a stacked capacitor array
Grant 7,456,461 - Gutsche , et al. November 25, 2 | 2008-11-25 |
Storage capacitor for semiconductor memory cells and method of manufacturing a storage capacitor
Grant 7,449,739 - Heitmann , et al. November 11, 2 | 2008-11-11 |
Method For Producing A Structure On The Surface Of A Substrate
App 20080206681 - Nolscher; Christoph ; et al. | 2008-08-28 |
Stacked capacitor and method for producing stacked capacitors for dynamic memory cells
Grant 7,413,951 - Kudelka , et al. August 19, 2 | 2008-08-19 |
Storage capacitor, a memory device and a method of manufacturing the same
App 20080128773 - Moll; Peter ; et al. | 2008-06-05 |
Method for producing a structure on the surface of a substrate
Grant 7,368,385 - Nolscher , et al. May 6, 2 | 2008-05-06 |
Method for manufacturing a capacitor electrode structure
App 20080006863 - Moll; Peter ; et al. | 2008-01-10 |
Method for forming a capacitor structure and a capacitor structure
App 20080003740 - Wunnicke; Odo ; et al. | 2008-01-03 |
Methods For Forming An Integrated Circuit, Including Openings In A Mold Layer
App 20070286945 - Lahnor; Peter ; et al. | 2007-12-13 |
Storage capacitor for semiconductor memory cells and method of manufacturing a storage capacitor
App 20070170487 - Heitmann; Johannes ; et al. | 2007-07-26 |
Stacked capacitor and method for producing stacked capacitors for dynamic memory cells
App 20070059893 - Kudelka; Stephan ; et al. | 2007-03-15 |
Method of forming electrodes
App 20070037349 - Gutsche; Martin ; et al. | 2007-02-15 |
Method for fabricating a capacitor
App 20060079049 - Kundalgurki; Srivatsa ; et al. | 2006-04-13 |
Method of producing a structure on the surface of a substrate
App 20060024621 - Nolscher; Christoph ; et al. | 2006-02-02 |
Selective plasma etching process for aluminum oxide patterning
App 20050056615 - Moll, Peter ; et al. | 2005-03-17 |
Method for trench etching
Grant 6,780,337 - Goldbach , et al. August 24, 2 | 2004-08-24 |
Method for fabricating a metal carbide layer and method for fabricating a trench capacitor containing a metal carbide
Grant 6,774,005 - Gutsche , et al. August 10, 2 | 2004-08-10 |
Method for fabricating a semiconductor configuration
App 20040063321 - Goebel, Bernd ; et al. | 2004-04-01 |
Method for trench etching
App 20030116532 - Goldbach, Matthias ; et al. | 2003-06-26 |
Method for fabricating gate oxides in surrounding gate DRAM concepts
App 20030062562 - Goebel, Bernd ; et al. | 2003-04-03 |
Method for manufacturing a conductor structure for an integrated circuit
Grant 6,541,372 - Wege , et al. April 1, 2 | 2003-04-01 |
Method for fabricating a metal carbide layer and method for fabricating a trench capacitor containing a metal carbide
App 20030022457 - Gutsche, Martin ; et al. | 2003-01-30 |
Method for manufacturing a conductor structure for an integrated circuit
App 20020009876 - Wege, Stephan ; et al. | 2002-01-24 |
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