Mok; Yeuk-Fai Edwin
Patent Applications and Registrations
Patent applications and USPTO patent grants for Mok; Yeuk-Fai Edwin.The latest application filed is for "electroless deposition apparatus".
- Mok; Yeuk-Fai Edwin - San Francisco CA
- Mok; Yeuk-Fai Edwin - Santa Clara CA
| Patent | Date |
|---|---|
| Two position anneal chamber Grant 7,311,810 - Mok , et al. December 25, 2 | 2007-12-25 |
| Multi-chemistry plating system Grant 7,223,323 - Yang , et al. May 29, 2 | 2007-05-29 |
| Electroless deposition apparatus Grant 7,138,014 - Stevens , et al. November 21, 2 | 2006-11-21 |
| Electroless deposition apparatus App 20050199489 - Stevens, Joseph J. ; et al. | 2005-09-15 |
| Method for removing electrolyte from electrical contacts and wafer touching areas Grant 6,869,516 - Lubomirsky , et al. March 22, 2 | 2005-03-22 |
| Electroless plating system Grant 6,824,612 - Stevens , et al. November 30, 2 | 2004-11-30 |
| Two position anneal chamber App 20040209414 - Mok, Yeuk-Fai Edwin ; et al. | 2004-10-21 |
| Method for removing electrolyte from electrical contacts and wafer touching areas App 20040074777 - Lubomirsky, Dmitry ; et al. | 2004-04-22 |
| Apparatus for wafer rinse and clean and edge etching Grant 6,689,418 - Olgado , et al. February 10, 2 | 2004-02-10 |
| Multi-chemistry plating system App 20040016637 - Yang, Michael X. ; et al. | 2004-01-29 |
| Integrated semiconductor substrate bevel cleaning apparatus and method App 20030213772 - Mok, Yeuk-Fai Edwin ; et al. | 2003-11-20 |
| Electroless deposition apparatus App 20030141018 - Stevens, Joseph J. ; et al. | 2003-07-31 |
| Electroless plating system App 20030118732 - Stevens, Joseph J. ; et al. | 2003-06-26 |
| Method and apparatus for transferring and supporting a substrate Grant 6,537,011 - Wang , et al. March 25, 2 | 2003-03-25 |
| Wafer chuck with plunger App 20030034617 - Donoso, Bernardo ; et al. | 2003-02-20 |
| Edge bead removal/spin rinse dry (EBR/SRD) module Grant 6,516,815 - Stevens , et al. February 11, 2 | 2003-02-11 |
| Apparatus for wafer rinse and clean and edge etching App 20030024557 - Olgado, Donald J.K. ; et al. | 2003-02-06 |
| Method and apparatus for thermal control of a semiconductor substrate Grant 6,466,426 - Mok , et al. October 15, 2 | 2002-10-15 |
| Integrated semiconductor substrate bevel cleaning apparatus and method App 20020113039 - Mok, Yeuk-Fai Edwin ; et al. | 2002-08-22 |
| Plasma reactor with internal inductive antenna capable of generating helicon wave Grant 6,178,920 - Ye , et al. January 30, 2 | 2001-01-30 |
| Plasma reactor with multiple small internal inductive antennas Grant 6,158,384 - Ye , et al. December 12, 2 | 2000-12-12 |
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