| Patent | Date |
|---|
Method For Reducing Lithography Defects and Pattern Transfer
App 20220244636 - Raley; Angelique D. ; et al. | 2022-08-04 |
Gas phase etching system and method
Grant 11,380,554 - Kal , et al. July 5, 2 | 2022-07-05 |
Method for reducing lithography defects and pattern transfer
Grant 11,333,968 - Raley , et al. May 17, 2 | 2022-05-17 |
GAS PHASE ETCH WITH CONTROLLABLE ETCH SELECTIVITY OF Si-CONTAINING ARC OR SILICON OXYNITRIDE TO DIFFERENT FILMS OR MASKS
App 20210217628 - KAL; Subhadeep ; et al. | 2021-07-15 |
Gas phase etch with controllable etch selectivity of Si-containing arc or silicon oxynitride to different films or masks
Grant 10,971,372 - Kal , et al. April 6, 2 | 2021-04-06 |
Extreme ultra-violet sensitivity reduction using shrink and growth method
Grant 10,935,889 - Huli , et al. March 2, 2 | 2021-03-02 |
Extension region for a semiconductor device
Grant 10,930,764 - Tapily , et al. February 23, 2 | 2021-02-23 |
Gas Phase Etching System And Method
App 20200176266 - KAL; Subhadeep ; et al. | 2020-06-04 |
Extension Region For A Semiconductor Device
App 20200098897 - Tapily; Kandabara ; et al. | 2020-03-26 |
Method for bottom-up formation of a film in a recessed feature
Grant 10,580,650 - O'Meara , et al. | 2020-03-03 |
Gas phase etching system and method
Grant 10,580,660 - Kal , et al. | 2020-03-03 |
Extension region for a semiconductor device
Grant 10,529,830 - Tapily , et al. J | 2020-01-07 |
Method for patterning a substrate using a layer with multiple materials
Grant 10,366,890 - deVilliers , et al. July 30, 2 | 2019-07-30 |
Organic mandrel protection process
Grant 10,354,873 - Ko , et al. July 16, 2 | 2019-07-16 |
Method for fully self-aligned via formation using a directed self assembly (DSA) process
Grant 10,319,637 - Mohanty , et al. | 2019-06-11 |
Self-aligned patterning process utilizing self-aligned blocking and spacer self-healing
Grant 10,256,110 - Mohanty | 2019-04-09 |
Method of reducing overlay error in via to grid patterning
Grant 10,256,140 - Mohanty | 2019-04-09 |
Methods for dry hard mask removal on a microelectronic substrate
Grant 10,236,186 - Mohanty | 2019-03-19 |
Methods of spin-on deposition of metal oxides
Grant 10,141,183 - Mohanty , et al. Nov | 2018-11-27 |
Methods of sub-resolution substrate patterning
Grant 10,083,842 - deVilliers , et al. September 25, 2 | 2018-09-25 |
Method For Reducing Lithography Defects and Pattern Transfer
App 20180239244 - Raley; Angelique D. ; et al. | 2018-08-23 |
Method for processing photoresist materials and structures
Grant 10,049,892 - Mohanty , et al. August 14, 2 | 2018-08-14 |
Three-dimensional semiconductor device and method of fabrication
Grant 9,997,598 - Smith , et al. June 12, 2 | 2018-06-12 |
Method for etch-based planarization of a substrate
Grant 9,991,133 - Pereira , et al. June 5, 2 | 2018-06-05 |
Method for Regulating Hardmask Over-Etch for Multi-Patterning Processes
App 20180138078 - Farrell; Richard ; et al. | 2018-05-17 |
Methods of Sub-Resolution Substrate Patterning
App 20180138051 - deVilliers; Anton J. ; et al. | 2018-05-17 |
Method For Fully Self-aligned Via Formation Using A Directed Self Assembly (dsa) Process
App 20180130708 - Mohanty; Nihar ; et al. | 2018-05-10 |
Method of Reducing Overlay Error in Via to Grid Patterning
App 20180114721 - Mohanty; Nihar | 2018-04-26 |
Method for Self-Aligned Cutting of Single Fins
App 20180114699 - Mohanty; Nihar | 2018-04-26 |
Self-Aligned Patterning Process Utilizing Self-Aligned Blocking and Spacer Self-Healing
App 20180061658 - Mohanty; Nihar | 2018-03-01 |
Method For Etch-based Planarization Of A Substrate
App 20180047584 - Pereira; Cheryl ; et al. | 2018-02-15 |
Extension Region For A Semiconductor Device
App 20180047832 - TAPILY; Kandabara ; et al. | 2018-02-15 |
Three-dimensional Semiconductor Device And Method Of Fabrication
App 20180040695 - Smith; Jeffrey ; et al. | 2018-02-08 |
Organic Mandrel Protection Process
App 20170358450 - Ko; Akiteru ; et al. | 2017-12-14 |
Method for Patterning a Substrate Using a Layer with Multiple Materials
App 20170338116 - deVilliers; Anton J. ; et al. | 2017-11-23 |
Method for modifying spacer profile
Grant 9,812,325 - Mohanty , et al. November 7, 2 | 2017-11-07 |
Method For Bottom-up Formation Of A Film In A Recessed Feature
App 20170294312 - O'Meara; David L. ; et al. | 2017-10-12 |
Method for increasing pattern density in self-aligned patterning schemes without using hard masks
Grant 9,786,503 - Raley , et al. October 10, 2 | 2017-10-10 |
Method and system for selective spacer etch for multi-patterning schemes
Grant 9,748,110 - Kal , et al. August 29, 2 | 2017-08-29 |
Methods of Spin-on Deposition of Metal Oxides
App 20170221704 - Mohanty; Nihar ; et al. | 2017-08-03 |
Method for Modifying Spacer Profile
App 20170069495 - Mohanty; Nihar ; et al. | 2017-03-09 |
Method And System For Selective Spacer Etch For Multi-patterning Schemes
App 20170069510 - Kal; Subhadeep ; et al. | 2017-03-09 |
Gas Phase Etching System And Method
App 20160379835 - Kal; Subhadeep ; et al. | 2016-12-29 |
GAS PHASE ETCH WITH CONTROLLABLE ETCH SELECTIVITY OF Si-CONTAINING ARC OR SILICON OXYNITRIDE TO DIFFERENT FILMS OR MASKS
App 20160379842 - Kal; Subhadeep ; et al. | 2016-12-29 |
Direct current superposition curing for resist reflow temperature enhancement
Grant 9,520,270 - Mohanty , et al. December 13, 2 | 2016-12-13 |
Extreme Ultra-violet Sensitivity Reduction Using Shrink And Growth Method
App 20160334709 - Huli; Lior ; et al. | 2016-11-17 |
Method for Processing Photoresist Materials and Structures
App 20160329207 - Mohanty; Nihar ; et al. | 2016-11-10 |
Method for directed self-assembly and pattern curing
Grant 9,478,435 - Mohanty October 25, 2 | 2016-10-25 |
Method For Increasing Pattern Density In Self-aligned Patterning Schemes Without Using Hard Masks
App 20160300718 - Raley; Angelique D. ; et al. | 2016-10-13 |
Production of graphene nanoribbons with controlled dimensions and crystallographic orientation
Grant 9,272,911 - Berry , et al. March 1, 2 | 2016-03-01 |
Method for Directed Self-Assembly and Pattern Curing
App 20160042971 - Mohanty; Nihar | 2016-02-11 |
Methods for Dry Hard Mask Removal on a Microelectronic Substrate
App 20160042969 - Mohanty; Nihar | 2016-02-11 |
Direct Current Superposition Curing for Resist Reflow Temperature Enhancement
App 20160023238 - Mohanty; Nihar ; et al. | 2016-01-28 |
Production Of Graphene Nanoribbons With Controlled Dimensions And Crystallographic Orientation
App 20120272868 - Berry; Vikas ; et al. | 2012-11-01 |
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