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Patent applications and USPTO patent grants for Mogab; Cyril J..The latest application filed is for "method for the optical monitoring of plasma discharge processing operations".
Patent | Date |
---|---|
Method for the optical monitoring of plasma discharge processing operations Grant 4,312,732 - Degenkolb , et al. January 26, 1 | 1982-01-26 |
Selective plasma etching of dielectric masks in the presence of native oxides of group III-V compound semiconductors Grant 4,227,975 - Hartman , et al. October 14, 1 | 1980-10-14 |
Device fabrication by plasma etching Grant 4,226,665 - Mogab October 7, 1 | 1980-10-07 |
Device fabrication by plasma etching Grant 4,211,601 - Mogab July 8, 1 | 1980-07-08 |
Device fabrication by plasma etching Grant 4,208,241 - Harshbarger , et al. June 17, 1 | 1980-06-17 |
Radial flow reactor including glow discharge limitting shield Grant RE30,244 - Alexander, Jr. , et al. April 1, 1 | 1980-04-01 |
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