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Pulse Train Annealing Method And Apparatus App 20210220949 - MOFFATT; Stephen ;   et al. | 2021-07-22 |
Pulse train annealing method and apparatus Grant 11,040,415 - Moffatt , et al. June 22, 2 | 2021-06-22 |
Method of thermal processing structures formed on a substrate Grant 10,840,100 - Carey , et al. November 17, 2 | 2020-11-17 |
Apparatus and methods for pulsed photo-excited deposition and etch Grant 10,508,341 - Moffatt Dec | 2019-12-17 |
Apparatus and methods for photo-excitation processes Grant 10,370,762 - Moffatt | 2019-08-06 |
Method Of Thermal Processing Structures Formed On A Substrate App 20190139773 - CAREY; Paul ;   et al. | 2019-05-09 |
Gas Injector With Baffle App 20190105614 - PANDEY; Vishwas Kumar ;   et al. | 2019-04-11 |
Thermal processing apparatus Grant 10,181,409 - Moffatt , et al. Ja | 2019-01-15 |
Method of thermal processing structures formed on a substrate Grant 10,141,191 - Carey , et al. Nov | 2018-11-27 |
Visual feedback for process control in RTP chambers Grant 10,109,514 - Vellore , et al. October 23, 2 | 2018-10-23 |
Ambient laminar gas flow distribution in laser processing systems Grant 10,094,618 - Moffatt , et al. October 9, 2 | 2018-10-09 |
Apparatus And Method To Measure Temperature Of 3d Semiconductor Structures Via Laser Diffraction App 20180283957 - PAN; Heng ;   et al. | 2018-10-04 |
Apparatus And Methods For Photo-excitation Processes App 20180274099 - MOFFATT; Stephen | 2018-09-27 |
Methods for crystallizing a substrate using a plurality of laser pulses and freeze periods Grant 10,074,538 - Adams , et al. September 11, 2 | 2018-09-11 |
Photonic activation of reactants for sub-micron feature formation using depleted beams Grant 10,061,208 - Mack , et al. August 28, 2 | 2018-08-28 |
Photonic Activation Of Reactants For Sub-micron Feature Formation Using Depleted Beams App 20180143537 - MACK; James Francis ;   et al. | 2018-05-24 |
Process sheet resistance uniformity improvement using multiple melt laser exposures Grant 9,953,851 - Li , et al. April 24, 2 | 2018-04-24 |
Multiple beam combiner for laser processing apparatus Grant 9,927,622 - Moffatt , et al. March 27, 2 | 2018-03-27 |
Apparatus and method to measure temperature of 3D semiconductor structures via laser diffraction Grant 9,909,925 - Pan , et al. March 6, 2 | 2018-03-06 |
Apparatus and method of improving beam shaping and beam homogenization Grant 9,908,200 - Adams , et al. March 6, 2 | 2018-03-06 |
Apparatus and method for speckle reduction in laser processing equipment Grant 9,904,069 - Moffatt February 27, 2 | 2018-02-27 |
Photonic activation of reactants for sub-micron feature formation using depleted beams Grant 9,869,938 - Mack , et al. January 16, 2 | 2018-01-16 |
Hdd Pattern Implant System App 20170365288 - Foad; Majeed A. ;   et al. | 2017-12-21 |
Visual Feedback For Process Control In Rtp Chambers App 20170345693 - VELLORE; Kim ;   et al. | 2017-11-30 |
Integration Of Laser Processing With Deposition Of Electrochemical Device Layers App 20170306474 - KWAK; Byung-Sung Leo ;   et al. | 2017-10-26 |
Oriented Laser Activated Processing Chamber App 20170271131 - MOFFATT; Stephen ;   et al. | 2017-09-21 |
Broadband laser source for laser thermal processing and photonically activated processes Grant 9,762,021 - Moffatt September 12, 2 | 2017-09-12 |
Visual feedback for process control in RTP chambers Grant 9,735,034 - Vellore , et al. August 15, 2 | 2017-08-15 |
HDD pattern implant system Grant 9,685,186 - Foad , et al. June 20, 2 | 2017-06-20 |
Semiconductor Processing Method And Semiconductor Device App 20170148726 - MOFFATT; Stephen ;   et al. | 2017-05-25 |
Ambient Laminar Gas Flow Distribution In Laser Processing Systems App 20170082367 - MOFFATT; Stephen ;   et al. | 2017-03-23 |
Pulse Train Annealing Method And Apparatus App 20170072505 - MOFFATT; Stephen ;   et al. | 2017-03-16 |
Managing thermal budget in annealing of substrates Grant 9,595,459 - Moffatt , et al. March 14, 2 | 2017-03-14 |
Process Sheet Resistance Uniformity Improvement Using Multiple Melt Laser Exposures App 20170040194 - LI; Jiping ;   et al. | 2017-02-09 |
Ambient laminar gas flow distribution in laser processing systems Grant 9,557,111 - Moffatt , et al. January 31, 2 | 2017-01-31 |
Pulse train annealing method and apparatus Grant 9,498,845 - Moffatt , et al. November 22, 2 | 2016-11-22 |
Methods for photo-excitation of precursors in epitaxial processes using a rotary scanning unit Grant 9,499,909 - Moffatt November 22, 2 | 2016-11-22 |
Crystallization Methods App 20160293414 - ADAMS; Bruce E. ;   et al. | 2016-10-06 |
Crystallization processing for semiconductor applications Grant 9,455,145 - Moffatt September 27, 2 | 2016-09-27 |
Apparatus And Method For Speckle Reduction In Laser Processing Equipment App 20160252745 - MOFFATT; Stephen | 2016-09-01 |
Magnetic Field Guided Crystal Orientation System For Metal Conductivity Enhancement App 20160208415 - Bencher; Christopher Dennis ;   et al. | 2016-07-21 |
Process sheet resistance uniformity improvement using multiple melt laser exposures Grant 9,390,926 - Li , et al. July 12, 2 | 2016-07-12 |
Magneto-thermal processing apparatus and methods Grant 9,376,731 - Moffatt June 28, 2 | 2016-06-28 |
Methods for crystallizing a substrate using energy pulses and freeze periods Grant 9,373,511 - Adams , et al. June 21, 2 | 2016-06-21 |
Crystallization Processing For Semiconductor Applications App 20160155638 - MOFFATT; Stephen | 2016-06-02 |
Multiple Beam Combiner For Laser Processing Apparatus App 20160139417 - Moffatt; Stephen ;   et al. | 2016-05-19 |
Apparatus and method for speckle reduction in laser processing equipment Grant 9,341,858 - Moffatt May 17, 2 | 2016-05-17 |
Crystallization processing for semiconductor applications Grant 9,290,858 - Moffatt March 22, 2 | 2016-03-22 |
Multiple beam combiner for laser processing apparatus Grant 9,285,595 - Moffatt , et al. March 15, 2 | 2016-03-15 |
Pulse Train Annealing Method And Apparatus App 20160023302 - MOFFATT; STEPHEN ;   et al. | 2016-01-28 |
Scanned Pulse Anneal Apparatus And Methods App 20160020117 - HUNTER; Aaron Muir ;   et al. | 2016-01-21 |
Broadband Laser Source For Laser Thermal Processing And Photonically Activated Processes App 20160013610 - MOFFATT; STEPHEN | 2016-01-14 |
Apparatus And Methods For Pulsed Photo-excited Deposition And Etch App 20150368800 - MOFFATT; Stephen | 2015-12-24 |
Managing Thermal Budget In Annealing Of Substrates App 20150357215 - MOFFATT; STEPHEN ;   et al. | 2015-12-10 |
Laser crystallization and polycrystal efficiency improvement for thin film solar Grant 9,209,347 - Moffatt December 8, 2 | 2015-12-08 |
Apparatus for speckle reduction, pulse stretching, and beam homogenization Grant 9,146,337 - Li , et al. September 29, 2 | 2015-09-29 |
Apparatus and methods for pulsed photo-excited deposition and etch Grant 9,123,527 - Moffatt September 1, 2 | 2015-09-01 |
Managing thermal budget in annealing of substrates Grant 9,114,479 - Moffatt , et al. August 25, 2 | 2015-08-25 |
Apparatus and method for speckle reduction in laser processing equipment Grant 9,069,183 - Moffatt June 30, 2 | 2015-06-30 |
Multiple Beam Combiner For Laser Processing Apparatus App 20150124329 - MOFFATT; Stephen ;   et al. | 2015-05-07 |
Apparatus and methods for microwave processing of semiconductor substrates Grant 9,018,110 - Stowell , et al. April 28, 2 | 2015-04-28 |
Method And Apparatus For Direct Formation Of Nanometer Scaled Features App 20150087136 - MACK; James Francis ;   et al. | 2015-03-26 |
Multiple beam combiner for laser processing apparatus Grant 8,970,963 - Moffatt , et al. March 3, 2 | 2015-03-03 |
Apparatus And Method Of Improving Beam Shaping And Beam Homogenization App 20150053658 - ADAMS; Bruce E. ;   et al. | 2015-02-26 |
Apparatus and methods to manufacture high density magnetic media Grant 8,956,562 - Moffatt February 17, 2 | 2015-02-17 |
Visual Feedback For Process Control In Rtp Chambers App 20150041453 - VELLORE; Kim ;   et al. | 2015-02-12 |
Photonic Activation Of Reactants For Sub-micron Feature Formation Using Depleted Beams App 20150042973 - MACK; James Francis ;   et al. | 2015-02-12 |
Crystallization Processing For Semiconductor Applications App 20150013588 - MOFFATT; Stephen | 2015-01-15 |
Crystallization processing for semiconductor applications Grant 8,906,725 - Moffatt December 9, 2 | 2014-12-09 |
Apparatus And Methods For Photo-excitation Processes App 20140273416 - MOFFATT; STEPHEN | 2014-09-18 |
Apparatus And Methods For Pulsed Photo-excited Deposition And Etch App 20140263180 - MOFFATT; STEPHEN | 2014-09-18 |
Process Sheet Resistance Uniformity Improvement Using Multiple Melt Laser Exposures App 20140256161 - LI; Jiping ;   et al. | 2014-09-11 |
Apparatus For Speckle Reduction, Pulse Stretching, And Beam Homogenization App 20140254022 - LI; Jiping ;   et al. | 2014-09-11 |
Apparatus and method of improving beam shaping and beam homogenization Grant 8,829,392 - Adams , et al. September 9, 2 | 2014-09-09 |
Defect-free junction formation using octadecaborane self-amorphizing implants Grant 8,815,719 - Li , et al. August 26, 2 | 2014-08-26 |
Managing Thermal Budget In Annealing Of Substrates App 20140209583 - MOFFATT; Stephen ;   et al. | 2014-07-31 |
Aperture control of thermal processing radiation Grant 8,785,815 - Sade , et al. July 22, 2 | 2014-07-22 |
Apparatus And Method For Speckle Reduction In Laser Processing Equipment App 20140192533 - MOFFATT; Stephen | 2014-07-10 |
Pulse Train Annealing Method And Apparatus App 20140158674 - MOFFATT; STEPHEN ;   et al. | 2014-06-12 |
Crystallization Processing For Semiconductor Applications App 20140150712 - MOFFATT; Stephen | 2014-06-05 |
Thermal Treatment Methods And Apparatus App 20140148017 - ADAMS; Bruce E. ;   et al. | 2014-05-29 |
Novel Thermal Processing Apparatus App 20140138362 - MOFFATT; Stephen ;   et al. | 2014-05-22 |
Use of infrared camera for real-time temperature monitoring and control Grant 8,724,976 - Merry , et al. May 13, 2 | 2014-05-13 |
Crystallization processing for semiconductor applications Grant 8,691,605 - Moffatt April 8, 2 | 2014-04-08 |
Method and apparatus for decorrelation of spatially and temporally coherent light Grant 8,693,095 - Jennings , et al. April 8, 2 | 2014-04-08 |
Laser beam positioning system Grant 8,692,151 - Tertitski , et al. April 8, 2 | 2014-04-08 |
Pulse Train Annealing Method And Apparatus App 20140073145 - Moffatt; Stephen ;   et al. | 2014-03-13 |
Apparatus And Methods For Microwave Processing Of Semiconductor Substrates App 20140038431 - Stowell; Michael W. ;   et al. | 2014-02-06 |
Method For Partitioning And Incoherently Summing A Coherent Beam App 20140009829 - JENNINGS; Dean ;   et al. | 2014-01-09 |
Aperture Control Of Thermal Preocessing Radiation App 20130340495 - Sade; Amikam ;   et al. | 2013-12-26 |
Magneto-thermal Processing Apparatus And Methods App 20130300040 - MOFFATT; Stephen | 2013-11-14 |
Thermal processing apparatus Grant 8,569,187 - Moffatt , et al. October 29, 2 | 2013-10-29 |
Method of thermal processing structures formed on a substrate Grant 8,518,838 - Carey , et al. August 27, 2 | 2013-08-27 |
Multiple Beam Combiner For Laser Processing Apparatus App 20130163091 - MOFFATT; STEPHEN ;   et al. | 2013-06-27 |
Method And Apparatus For Decorrelation Of Spatially And Temporally Coherent Light App 20130141788 - JENNINGS; Dean ;   et al. | 2013-06-06 |
Crystallization Processing For Semiconductor Applications App 20130143417 - MOFFATT; STEPHEN | 2013-06-06 |
Broadband Laser Source For Laser Thermal Processing And Photonically Activated Processes App 20130128905 - MOFFATT; STEPHEN | 2013-05-23 |
Apparatus And Method To Measure Temperature Of 3d Semiconductor Structures Via Laser Diffraction App 20130120737 - Pan; Heng ;   et al. | 2013-05-16 |
Laser Crystallization And Polycrystal Efficiency Improvement For Thin Film Solar App 20130109122 - Moffatt; Stephen | 2013-05-02 |
HDD pattern apparatus using laser, E-beam, or focused ion beam Grant 8,431,911 - Foad , et al. April 30, 2 | 2013-04-30 |
Apparatus And Method For Speckle Reduction In Laser Processing Equipment App 20130077315 - MOFFATT; STEPHEN | 2013-03-28 |
Suitably short wavelength light for laser annealing of silicon in DSA type systems Grant 8,405,175 - Moffatt March 26, 2 | 2013-03-26 |
LED substrate processing Grant 8,404,499 - Moffatt March 26, 2 | 2013-03-26 |
Apparatus And Methods To Manufacture High Density Magnetic Media App 20130062320 - Moffatt; Stephen | 2013-03-14 |
Crystallization Methods App 20130055731 - Adams; Bruce E. ;   et al. | 2013-03-07 |
Fiber laser substrate processing Grant 8,372,667 - Moffatt February 12, 2 | 2013-02-12 |
Method and apparatus for decorrelation of spatially and temporally coherent light Grant 8,363,320 - Jennings , et al. January 29, 2 | 2013-01-29 |
Novel Thermal Processing Apparatus App 20120329178 - Moffatt; Stephen ;   et al. | 2012-12-27 |
Novel Thermal Processing Apparatus App 20120325784 - Moffatt; Stephen ;   et al. | 2012-12-27 |
Pulse Circulator App 20120312790 - MOFFATT; STEPHEN | 2012-12-13 |
Crystallization processing for semiconductor applications Grant 8,313,965 - Moffatt November 20, 2 | 2012-11-20 |
Managing thermal budget in annealing of substrates Grant 8,314,369 - Moffatt , et al. November 20, 2 | 2012-11-20 |
Ambient Laminar Gas Flow Distribution In Laser Processing Systems App 20120214112 - Moffatt; Stephen ;   et al. | 2012-08-23 |
Methods of solid phase recrystallization of thin film using pulse train annealing method Grant 8,247,317 - Moffatt , et al. August 21, 2 | 2012-08-21 |
Defect-free Junction Formation Using Octadecaborane Self-amorphizing Implants App 20120190182 - LI; JIPING ;   et al. | 2012-07-26 |
Use Of Infrared Camera For Real-time Temperature Monitoring And Control App 20120183915 - Merry; Nir ;   et al. | 2012-07-19 |
Defect-free Junction Formation Using Octadecaborane Self-amorphizing Implants App 20120171853 - Li; Jiping ;   et al. | 2012-07-05 |
Method Of Thermal Processing Structures Formed On A Substrate App 20120145684 - Carey; Paul ;   et al. | 2012-06-14 |
Apparatus And Method Of Improving Beam Shaping And Beam Homogenization App 20120148701 - Adams; Bruce E. ;   et al. | 2012-06-14 |
Use of infrared camera for real-time temperature monitoring and control Grant 8,150,242 - Merry , et al. April 3, 2 | 2012-04-03 |
Apparatus and method of improving beam shaping and beam homogenization Grant 8,148,663 - Adams , et al. April 3, 2 | 2012-04-03 |
Laser Beam Positioning System App 20110239421 - Tertitski; Leonid M. ;   et al. | 2011-10-06 |
Suitably Short Wavelength Light For Laser Annealing Of Silicon In Dsa Type Systems App 20110204045 - MOFFATT; STEPHEN | 2011-08-25 |
Method And Apparatus For Decorrelation Of Spatially And Temporally Coherent Light App 20110199683 - Jennings; Dean ;   et al. | 2011-08-18 |
Crystallization Processing For Semiconductor Applications App 20110129959 - Moffatt; Stephen | 2011-06-02 |
Suitably short wavelength light for laser annealing of silicon in DSA type systems Grant 7,947,584 - Moffatt May 24, 2 | 2011-05-24 |
Defect-free Junction Formation Using Octadecaborane Self-amorphizing Implants App 20110070724 - Li; Jiping ;   et al. | 2011-03-24 |
Methods Of Solid Phase Recrystallization Of Thin Film Using Pulse Train Annealing Method App 20110065264 - MOFFATT; STEPHEN ;   et al. | 2011-03-17 |
Method Of Thermal Processing Structures Formed On A Substrate App 20100323532 - Carey; Paul ;   et al. | 2010-12-23 |
Pulse Train Annealing Method And Apparatus App 20100297856 - Moffatt; Stephen ;   et al. | 2010-11-25 |
Fiber Laser Substrate Processing App 20100267173 - Moffatt; Stephen | 2010-10-21 |
LED Substrate Processing App 20100267174 - Moffatt; Stephen | 2010-10-21 |
Hdd Pattern Apparatus Using Laser, E-beam, Or Focused Ion Beam App 20100258758 - Foad; Majeed A. ;   et al. | 2010-10-14 |
Use Special Ion Source Apparatus And Implant With Molecular Ions To Process Hdd (high Density Magnetic Disks) With Patterned Magnetic Domains App 20100258431 - Moffatt; Stephen ;   et al. | 2010-10-14 |
Pulse train annealing method and apparatus Grant 7,800,081 - Moffatt , et al. September 21, 2 | 2010-09-21 |
High speed phase scrambling of a coherent beam using plasma Grant 7,795,816 - Jennings , et al. September 14, 2 | 2010-09-14 |
Hdd Pattern Implant System App 20100221583 - Foad; Majeed A. ;   et al. | 2010-09-02 |
Methods for surface activation by plasma immersion ion implantation process utilized in silicon-on-insulator structure Grant 7,745,309 - Thakur , et al. June 29, 2 | 2010-06-29 |
Use Of Infrared Camera For Real-time Temperature Monitoring And Control App 20100111511 - Merry; Nir ;   et al. | 2010-05-06 |
Managing Thermal Budget In Annealing Of Substrates App 20100065547 - MOFFATT; STEPHEN ;   et al. | 2010-03-18 |
Managing Thermal Budget In Annealing Of Substrates App 20100068898 - MOFFATT; STEPHEN ;   et al. | 2010-03-18 |
Suitably Short Wavelength Light For Laser Annealing Of Silicon In Dsa Type Systems App 20090275215 - MOFFATT; STEPHEN | 2009-11-05 |
Embedded Waveguide Detectors App 20090269878 - Leon; Francisco A. ;   et al. | 2009-10-29 |
Method of thermal processing structures formed on a substrate Grant 7,569,463 - Balakrishna , et al. August 4, 2 | 2009-08-04 |
Pulse Train Annealing Method And Apparatus App 20090121157 - MOFFATT; STEPHEN ;   et al. | 2009-05-14 |
Pulse Train Annealing Method And Apparatus App 20090120924 - MOFFATT; STEPHEN ;   et al. | 2009-05-14 |
High Speed Phase Scrambling Of A Coherent Beam Using Plasma App 20090091817 - Jennings; Dean ;   et al. | 2009-04-09 |
Method And Apparatus For Decorrelation Of Spatially And Temporally Coherent Light App 20090034072 - Jennings; Dean ;   et al. | 2009-02-05 |
Apparatus and method of improving beam shaping and beam homogenization App 20090032511 - Adams; Bruce E. ;   et al. | 2009-02-05 |
Method For Partitioning And Incoherently Summing A Coherent Beam App 20090034071 - JENNINGS; DEAN ;   et al. | 2009-02-05 |
Methods For Substrate Surface Cleaning Suitable For Fabricating Silicon-on-insulator Structures App 20080268617 - Thakur; Randhir P. S. ;   et al. | 2008-10-30 |
Substrate holder which is self-adjusting for substrate deformation Grant 7,372,690 - Moffatt May 13, 2 | 2008-05-13 |
Methods For Surface Activation By Plasma Immersion Ion Implantation Process Utilized In Silicon-on-insulator Structure App 20080038900 - Thakur; Randhir P S ;   et al. | 2008-02-14 |
Apparatus For Thermal Processing Structures Formed On A Substrate App 20070221640 - Jennings; Dean ;   et al. | 2007-09-27 |
Method Of Thermal Processing Structures Formed On A Substrate App 20070218644 - Balakrishna; Ajit ;   et al. | 2007-09-20 |
Method Of Thermal Processing Structures Formed On A Substrate App 20070212859 - CAREY; Paul ;   et al. | 2007-09-13 |
Methods And Apparatus For Epitaxial Film Formation App 20070117414 - Moffatt; Stephen ;   et al. | 2007-05-24 |
Embedded waveguide detectors App 20070018270 - Leon; Francisco A. ;   et al. | 2007-01-25 |
Impurity-based waveguide detectors Grant 7,151,881 - West , et al. December 19, 2 | 2006-12-19 |
Embedded waveguide detectors Grant 7,075,165 - Leon , et al. July 11, 2 | 2006-07-11 |
Substrate holder which is self-adjusting for substrate deformation App 20050199825 - Moffatt, Stephen | 2005-09-15 |
Structures useful in electron beam lithography Grant 6,919,150 - Guo , et al. July 19, 2 | 2005-07-19 |
Substrate holder for retaining a substrate within a processing chamber Grant 6,909,588 - Moffatt June 21, 2 | 2005-06-21 |
Impurity-based waveguide detectors App 20050053347 - West, Lawrence C. ;   et al. | 2005-03-10 |
Embedded waveguide detectors App 20050051767 - Leon, Francisco A. ;   et al. | 2005-03-10 |
Structures useful in electron beam lithography App 20040169008 - Guo, Cheng ;   et al. | 2004-09-02 |
Methods for fabricating lithography apparatus Grant 6,746,805 - Guo , et al. June 8, 2 | 2004-06-08 |
Substrate holder for retaining a substrate within a processing chamber App 20040084633 - Moffatt, Stephen | 2004-05-06 |
Method and apparatus for neutralizing space charge in an ion beam Grant 6,359,286 - Ito , et al. March 19, 2 | 2002-03-19 |
Electron flood apparatus for neutralizing charge build-up on a substrate during ion implantation Grant 6,100,536 - Ito , et al. August 8, 2 | 2000-08-08 |
Ion implanter with post mass selection deceleration Grant 5,969,366 - England , et al. October 19, 1 | 1999-10-19 |
Ion implantation apparatus and a method of monitoring high energy neutral contamination in an ion implantation process Grant 5,883,391 - Adibi , et al. March 16, 1 | 1999-03-16 |
System and methods for wafer charge reduction for ion implantation Grant 4,825,087 - Renau , et al. April 25, 1 | 1989-04-25 |