loadpatents
name:-0.12160181999207
name:-0.08934497833252
name:-0.0080821514129639
Moffatt; Stephen Patent Filings

Moffatt; Stephen

Patent Applications and Registrations

Patent applications and USPTO patent grants for Moffatt; Stephen.The latest application filed is for "supplemental energy for low temperature processes".

Company Profile
7.99.118
  • Moffatt; Stephen - St. Brelade JE
  • Moffatt; Stephen - St. Lawrence N/A JE
  • Moffatt; Stephen - Jersey Channel Islands GB
  • Moffatt; Stephen - Jersey GB
  • Moffatt; Stephen - Channel Islands GB
  • Moffatt; Stephen - Millbrook GB
  • Moffatt; Stephen - US
  • Moffatt; Stephen - Jersey City NJ
  • Moffatt; Stephen - New York NY
  • Moffatt; Stephen - Surrey GB
  • Moffatt; Stephen - Bookham GB
  • Moffatt; Stephen - Byfleet GB2
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Stacked pixel structure formed using epitaxy
Grant 11,411,039 - Chen , et al. August 9, 2
2022-08-09
Display screen or portion thereof with graphical user interface
Grant D959,490 - Shah , et al. August 2, 2
2022-08-02
Plasma-enhanced anneal chamber for wafer outgassing
Grant 11,348,769 - Hawrylchak , et al. May 31, 2
2022-05-31
Supplemental Energy For Low Temperature Processes
App 20220162756 - CARLSON; David K. ;   et al.
2022-05-26
Enhanced Process And Hardware Architecture To Detect And Correct Realtime Product Substrates
App 20220122865 - Santhanam; Kartik ;   et al.
2022-04-21
Antifragile Systems For Semiconductor Processing Equipment Using Multiple Special Sensors And Algorithms
App 20220084842 - Hilkene; Martin ;   et al.
2022-03-17
Semiconductor Processing Tools With Improved Performance By Use Of Hybrid Learning Models
App 20220035979 - Moffatt; Stephen ;   et al.
2022-02-03
Stacked Pixel Structure Formed Using Epitaxy
App 20210366976 - CHEN; Papo ;   et al.
2021-11-25
Gas Injector With Baffle
App 20210322934 - PANDEY; Vishwas Kumar ;   et al.
2021-10-21
Gas injector with baffle
Grant 11,077,410 - Pandey , et al. August 3, 2
2021-08-03
Pulse Train Annealing Method And Apparatus
App 20210220949 - MOFFATT; Stephen ;   et al.
2021-07-22
Pulse train annealing method and apparatus
Grant 11,040,415 - Moffatt , et al. June 22, 2
2021-06-22
Method of thermal processing structures formed on a substrate
Grant 10,840,100 - Carey , et al. November 17, 2
2020-11-17
Apparatus and methods for pulsed photo-excited deposition and etch
Grant 10,508,341 - Moffatt Dec
2019-12-17
Apparatus and methods for photo-excitation processes
Grant 10,370,762 - Moffatt
2019-08-06
Method Of Thermal Processing Structures Formed On A Substrate
App 20190139773 - CAREY; Paul ;   et al.
2019-05-09
Gas Injector With Baffle
App 20190105614 - PANDEY; Vishwas Kumar ;   et al.
2019-04-11
Thermal processing apparatus
Grant 10,181,409 - Moffatt , et al. Ja
2019-01-15
Method of thermal processing structures formed on a substrate
Grant 10,141,191 - Carey , et al. Nov
2018-11-27
Visual feedback for process control in RTP chambers
Grant 10,109,514 - Vellore , et al. October 23, 2
2018-10-23
Ambient laminar gas flow distribution in laser processing systems
Grant 10,094,618 - Moffatt , et al. October 9, 2
2018-10-09
Apparatus And Method To Measure Temperature Of 3d Semiconductor Structures Via Laser Diffraction
App 20180283957 - PAN; Heng ;   et al.
2018-10-04
Apparatus And Methods For Photo-excitation Processes
App 20180274099 - MOFFATT; Stephen
2018-09-27
Methods for crystallizing a substrate using a plurality of laser pulses and freeze periods
Grant 10,074,538 - Adams , et al. September 11, 2
2018-09-11
Photonic activation of reactants for sub-micron feature formation using depleted beams
Grant 10,061,208 - Mack , et al. August 28, 2
2018-08-28
Photonic Activation Of Reactants For Sub-micron Feature Formation Using Depleted Beams
App 20180143537 - MACK; James Francis ;   et al.
2018-05-24
Process sheet resistance uniformity improvement using multiple melt laser exposures
Grant 9,953,851 - Li , et al. April 24, 2
2018-04-24
Multiple beam combiner for laser processing apparatus
Grant 9,927,622 - Moffatt , et al. March 27, 2
2018-03-27
Apparatus and method to measure temperature of 3D semiconductor structures via laser diffraction
Grant 9,909,925 - Pan , et al. March 6, 2
2018-03-06
Apparatus and method of improving beam shaping and beam homogenization
Grant 9,908,200 - Adams , et al. March 6, 2
2018-03-06
Apparatus and method for speckle reduction in laser processing equipment
Grant 9,904,069 - Moffatt February 27, 2
2018-02-27
Photonic activation of reactants for sub-micron feature formation using depleted beams
Grant 9,869,938 - Mack , et al. January 16, 2
2018-01-16
Hdd Pattern Implant System
App 20170365288 - Foad; Majeed A. ;   et al.
2017-12-21
Visual Feedback For Process Control In Rtp Chambers
App 20170345693 - VELLORE; Kim ;   et al.
2017-11-30
Integration Of Laser Processing With Deposition Of Electrochemical Device Layers
App 20170306474 - KWAK; Byung-Sung Leo ;   et al.
2017-10-26
Oriented Laser Activated Processing Chamber
App 20170271131 - MOFFATT; Stephen ;   et al.
2017-09-21
Broadband laser source for laser thermal processing and photonically activated processes
Grant 9,762,021 - Moffatt September 12, 2
2017-09-12
Visual feedback for process control in RTP chambers
Grant 9,735,034 - Vellore , et al. August 15, 2
2017-08-15
HDD pattern implant system
Grant 9,685,186 - Foad , et al. June 20, 2
2017-06-20
Semiconductor Processing Method And Semiconductor Device
App 20170148726 - MOFFATT; Stephen ;   et al.
2017-05-25
Ambient Laminar Gas Flow Distribution In Laser Processing Systems
App 20170082367 - MOFFATT; Stephen ;   et al.
2017-03-23
Pulse Train Annealing Method And Apparatus
App 20170072505 - MOFFATT; Stephen ;   et al.
2017-03-16
Managing thermal budget in annealing of substrates
Grant 9,595,459 - Moffatt , et al. March 14, 2
2017-03-14
Process Sheet Resistance Uniformity Improvement Using Multiple Melt Laser Exposures
App 20170040194 - LI; Jiping ;   et al.
2017-02-09
Ambient laminar gas flow distribution in laser processing systems
Grant 9,557,111 - Moffatt , et al. January 31, 2
2017-01-31
Pulse train annealing method and apparatus
Grant 9,498,845 - Moffatt , et al. November 22, 2
2016-11-22
Methods for photo-excitation of precursors in epitaxial processes using a rotary scanning unit
Grant 9,499,909 - Moffatt November 22, 2
2016-11-22
Crystallization Methods
App 20160293414 - ADAMS; Bruce E. ;   et al.
2016-10-06
Crystallization processing for semiconductor applications
Grant 9,455,145 - Moffatt September 27, 2
2016-09-27
Apparatus And Method For Speckle Reduction In Laser Processing Equipment
App 20160252745 - MOFFATT; Stephen
2016-09-01
Magnetic Field Guided Crystal Orientation System For Metal Conductivity Enhancement
App 20160208415 - Bencher; Christopher Dennis ;   et al.
2016-07-21
Process sheet resistance uniformity improvement using multiple melt laser exposures
Grant 9,390,926 - Li , et al. July 12, 2
2016-07-12
Magneto-thermal processing apparatus and methods
Grant 9,376,731 - Moffatt June 28, 2
2016-06-28
Methods for crystallizing a substrate using energy pulses and freeze periods
Grant 9,373,511 - Adams , et al. June 21, 2
2016-06-21
Crystallization Processing For Semiconductor Applications
App 20160155638 - MOFFATT; Stephen
2016-06-02
Multiple Beam Combiner For Laser Processing Apparatus
App 20160139417 - Moffatt; Stephen ;   et al.
2016-05-19
Apparatus and method for speckle reduction in laser processing equipment
Grant 9,341,858 - Moffatt May 17, 2
2016-05-17
Crystallization processing for semiconductor applications
Grant 9,290,858 - Moffatt March 22, 2
2016-03-22
Multiple beam combiner for laser processing apparatus
Grant 9,285,595 - Moffatt , et al. March 15, 2
2016-03-15
Pulse Train Annealing Method And Apparatus
App 20160023302 - MOFFATT; STEPHEN ;   et al.
2016-01-28
Scanned Pulse Anneal Apparatus And Methods
App 20160020117 - HUNTER; Aaron Muir ;   et al.
2016-01-21
Broadband Laser Source For Laser Thermal Processing And Photonically Activated Processes
App 20160013610 - MOFFATT; STEPHEN
2016-01-14
Apparatus And Methods For Pulsed Photo-excited Deposition And Etch
App 20150368800 - MOFFATT; Stephen
2015-12-24
Managing Thermal Budget In Annealing Of Substrates
App 20150357215 - MOFFATT; STEPHEN ;   et al.
2015-12-10
Laser crystallization and polycrystal efficiency improvement for thin film solar
Grant 9,209,347 - Moffatt December 8, 2
2015-12-08
Apparatus for speckle reduction, pulse stretching, and beam homogenization
Grant 9,146,337 - Li , et al. September 29, 2
2015-09-29
Apparatus and methods for pulsed photo-excited deposition and etch
Grant 9,123,527 - Moffatt September 1, 2
2015-09-01
Managing thermal budget in annealing of substrates
Grant 9,114,479 - Moffatt , et al. August 25, 2
2015-08-25
Apparatus and method for speckle reduction in laser processing equipment
Grant 9,069,183 - Moffatt June 30, 2
2015-06-30
Multiple Beam Combiner For Laser Processing Apparatus
App 20150124329 - MOFFATT; Stephen ;   et al.
2015-05-07
Apparatus and methods for microwave processing of semiconductor substrates
Grant 9,018,110 - Stowell , et al. April 28, 2
2015-04-28
Method And Apparatus For Direct Formation Of Nanometer Scaled Features
App 20150087136 - MACK; James Francis ;   et al.
2015-03-26
Multiple beam combiner for laser processing apparatus
Grant 8,970,963 - Moffatt , et al. March 3, 2
2015-03-03
Apparatus And Method Of Improving Beam Shaping And Beam Homogenization
App 20150053658 - ADAMS; Bruce E. ;   et al.
2015-02-26
Apparatus and methods to manufacture high density magnetic media
Grant 8,956,562 - Moffatt February 17, 2
2015-02-17
Visual Feedback For Process Control In Rtp Chambers
App 20150041453 - VELLORE; Kim ;   et al.
2015-02-12
Photonic Activation Of Reactants For Sub-micron Feature Formation Using Depleted Beams
App 20150042973 - MACK; James Francis ;   et al.
2015-02-12
Crystallization Processing For Semiconductor Applications
App 20150013588 - MOFFATT; Stephen
2015-01-15
Crystallization processing for semiconductor applications
Grant 8,906,725 - Moffatt December 9, 2
2014-12-09
Apparatus And Methods For Photo-excitation Processes
App 20140273416 - MOFFATT; STEPHEN
2014-09-18
Apparatus And Methods For Pulsed Photo-excited Deposition And Etch
App 20140263180 - MOFFATT; STEPHEN
2014-09-18
Process Sheet Resistance Uniformity Improvement Using Multiple Melt Laser Exposures
App 20140256161 - LI; Jiping ;   et al.
2014-09-11
Apparatus For Speckle Reduction, Pulse Stretching, And Beam Homogenization
App 20140254022 - LI; Jiping ;   et al.
2014-09-11
Apparatus and method of improving beam shaping and beam homogenization
Grant 8,829,392 - Adams , et al. September 9, 2
2014-09-09
Defect-free junction formation using octadecaborane self-amorphizing implants
Grant 8,815,719 - Li , et al. August 26, 2
2014-08-26
Managing Thermal Budget In Annealing Of Substrates
App 20140209583 - MOFFATT; Stephen ;   et al.
2014-07-31
Aperture control of thermal processing radiation
Grant 8,785,815 - Sade , et al. July 22, 2
2014-07-22
Apparatus And Method For Speckle Reduction In Laser Processing Equipment
App 20140192533 - MOFFATT; Stephen
2014-07-10
Pulse Train Annealing Method And Apparatus
App 20140158674 - MOFFATT; STEPHEN ;   et al.
2014-06-12
Crystallization Processing For Semiconductor Applications
App 20140150712 - MOFFATT; Stephen
2014-06-05
Thermal Treatment Methods And Apparatus
App 20140148017 - ADAMS; Bruce E. ;   et al.
2014-05-29
Novel Thermal Processing Apparatus
App 20140138362 - MOFFATT; Stephen ;   et al.
2014-05-22
Use of infrared camera for real-time temperature monitoring and control
Grant 8,724,976 - Merry , et al. May 13, 2
2014-05-13
Crystallization processing for semiconductor applications
Grant 8,691,605 - Moffatt April 8, 2
2014-04-08
Method and apparatus for decorrelation of spatially and temporally coherent light
Grant 8,693,095 - Jennings , et al. April 8, 2
2014-04-08
Laser beam positioning system
Grant 8,692,151 - Tertitski , et al. April 8, 2
2014-04-08
Pulse Train Annealing Method And Apparatus
App 20140073145 - Moffatt; Stephen ;   et al.
2014-03-13
Apparatus And Methods For Microwave Processing Of Semiconductor Substrates
App 20140038431 - Stowell; Michael W. ;   et al.
2014-02-06
Method For Partitioning And Incoherently Summing A Coherent Beam
App 20140009829 - JENNINGS; Dean ;   et al.
2014-01-09
Aperture Control Of Thermal Preocessing Radiation
App 20130340495 - Sade; Amikam ;   et al.
2013-12-26
Magneto-thermal Processing Apparatus And Methods
App 20130300040 - MOFFATT; Stephen
2013-11-14
Thermal processing apparatus
Grant 8,569,187 - Moffatt , et al. October 29, 2
2013-10-29
Method of thermal processing structures formed on a substrate
Grant 8,518,838 - Carey , et al. August 27, 2
2013-08-27
Multiple Beam Combiner For Laser Processing Apparatus
App 20130163091 - MOFFATT; STEPHEN ;   et al.
2013-06-27
Method And Apparatus For Decorrelation Of Spatially And Temporally Coherent Light
App 20130141788 - JENNINGS; Dean ;   et al.
2013-06-06
Crystallization Processing For Semiconductor Applications
App 20130143417 - MOFFATT; STEPHEN
2013-06-06
Broadband Laser Source For Laser Thermal Processing And Photonically Activated Processes
App 20130128905 - MOFFATT; STEPHEN
2013-05-23
Apparatus And Method To Measure Temperature Of 3d Semiconductor Structures Via Laser Diffraction
App 20130120737 - Pan; Heng ;   et al.
2013-05-16
Laser Crystallization And Polycrystal Efficiency Improvement For Thin Film Solar
App 20130109122 - Moffatt; Stephen
2013-05-02
HDD pattern apparatus using laser, E-beam, or focused ion beam
Grant 8,431,911 - Foad , et al. April 30, 2
2013-04-30
Apparatus And Method For Speckle Reduction In Laser Processing Equipment
App 20130077315 - MOFFATT; STEPHEN
2013-03-28
Suitably short wavelength light for laser annealing of silicon in DSA type systems
Grant 8,405,175 - Moffatt March 26, 2
2013-03-26
LED substrate processing
Grant 8,404,499 - Moffatt March 26, 2
2013-03-26
Apparatus And Methods To Manufacture High Density Magnetic Media
App 20130062320 - Moffatt; Stephen
2013-03-14
Crystallization Methods
App 20130055731 - Adams; Bruce E. ;   et al.
2013-03-07
Fiber laser substrate processing
Grant 8,372,667 - Moffatt February 12, 2
2013-02-12
Method and apparatus for decorrelation of spatially and temporally coherent light
Grant 8,363,320 - Jennings , et al. January 29, 2
2013-01-29
Novel Thermal Processing Apparatus
App 20120329178 - Moffatt; Stephen ;   et al.
2012-12-27
Novel Thermal Processing Apparatus
App 20120325784 - Moffatt; Stephen ;   et al.
2012-12-27
Pulse Circulator
App 20120312790 - MOFFATT; STEPHEN
2012-12-13
Crystallization processing for semiconductor applications
Grant 8,313,965 - Moffatt November 20, 2
2012-11-20
Managing thermal budget in annealing of substrates
Grant 8,314,369 - Moffatt , et al. November 20, 2
2012-11-20
Ambient Laminar Gas Flow Distribution In Laser Processing Systems
App 20120214112 - Moffatt; Stephen ;   et al.
2012-08-23
Methods of solid phase recrystallization of thin film using pulse train annealing method
Grant 8,247,317 - Moffatt , et al. August 21, 2
2012-08-21
Defect-free Junction Formation Using Octadecaborane Self-amorphizing Implants
App 20120190182 - LI; JIPING ;   et al.
2012-07-26
Use Of Infrared Camera For Real-time Temperature Monitoring And Control
App 20120183915 - Merry; Nir ;   et al.
2012-07-19
Defect-free Junction Formation Using Octadecaborane Self-amorphizing Implants
App 20120171853 - Li; Jiping ;   et al.
2012-07-05
Method Of Thermal Processing Structures Formed On A Substrate
App 20120145684 - Carey; Paul ;   et al.
2012-06-14
Apparatus And Method Of Improving Beam Shaping And Beam Homogenization
App 20120148701 - Adams; Bruce E. ;   et al.
2012-06-14
Use of infrared camera for real-time temperature monitoring and control
Grant 8,150,242 - Merry , et al. April 3, 2
2012-04-03
Apparatus and method of improving beam shaping and beam homogenization
Grant 8,148,663 - Adams , et al. April 3, 2
2012-04-03
Laser Beam Positioning System
App 20110239421 - Tertitski; Leonid M. ;   et al.
2011-10-06
Suitably Short Wavelength Light For Laser Annealing Of Silicon In Dsa Type Systems
App 20110204045 - MOFFATT; STEPHEN
2011-08-25
Method And Apparatus For Decorrelation Of Spatially And Temporally Coherent Light
App 20110199683 - Jennings; Dean ;   et al.
2011-08-18
Crystallization Processing For Semiconductor Applications
App 20110129959 - Moffatt; Stephen
2011-06-02
Suitably short wavelength light for laser annealing of silicon in DSA type systems
Grant 7,947,584 - Moffatt May 24, 2
2011-05-24
Defect-free Junction Formation Using Octadecaborane Self-amorphizing Implants
App 20110070724 - Li; Jiping ;   et al.
2011-03-24
Methods Of Solid Phase Recrystallization Of Thin Film Using Pulse Train Annealing Method
App 20110065264 - MOFFATT; STEPHEN ;   et al.
2011-03-17
Method Of Thermal Processing Structures Formed On A Substrate
App 20100323532 - Carey; Paul ;   et al.
2010-12-23
Pulse Train Annealing Method And Apparatus
App 20100297856 - Moffatt; Stephen ;   et al.
2010-11-25
Fiber Laser Substrate Processing
App 20100267173 - Moffatt; Stephen
2010-10-21
LED Substrate Processing
App 20100267174 - Moffatt; Stephen
2010-10-21
Hdd Pattern Apparatus Using Laser, E-beam, Or Focused Ion Beam
App 20100258758 - Foad; Majeed A. ;   et al.
2010-10-14
Use Special Ion Source Apparatus And Implant With Molecular Ions To Process Hdd (high Density Magnetic Disks) With Patterned Magnetic Domains
App 20100258431 - Moffatt; Stephen ;   et al.
2010-10-14
Pulse train annealing method and apparatus
Grant 7,800,081 - Moffatt , et al. September 21, 2
2010-09-21
High speed phase scrambling of a coherent beam using plasma
Grant 7,795,816 - Jennings , et al. September 14, 2
2010-09-14
Hdd Pattern Implant System
App 20100221583 - Foad; Majeed A. ;   et al.
2010-09-02
Methods for surface activation by plasma immersion ion implantation process utilized in silicon-on-insulator structure
Grant 7,745,309 - Thakur , et al. June 29, 2
2010-06-29
Use Of Infrared Camera For Real-time Temperature Monitoring And Control
App 20100111511 - Merry; Nir ;   et al.
2010-05-06
Managing Thermal Budget In Annealing Of Substrates
App 20100065547 - MOFFATT; STEPHEN ;   et al.
2010-03-18
Managing Thermal Budget In Annealing Of Substrates
App 20100068898 - MOFFATT; STEPHEN ;   et al.
2010-03-18
Suitably Short Wavelength Light For Laser Annealing Of Silicon In Dsa Type Systems
App 20090275215 - MOFFATT; STEPHEN
2009-11-05
Embedded Waveguide Detectors
App 20090269878 - Leon; Francisco A. ;   et al.
2009-10-29
Method of thermal processing structures formed on a substrate
Grant 7,569,463 - Balakrishna , et al. August 4, 2
2009-08-04
Pulse Train Annealing Method And Apparatus
App 20090121157 - MOFFATT; STEPHEN ;   et al.
2009-05-14
Pulse Train Annealing Method And Apparatus
App 20090120924 - MOFFATT; STEPHEN ;   et al.
2009-05-14
High Speed Phase Scrambling Of A Coherent Beam Using Plasma
App 20090091817 - Jennings; Dean ;   et al.
2009-04-09
Method And Apparatus For Decorrelation Of Spatially And Temporally Coherent Light
App 20090034072 - Jennings; Dean ;   et al.
2009-02-05
Apparatus and method of improving beam shaping and beam homogenization
App 20090032511 - Adams; Bruce E. ;   et al.
2009-02-05
Method For Partitioning And Incoherently Summing A Coherent Beam
App 20090034071 - JENNINGS; DEAN ;   et al.
2009-02-05
Methods For Substrate Surface Cleaning Suitable For Fabricating Silicon-on-insulator Structures
App 20080268617 - Thakur; Randhir P. S. ;   et al.
2008-10-30
Substrate holder which is self-adjusting for substrate deformation
Grant 7,372,690 - Moffatt May 13, 2
2008-05-13
Methods For Surface Activation By Plasma Immersion Ion Implantation Process Utilized In Silicon-on-insulator Structure
App 20080038900 - Thakur; Randhir P S ;   et al.
2008-02-14
Apparatus For Thermal Processing Structures Formed On A Substrate
App 20070221640 - Jennings; Dean ;   et al.
2007-09-27
Method Of Thermal Processing Structures Formed On A Substrate
App 20070218644 - Balakrishna; Ajit ;   et al.
2007-09-20
Method Of Thermal Processing Structures Formed On A Substrate
App 20070212859 - CAREY; Paul ;   et al.
2007-09-13
Methods And Apparatus For Epitaxial Film Formation
App 20070117414 - Moffatt; Stephen ;   et al.
2007-05-24
Embedded waveguide detectors
App 20070018270 - Leon; Francisco A. ;   et al.
2007-01-25
Impurity-based waveguide detectors
Grant 7,151,881 - West , et al. December 19, 2
2006-12-19
Embedded waveguide detectors
Grant 7,075,165 - Leon , et al. July 11, 2
2006-07-11
Substrate holder which is self-adjusting for substrate deformation
App 20050199825 - Moffatt, Stephen
2005-09-15
Structures useful in electron beam lithography
Grant 6,919,150 - Guo , et al. July 19, 2
2005-07-19
Substrate holder for retaining a substrate within a processing chamber
Grant 6,909,588 - Moffatt June 21, 2
2005-06-21
Impurity-based waveguide detectors
App 20050053347 - West, Lawrence C. ;   et al.
2005-03-10
Embedded waveguide detectors
App 20050051767 - Leon, Francisco A. ;   et al.
2005-03-10
Structures useful in electron beam lithography
App 20040169008 - Guo, Cheng ;   et al.
2004-09-02
Methods for fabricating lithography apparatus
Grant 6,746,805 - Guo , et al. June 8, 2
2004-06-08
Substrate holder for retaining a substrate within a processing chamber
App 20040084633 - Moffatt, Stephen
2004-05-06
Method and apparatus for neutralizing space charge in an ion beam
Grant 6,359,286 - Ito , et al. March 19, 2
2002-03-19
Electron flood apparatus for neutralizing charge build-up on a substrate during ion implantation
Grant 6,100,536 - Ito , et al. August 8, 2
2000-08-08
Ion implanter with post mass selection deceleration
Grant 5,969,366 - England , et al. October 19, 1
1999-10-19
Ion implantation apparatus and a method of monitoring high energy neutral contamination in an ion implantation process
Grant 5,883,391 - Adibi , et al. March 16, 1
1999-03-16
System and methods for wafer charge reduction for ion implantation
Grant 4,825,087 - Renau , et al. April 25, 1
1989-04-25

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