Patent | Date |
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Lithographic Process & Apparatus And Inspection Process And Apparatus App 20220057719 - TEL; Wim Tjibbo ;   et al. | 2022-02-24 |
Lithographic apparatus and device manufacturing method Grant 11,237,490 - Moest , et al. February 1, 2 | 2022-02-01 |
Lithographic Method App 20210389676 - MOEST; Bearrach ;   et al. | 2021-12-16 |
Lithographic process and apparatus and inspection process and apparatus Grant 11,199,782 - Tel , et al. December 14, 2 | 2021-12-14 |
Lithographic Process & Apparatus And Inspection Process And Apparatus App 20210208511 - TEL; Wim Tjibbo ;   et al. | 2021-07-08 |
Lithographic method Grant 10,705,438 - Jeunink , et al. | 2020-07-07 |
Lithographic Method App 20200117097 - JEUNINK; Andre Bernardus ;   et al. | 2020-04-16 |
Lithographic method Grant 10,571,814 - Jeunink , et al. Feb | 2020-02-25 |
Lithographic Apparatus And Device Manufacturing Method App 20190079420 - MOEST; Bearrach ;   et al. | 2019-03-14 |
Estimating deformation of a patterning device and/or a change in its position Grant 9,857,694 - Moest , et al. January 2, 2 | 2018-01-02 |
Lithographic apparatus, device manufacturing method, and method of applying a pattern to a substrate Grant 9,658,541 - Van De Kerkhof , et al. May 23, 2 | 2017-05-23 |
Estimating Deformation of a Patterning Device and/or a Change in Its Position App 20170068171 - MOEST; Bearrach ;   et al. | 2017-03-09 |
Lithographic apparatus configured to reconstruct an aerial pattern and to compare the reconstructed aerial pattern with an aerial pattern detected by an image sensor Grant 9,329,500 - Staals , et al. May 3, 2 | 2016-05-03 |
Lithographic apparatus and method Grant 9,116,446 - Voogd , et al. August 25, 2 | 2015-08-25 |
Device and method for transmission image sensing Grant 9,036,130 - Moest May 19, 2 | 2015-05-19 |
Image sensor, lithographic apparatus comprising an image sensor and use of an image sensor in a lithographic apparatus Grant 8,975,599 - Staals , et al. March 10, 2 | 2015-03-10 |
Lithographic projection apparatus, device manufacturing methods and mask with sensor and diffuser for use in a device manufacturing method Grant 8,896,817 - Van De Kerkhof , et al. November 25, 2 | 2014-11-25 |
Lithographic Apparatus, Device Manufacturing Method, And Method Of Applying A Pattern To A Substrate App 20140313500 - VAN DE KERKHOF; Marcus Adrianus ;   et al. | 2014-10-23 |
Lithographic apparatus, computer program product and device manufacturing method Grant 8,860,928 - Postma , et al. October 14, 2 | 2014-10-14 |
Lithographic apparatus and device manufacturing method of applying a pattern to a substrate using sensor and alignment mark Grant 8,773,637 - Van De Kerkhof , et al. July 8, 2 | 2014-07-08 |
Lithographic apparatus and sensor therefor Grant 8,629,418 - Van De Kerkhof , et al. January 14, 2 | 2014-01-14 |
Lithographic apparatus and method of irradiating at least two target portions Grant 8,436,984 - Van Weert , et al. May 7, 2 | 2013-05-07 |
Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detector Grant 8,426,831 - Nihtianov , et al. April 23, 2 | 2013-04-23 |
Radiation Detector, Method of Manufacturing a Radiation Detector, and Lithographic Apparatus Comprising a Radiation Detector App 20120268722 - NIHTIANOV; Stoyan ;   et al. | 2012-10-25 |
Lithographic Apparatus and Method App 20120242967 - Voogd; Robbert Jan ;   et al. | 2012-09-27 |
Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detector Grant 8,138,485 - Nihtianov , et al. March 20, 2 | 2012-03-20 |
Lithographic Apparatus, Computer Program Product And Device Manufacturing Method App 20120019795 - POSTMA; Sytse ;   et al. | 2012-01-26 |
Lithographic Apparatus, Device Manufacturing Method, And Method Of Applying A Pattern To A Substrate App 20110090476 - VAN DE KERKHOF; Marcus Adrianus ;   et al. | 2011-04-21 |
Image Sensor, Method for Image Detection and Computer Program Product App 20100195071 - Staals; Frank ;   et al. | 2010-08-05 |
Lithographic Apparatus And Method Of Irradiating At Least Two Target Portions App 20100157271 - VAN WEERT; Cornelis Lambertus Maria ;   et al. | 2010-06-24 |
Device and Method for Transmission Image Sensing App 20100141920 - MOEST; Bearrach | 2010-06-10 |
Lithographic Apparatus And Device Manufacturing Method App 20100091260 - Buurman; Erik Petrus ;   et al. | 2010-04-15 |
Device and method for transmission image sensing Grant 7,675,605 - Moest March 9, 2 | 2010-03-09 |
Lithographic apparatus and device manufacturing method Grant 7,655,367 - Buurman , et al. February 2, 2 | 2010-02-02 |
Radiation detector, method of manufacturing a radiation detector and lithographic apparatus comprising a radiation detector Grant 7,586,108 - Nihtianov , et al. September 8, 2 | 2009-09-08 |
Reduction of fit error due to non-uniform sample distribution Grant 7,583,359 - Moest September 1, 2 | 2009-09-01 |
Lithographic apparatus and device manufacturing method Grant 7,525,638 - Buurman , et al. April 28, 2 | 2009-04-28 |
Radiation Detector, Method of Manufacturing a Radiation Detector, and Lithographic Apparatus Comprising a Radiation Detector App 20090021717 - Nihtianov; Stoyan ;   et al. | 2009-01-22 |
Device and method for transmission image sensing App 20090002710 - MOEST; Bearrach | 2009-01-01 |
Device and method for transmission image detection, lithographic apparatus and mask for use in a lithographic apparatus App 20090002656 - Moest; Bearrach | 2009-01-01 |
Radiation detector, method of manufacturing a radiation detector and lithographic apparatus comprising a radiation detector App 20080315121 - Nihtianov; Stoyan ;   et al. | 2008-12-25 |
Sensor for use in a lithographic apparatus Grant 7,453,078 - Kok , et al. November 18, 2 | 2008-11-18 |
Image sensor, lithographic apparatus comprising an image sensor and use of an image sensor in a lithographic apparatus App 20080273183 - Staals; Frank ;   et al. | 2008-11-06 |
Sensor for use in a lithographic apparatus App 20080007844 - Kok; Haico Victor ;   et al. | 2008-01-10 |
Reduction of fit error due to non-uniform sample distribution App 20070258074 - Moest; Bearrach | 2007-11-08 |
Sensor for use in a lithographic apparatus Grant 7,282,701 - Kok , et al. October 16, 2 | 2007-10-16 |
Method of measuring the magnification of a projection system, device manufacturing method and computer program product App 20070159622 - Moest; Bearrach ;   et al. | 2007-07-12 |
Method of measuring the magnification of a projection system, device manufacturing method and computer program product App 20070115452 - Moest; Bearrach ;   et al. | 2007-05-24 |
Sensor for use in a lithographic apparatus App 20070108377 - Kok; Haico Victor ;   et al. | 2007-05-17 |
Lithographic projection apparatus, device manufacturing methods and mask for use in a device manufacturing method App 20070091290 - Van De Kerkhof; Marcus Adrianus ;   et al. | 2007-04-26 |
Lithographic projection apparatus, device manufacturing methods and mask for use in a device manufacturing method App 20070081138 - Kerkhof; Marcus Adrianus Van De ;   et al. | 2007-04-12 |
Lithographic apparatus and device manufacturing method Grant 7,145,630 - Moest , et al. December 5, 2 | 2006-12-05 |
Lithographic apparatus and device manufacturing method App 20060227310 - Buurman; Erik Petrus ;   et al. | 2006-10-12 |
Lithographic apparatus and device manufacturing method App 20060215134 - Buurman; Erik Petrus ;   et al. | 2006-09-28 |
Sensor for use in a lithographic apparatus App 20060192093 - Kok; Haico Victor ;   et al. | 2006-08-31 |
Lithographic apparatus and device manufacturing method App 20060109447 - Moest; Bearrach ;   et al. | 2006-05-25 |