Mochiki; Hiromasa
Patent Applications and Registrations
Patent applications and USPTO patent grants for Mochiki; Hiromasa.The latest application filed is for "method for manufacturing semiconductor device".
- Mochiki; Hiromasa - Yamanashi JP
- Mochiki; Hiromasa - Nirasaki N/A JP
- MOCHIKI; Hiromasa - Tokyo JP
- MOCHIKI; Hiromasa - Nirasaki City JP
- Mochiki; Hiromasa - Kofu JP
- Mochiki; Hiromasa - Nirasaki-shi JP
- Mochiki; Hiromasa - Kofu-shi JP
- Mochiki; Hiromasa - Kofu-City JP
| Patent | Date |
|---|---|
| Etching processing method Grant 9,496,150 - Mochiki , et al. November 15, 2 | 2016-11-15 |
| Etching processing method Grant 9,373,521 - Mochiki , et al. June 21, 2 | 2016-06-21 |
| Shower plate and substrate processing apparatus Grant 9,136,097 - Koshimizu , et al. September 15, 2 | 2015-09-15 |
| Method For Manufacturing Semiconductor Device App 20150194441 - YATSUDA; Koichi ; et al. | 2015-07-09 |
| Etching Processing Method App 20150170933 - MOCHIKI; Hiromasa ; et al. | 2015-06-18 |
| Substrate processing method Grant 8,685,267 - Yatsuda , et al. April 1, 2 | 2014-04-01 |
| Plasma etching apparatus, plasma etching method and storage medium Grant 8,641,916 - Yatsuda , et al. February 4, 2 | 2014-02-04 |
| Plasma etching method, plasma etching apparatus and storage medium Grant 8,383,001 - Mochiki , et al. February 26, 2 | 2013-02-26 |
| Substrate Processing Method App 20110318933 - Yatsuda; Koichi ; et al. | 2011-12-29 |
| Etching Processing Method App 20110244691 - MOCHIKI; Hiromasa ; et al. | 2011-10-06 |
| Method and system for uniformity control in ballistic electron beam enhanced plasma processing system Grant 7,829,469 - Chen , et al. November 9, 2 | 2010-11-09 |
| Plasma Etching Method, Plasma Etching Apparatus And Storage Medium App 20100213162 - Mochiki; Hiromasa ; et al. | 2010-08-26 |
| Plasma Etching Apparatus, Plasma Etching Method And Storage Medium App 20100190350 - YATSUDA; Koichi ; et al. | 2010-07-29 |
| Gas setting method, gas setting apparatus, etching apparatus and substrate processing system Grant 7,723,236 - Mochiki May 25, 2 | 2010-05-25 |
| Method and system for etching a high-k dielectric material Grant 7,709,397 - Chen , et al. May 4, 2 | 2010-05-04 |
| Shower Plate And Substrate Processing Apparatus App 20090120582 - Koshimizu; Chishio ; et al. | 2009-05-14 |
| Method And System For Uniformity Control In Ballistic Electron Beam Enhanced Plasma Processing System App 20080135518 - Chen; Lee ; et al. | 2008-06-12 |
| Method and system for etching a film stack Grant 7,172,969 - Xia , et al. February 6, 2 | 2007-02-06 |
| Gas setting method, gas setting apparatus, etching apparatus and substrate processing system App 20060157445 - Mochiki; Hiromasa | 2006-07-20 |
| Method and system for etching a gate stack App 20060049139 - Xia; Annie ; et al. | 2006-03-09 |
| Method and system for etching a film stack App 20060051964 - Xia; Annie ; et al. | 2006-03-09 |
| Method and system for etching a high-k dielectric material App 20050164511 - Chen, Lee ; et al. | 2005-07-28 |
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