MKS Japan, Inc.
Patent Applications and Registrations
Patent applications and USPTO patent grants for MKS Japan, Inc..The latest application filed is for "flow sensor".
- MKS Japan, Inc. - Tokyo JP
| Patent | Date |
|---|---|
| Flow sensor Grant 7,469,583 - Suzuki December 30, 2 | 2008-12-30 |
| Differential pressure sensor Grant 7,219,551 - Suzuki May 22, 2 | 2007-05-22 |
| Control valve Grant 7,051,991 - Suzuki May 30, 2 | 2006-05-30 |
| Electromagnetic valve Grant 6,916,004 - Suzuki July 12, 2 | 2005-07-12 |
| Mass flow controller Grant 6,755,210 - Suzuki June 29, 2 | 2004-06-29 |
| Vaporizer Grant 6,715,507 - Arai , et al. April 6, 2 | 2004-04-06 |
| Liquid supply system, method for cleaning the same and vaporizer Grant 6,581,625 - Arai , et al. June 24, 2 | 2003-06-24 |
| Flow rate sensor implementing a plurality of inner tubes located within a sensor tube Grant 6,318,171 - Suzuki November 20, 2 | 2001-11-20 |
| Flow rate control apparatus Grant 6,178,996 - Suzuki January 30, 2 | 2001-01-30 |
| Solenoid valve for flow rate control Grant 5,727,769 - Suzuki March 17, 1 | 1998-03-17 |
| Mass flow control system Grant 5,594,666 - Suzuki , et al. January 14, 1 | 1997-01-14 |
| Flow control valve Grant 5,582,208 - Suzuki December 10, 1 | 1996-12-10 |
| Mass flow sensor Grant 5,410,912 - Suzuki May 2, 1 | 1995-05-02 |
| Flowmeter sensor Grant 5,398,549 - Suzuki March 21, 1 | 1995-03-21 |
| Bypass unit for a flowmeter sensor Grant 5,295,394 - Suzuki March 22, 1 | 1994-03-22 |
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