MIZUTANI; Takeyuki

Patent Applications and Registrations

Patent applications and USPTO patent grants for MIZUTANI; Takeyuki.The latest application filed is for "exposure apparatus, exposure method, and method for producing device".

Company Profile

0.9.14

MIZUTANI; Takeyuki - Kumagaya-shi JP
Mizutani; Takeyuki - Kumagaya JP
Mizutani; Takeyuki - Saitama-ken JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Exposure Apparatus, Exposure Method, And Method For Producing Device App 20180239261 - MIZUTANI; Takeyuki	2018-08-23
Exposure apparatus, exposure method, and method for producing device Grant 9,958,785 - Mizutani May 1, 2	2018-05-01
Immersion lithographic apparatus rinsing outer contour of substrate with immersion space Grant 8,941,808 - Nakano , et al. January 27, 2	2015-01-27
Exposure apparatus, exposure method, and device manufacturing method Grant 8,780,326 - Kiuchi , et al. July 15, 2	2014-07-15
Exposure Apparatus, Exposure Method, And Method For Producing Device App 20140111783 - MIZUTANI; Takeyuki	2014-04-24
Exposure apparatus, exposure method, and method for producing device Grant 8,675,174 - Mizutani March 18, 2	2014-03-18
Substrate processing method, exposure apparatus, and method for producing device by immersing substrate in second liquid before immersion exposure through first liquid App 20120008112 - Nakano; Katsushi ; et al.	2012-01-12
Substrate holding apparatus, exposure apparatus, exposing method, and device fabricating method Grant 8,089,615 - Mizutani , et al. January 3, 2	2012-01-03
Substrate processing method, exposure apparatus, and method for producing device by immersing substrate in second liquid before immersion exposure through first liquid Grant 8,040,489 - Nakano , et al. October 18, 2	2011-10-18
Exposure apparatus, exposure method, and device manufacturing method App 20110222037 - Kiuchi; Tohru ; et al.	2011-09-15
Maintenance method, exposure method and apparatus, and device manufacturing method App 20090109413 - Shibazaki; Yuichi ; et al.	2009-04-30
Substrate for Exposure, Exposure Method and Device Manufacturing Method App 20080318152 - Mizutani; Takeyuki	2008-12-25
Substrate processing method, exposure apparatus, and method for producing device App 20080246931 - Nakano; Katsushi ; et al.	2008-10-09
Substrate holding apparatus, exposure apparatus, exposing method, and device fabricating method App 20080239275 - MIZUTANI; Takeyuki ; et al.	2008-10-02
Liquid Removing Apparatus, Exposure Apparatus and Device Fabricating Method App 20080165330 - Mizutani; Takeyuki	2008-07-10
Substrate Processing Method, Exposure Apparatus, and Method For Producing Device App 20080143980 - Nakano; Katsushi ; et al.	2008-06-19
Exposure apparatus and device manufacturing method App 20080137047 - Mizutani; Takeyuki ; et al.	2008-06-12
Exposure Apparatus, Exposure Method, and Method for Producing Device App 20080032234 - Mizutani; Takeyuki	2008-02-07
Substrate processing method, exposure apparatus, and method for producing device App 20070242248 - Nakano; Katsushi ; et al.	2007-10-18
Exposure Method and Apparatus, and Device Manufacturing Method App 20070206167 - Mizutani; Takeyuki	2007-09-06

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