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Substrate case and substrate accommodation apparatus Grant 11,342,206 - Mizutani , et al. May 24, 2 | 2022-05-24 |
Substrate Case And Substrate Accommodation Apparatus App 20200118847 - MIZUTANI; Hideo ;   et al. | 2020-04-16 |
Substrate case and substrate accommodation apparatus Grant 10,541,160 - Mizutani , et al. Ja | 2020-01-21 |
Pattern forming device, pattern forming method, and device manufacturing method Grant 9,152,062 - Kiuchi , et al. October 6, 2 | 2015-10-06 |
Manufacturing method for printed wiring board Grant 9,113,562 - Mizutani , et al. August 18, 2 | 2015-08-18 |
Method for measuring expansion/contraction, method for processing substrate, method for producing device, apparatus for measuring expansion/contraction, and apparatus for processing substrate Grant 8,399,263 - Kiuchi , et al. March 19, 2 | 2013-03-19 |
Pattern formation apparatus, pattern formation method, and device manufacturing method Grant 8,379,186 - Kiuchi , et al. February 19, 2 | 2013-02-19 |
Exposure Apparatus, Substrate Processing Apparatus, And Device Manufacturing Method App 20130027684 - Kiuchi; Tohru ;   et al. | 2013-01-31 |
Pattern Forming Device, Pattern Forming Method, And Device Manufacturing Method App 20120270144 - KIUCHI; Tohru ;   et al. | 2012-10-25 |
Exposure apparatus, exposure method, and method of manufacturing device Grant 8,264,666 - Kiuchi , et al. September 11, 2 | 2012-09-11 |
Pattern forming device, pattern forming method, and device manufacturing method Grant 8,235,695 - Kiuchi , et al. August 7, 2 | 2012-08-07 |
Manufacturing Method For Printed Wiring Board App 20120180313 - MIZUTANI; Hideo ;   et al. | 2012-07-19 |
Manufacturing method for printed wiring board Grant 8,161,637 - Mizutani , et al. April 24, 2 | 2012-04-24 |
Substrate Case And Substrate Accommodation Apparatus App 20110155838 - MIZUTANI; Hideo ;   et al. | 2011-06-30 |
Manufacturing Method For Printed Wiring Board App 20110016709 - Mizutani; Hideo ;   et al. | 2011-01-27 |
Pattern Formation Apparatus, Pattern Formation Method, And Device Manufacturing Method App 20110013162 - KIUCHI; Tohru ;   et al. | 2011-01-20 |
Pattern Forming Device, Pattern Forming Method, And Device Manufacturing Method App 20110012294 - Kiuchi; Tohru ;   et al. | 2011-01-20 |
Exposure Apparatus, Exposure Method, And Method Of Manufactruing Device App 20100265483 - Kiuchi; Tohru ;   et al. | 2010-10-21 |
Method For Measuring Expansion/contraction, Method For Processing Substrate, Method For Producing Device, Apparatus For Measuring Expansion/contraction, And Apparatus For Processing Substrate App 20100105153 - Kiuchi; Tohru ;   et al. | 2010-04-29 |
Exposure apparatus and method for producing device Grant 7,460,207 - Mizutani , et al. December 2, 2 | 2008-12-02 |
Exposure apparatus and method for producing device Grant 7,436,487 - Mizutani , et al. October 14, 2 | 2008-10-14 |
Exposure apparatus and method for producing device Grant 7,379,158 - Mizutani , et al. May 27, 2 | 2008-05-27 |
Exposure Apparatus, Exposure Method and Device Manufacturing Method, and Surface Shape Detection Unit App 20070247640 - Magome; Nobutaka ;   et al. | 2007-10-25 |
Holding apparatus, holding method, exposure apparatus and device manufacturing method Grant 7,081,946 - Hagiwara , et al. July 25, 2 | 2006-07-25 |
Holding apparatus, holding method, exposure apparatus and device manufacturing method App 20060146312 - Hagiwara; Tsuneyuki ;   et al. | 2006-07-06 |
Exposure apparatus and method for producing device App 20060126044 - Mizutani; Hideo ;   et al. | 2006-06-15 |
Exposure apparatus and method for producing device App 20060126043 - Mizutani; Hideo ;   et al. | 2006-06-15 |
Exposure apparatus and method for producing device App 20050264774 - Mizutani, Hideo ;   et al. | 2005-12-01 |
Exposure apparatus and methods utilizing plural mask and object stages movable in opposite directions, and methods of producing devices using the same Grant 6,894,763 - Murakami , et al. May 17, 2 | 2005-05-17 |
Holding apparatus, holding method, exposure apparatus and device manufacturing method App 20040100624 - Hagiwara, Tsuneyuki ;   et al. | 2004-05-27 |
Exposure apparatus and methods utilizing plural mask and object stages movable in opposite directions, and methods of producing devices using the same App 20030218730 - Murakami, Seiro ;   et al. | 2003-11-27 |
Symbol window correlative operation circuit and address generation circuit therefor App 20030023779 - Mizutani, Hideo ;   et al. | 2003-01-30 |
Alignment method, exposure method, exposure apparatus and device manufacturing method App 20010055117 - Mizutani, Hideo | 2001-12-27 |
Apparatus and method for detecting the position of a surface to be examined, exposure apparatus equipped with the detecting apparatus and method of producing the exposure apparatus, and method of producing devices using the exposure apparatus Grant 6,320,658 - Mizutani November 20, 2 | 2001-11-20 |
Fast fourier transform processing device, fast fourier transform processing system, and fast fourier transform processing method Grant 6,230,176 - Mizutani May 8, 2 | 2001-05-08 |
Alignment apparatus in projection exposure apparatus Grant 6,153,886 - Hagiwara , et al. November 28, 2 | 2000-11-28 |
Exposure apparatus Grant 5,995,198 - Mizutani November 30, 1 | 1999-11-30 |
Projection exposure apparatus Grant 5,734,478 - Magome , et al. March 31, 1 | 1998-03-31 |
Alignment apparatus Grant 5,689,339 - Ota , et al. November 18, 1 | 1997-11-18 |
Surface position detecting apparatus and method Grant 5,602,399 - Mizutani February 11, 1 | 1997-02-11 |
Projection exposure apparatus Grant 5,583,609 - Mizutani , et al. December 10, 1 | 1996-12-10 |
Double-beam light source apparatus, position detecting apparatus and aligning apparatus Grant 5,530,257 - Mizutani , et al. June 25, 1 | 1996-06-25 |
Scanning exposure apparatus having a scanning device for scanning light beams along the movement direction of a moving mask stage Grant 5,528,027 - Mizutani June 18, 1 | 1996-06-18 |
Inclination detecting apparatus and method Grant 5,510,892 - Mizutani , et al. April 23, 1 | 1996-04-23 |
Position detecting apparatus Grant 5,489,986 - Magome , et al. February 6, 1 | 1996-02-06 |
Double-beam light source apparatus, position detecting apparatus and aligning apparatus Grant 5,488,230 - Mizutani , et al. January 30, 1 | 1996-01-30 |
Projection exposing apparatus Grant 5,424,552 - Tsuji , et al. June 13, 1 | 1995-06-13 |
Method of detecting a position and apparatus therefor Grant 5,416,562 - Ota , et al. May 16, 1 | 1995-05-16 |
Substrate aligning device using interference light generated by two beams irradiating diffraction grating Grant 5,347,356 - Ota , et al. September 13, 1 | 1994-09-13 |
Catadioptric reduction projection optical system Grant 5,251,070 - Hashimoto , et al. October 5, 1 | 1993-10-05 |
Apparatus for detecting a focussing position Grant 5,241,188 - Mizutani August 31, 1 | 1993-08-31 |
Cata-dioptric reduction projection optical system Grant 5,220,454 - Ichihara , et al. June 15, 1 | 1993-06-15 |
Absolute value arithmetic circuit Grant 5,216,628 - Mizutani , et al. June 1, 1 | 1993-06-01 |
Alignment device having irradiation and detection light correcting optical elements Grant 5,204,535 - Mizutani April 20, 1 | 1993-04-20 |
Projection exposure apparatus Grant 5,184,196 - Nakagawa , et al. February 2, 1 | 1993-02-02 |
Adjustable beam and interference fringe position Grant 5,171,999 - Komatsu , et al. December 15, 1 | 1992-12-15 |
Substrate alignment apparatus using diffracted and reflected radiation beams Grant 5,118,953 - Ota , et al. June 2, 1 | 1992-06-02 |
Position detection apparatus with adjustable beam and interference fringe positions Grant 5,070,250 - Komatsu , et al. December 3, 1 | 1991-12-03 |
Device for detecting the levelling of the surface of an object Grant 4,902,900 - Kamiya , et al. February 20, 1 | 1990-02-20 |
Apparatus for detecting the level of an object surface Grant 4,864,123 - Mizutani , et al. September 5, 1 | 1989-09-05 |
Projection optical apparatus Grant 4,801,977 - Ishizaka , et al. January 31, 1 | 1989-01-31 |
Projection exposure apparatus Grant 4,780,747 - Suzuki , et al. October 25, 1 | 1988-10-25 |
Projection optical apparatus Grant 4,730,900 - Uehara , et al. March 15, 1 | 1988-03-15 |
Optical apparatus for the detection of position Grant 4,723,845 - Mizutani , et al. February 9, 1 | 1988-02-09 |
Apparatus for measuring optical characteristics of optical systems Grant 4,641,964 - Mitani , et al. February 10, 1 | 1987-02-10 |