| Patent | Date |
|---|
Exposure Apparatus, Exposure Method, And Method For Producing Device
App 20180348643 - NISHINAGA; Hisashi ; et al. | 2018-12-06 |
Illumination method, illumination optical device, and exposure device
Grant 10,120,283 - Mizuno November 6, 2 | 2018-11-06 |
Exposure apparatus, exposure method, and method for producing device
Grant 10,025,194 - Nishinaga , et al. July 17, 2 | 2018-07-17 |
Exposure Apparatus, Exposure Method, And Method For Producing Device
App 20170082925 - NISHINAGA; Hisashi ; et al. | 2017-03-23 |
Exposure apparatus, exposure method, and method for producing device
Grant 9,513,558 - Nishinaga , et al. December 6, 2 | 2016-12-06 |
Reformer Support Structure And Fuel Cell Module
App 20150093666 - YAMAMOTO; Satoru ; et al. | 2015-04-02 |
Method For Determining Composition Of Gas Fuel, Device For Determining Composition Of Gas Fuel, Fuel Supply System, And Fuel Cell System
App 20150086888 - Tsukagoshi; Shouichi ; et al. | 2015-03-26 |
Illumination optical system, exposure apparatus, and device manufacturing method
Grant 8,947,635 - Tanaka , et al. February 3, 2 | 2015-02-03 |
Fuel Cell System
App 20150004503 - Yamamoto; Satoru ; et al. | 2015-01-01 |
Fuel Supply System, Fuel Cell System, And Method For Running Each
App 20140377678 - Tsukagoshi; Shouichi ; et al. | 2014-12-25 |
Illumination optical system, exposure apparatus, device manufacturing method, compensation filter, and exposure optical system
Grant 8,908,151 - Muramatsu , et al. December 9, 2 | 2014-12-09 |
Fuel Supply System, Fuel Cell System, And Method For Running Each
App 20140342257 - Tsukagoshi; Shouichi ; et al. | 2014-11-20 |
Exposure Apparatus, Exposure Method, And Method For Producing Device
App 20140240685 - NISHINAGA; Hisashi ; et al. | 2014-08-28 |
Illumination Method, Illumination Optical Device, And Exposure Device
App 20140218703 - Mizuno; Yasushi | 2014-08-07 |
Exposure apparatus and method for producing device
Grant 8,780,327 - Kobayashi , et al. July 15, 2 | 2014-07-15 |
Exposure apparatus and method for producing device
Grant 8,760,617 - Kobayashi , et al. June 24, 2 | 2014-06-24 |
Exposure apparatus, exposure method, and method for producing device
Grant 8,749,759 - Nishinaga , et al. June 10, 2 | 2014-06-10 |
Fuel Cell Module
App 20140099561 - Yokoyama; Shou ; et al. | 2014-04-10 |
Fuel Cell Module
App 20140023950 - Yamamoto; Satoru ; et al. | 2014-01-23 |
Fuel Cell System
App 20130316258 - Tsukagoshi; Shouichi ; et al. | 2013-11-28 |
Exposure Apparatus And Method For Producing Device
App 20130169945 - KOBAYASHI; Naoyuki ; et al. | 2013-07-04 |
Fuel Cell System
App 20130052550 - Mizuno; Yasushi ; et al. | 2013-02-28 |
Exposure apparatus and method for producing device
Grant 8,384,877 - Kobayashi , et al. February 26, 2 | 2013-02-26 |
Exposure Apparatus, Exposure Method, and Method for Producing Device
App 20130027682 - Nishinaga; Hisashi ; et al. | 2013-01-31 |
Exposure apparatus and method for producing device
Grant 8,174,668 - Kobayashi , et al. May 8, 2 | 2012-05-08 |
Exposure apparatus and method for producing device
Grant 8,169,592 - Kobayashi , et al. May 1, 2 | 2012-05-01 |
Exposure apparatus, exposure method, and method for producing device
Grant 8,139,198 - Nishinaga , et al. March 20, 2 | 2012-03-20 |
Exposure apparatus and method for producing device
Grant 8,130,363 - Kobayashi , et al. March 6, 2 | 2012-03-06 |
Exposure apparatus and method for producing device
Grant 8,125,612 - Kobayashi , et al. February 28, 2 | 2012-02-28 |
Illumination Optical System, Exposure Apparatus, And Device Manufacturing Method
App 20120015306 - TANAKA; Hirohisa ; et al. | 2012-01-19 |
Exposure apparatus and method for producing device
Grant 8,072,576 - Kobayashi , et al. December 6, 2 | 2011-12-06 |
Exposure apparatus and method for producing device
App 20110199594 - Kobayashi; Naoyuki ; et al. | 2011-08-18 |
Led Lamp
App 20110073883 - Osawa; Hideharu ; et al. | 2011-03-31 |
Method For Operating Indirect Internal Reforming Solid Oxide Fuel Cell System
App 20110039175 - Yokoyama; Shou ; et al. | 2011-02-17 |
Variable slit apparatus, illumination apparatus, exposure apparatus, exposure method, and device fabrication method
Grant 7,889,320 - Ohya , et al. February 15, 2 | 2011-02-15 |
Method for starting autothermal reformer
Grant 7,837,858 - Sugiura , et al. November 23, 2 | 2010-11-23 |
Optical property measurement apparatus and optical property measurement method, exposure apparatus and exposure method, and device manufacturing method
Grant 7,667,829 - Kaise , et al. February 23, 2 | 2010-02-23 |
Solid Oxide Fuel Cell System And Its Operating Method
App 20090291336 - Mizuno; Yasushi ; et al. | 2009-11-26 |
Illumination optical system, exposure apparatus, device manufacturing method, compensation filter, and exposure optical system
App 20090284727 - Muramatsu; Kouji ; et al. | 2009-11-19 |
Method for Starting Autothermal Reformer
App 20090223861 - Sugiura; Yukihiro ; et al. | 2009-09-10 |
Illuminating Optical Apparatus, Exposure Apparatus And Device Manufacturing Method
App 20090135396 - Mizuno; Yasushi ; et al. | 2009-05-28 |
Solid Oxide Fuel Cell And Reformer
App 20090117424 - Mizuno; Yasushi ; et al. | 2009-05-07 |
Exposure Apparatus and method for producing device
App 20080231825 - Kobayashi; Naoyuki ; et al. | 2008-09-25 |
Exposure apparatus and method for producing device
App 20080225249 - Kobayashi; Naoyuki ; et al. | 2008-09-18 |
Exposure apparatus and method for producing device
App 20080225250 - Kobayashi; Naoyuki ; et al. | 2008-09-18 |
Exposure apparatus and method for producing device
Grant 7,388,649 - Kobayashi , et al. June 17, 2 | 2008-06-17 |
Exposure apparatus, exposure method, and method for producing device
App 20080042068 - Nishinaga; Hisashi ; et al. | 2008-02-21 |
Optical Property Measurement Apparatus and Optical Property Measurement Method, Exposure Apparatus and Exposure Method, and Device Manufacturing Method
App 20080043236 - Kaise; Koji ; et al. | 2008-02-21 |
Exposure apparatus and method for producing device
App 20080030695 - Kobayashi; Naoyuki ; et al. | 2008-02-07 |
Exposure apparatus and method for producing device
App 20080030696 - Kobayashi; Naoyuki ; et al. | 2008-02-07 |
Exposure Apparatus And Method For Producing Device
App 20070247600 - Kobayashi; Naoyuki ; et al. | 2007-10-25 |
Exposure apparatus and method for producing device
App 20070132968 - Kobayashi; Naoyuki ; et al. | 2007-06-14 |
Exposure apparatus and method for producing device
App 20070064210 - Kobayashi; Naoyuki ; et al. | 2007-03-22 |
Variable slit apparatus, illumination apparatus, exposure apparatus, exposure method, and device fabrication method
App 20070014112 - Ohya; Eizo ; et al. | 2007-01-18 |
Exposure apparatus, exposure method, and method for producing device
App 20060181690 - Nishinaga; Hisashi ; et al. | 2006-08-17 |
Exposure apparatus, exposure method, and method for producing device
App 20060170891 - Nishinaga; Hisashi ; et al. | 2006-08-03 |
Image sensor and method of manufacturing the same
Grant 7,042,008 - Kuroda , et al. May 9, 2 | 2006-05-09 |
Exposure apparatus and method for producing device
App 20060077367 - Kobayashi; Naoyuki ; et al. | 2006-04-13 |
Wavefront aberration measuring instrument, wavefront aberration measuring method, exposure apparatus, and method for manufacturing micro device
Grant 6,975,387 - Mizuno December 13, 2 | 2005-12-13 |
Thread breakage detection device for sewing machine
Grant 6,802,273 - Mizuno October 12, 2 | 2004-10-12 |
Image sensor and method of manufacturing the same
App 20040026758 - Kuroda, Yoshikatsu ; et al. | 2004-02-12 |
Wavefront aberration measuring instrument, wavefront aberration measuring method, exposure apparautus, and method for manufacturing micro device
App 20030137654 - Mizuno, Yasushi | 2003-07-24 |
Thread breakage detection device for sewing machine
App 20030000439 - Mizuno, Yasushi | 2003-01-02 |
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