Mizuguchi; Yasuhiro

Patent Applications and Registrations

Patent applications and USPTO patent grants for Mizuguchi; Yasuhiro.The latest application filed is for "method of manufacturing semiconductor device by setting process chamber maintenance enable state".

Company Profile

11.10.14

Mizuguchi; Yasuhiro - Toyama JP
MIZUGUCHI; Yasuhiro - Toyama-shi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Substrate processing system, method of manufacturing semiconductor device, and recording medium Grant 11,422,528 - Mizuguchi , et al. August 23, 2	2022-08-23
Method of manufacturing semiconductor device by setting process chamber to maintenance enable state Grant 11,355,372 - Mizuguchi , et al. June 7, 2	2022-06-07
Method of manufacturing semiconductor device by setting process chamber maintenance enable state Grant 11,342,212 - Mizuguchi , et al. May 24, 2	2022-05-24
Method Of Manufacturing Semiconductor Device By Setting Process Chamber Maintenance Enable State App 20220115254 - MIZUGUCHI; Yasuhiro ; et al.	2022-04-14
Substrate processing apparatus Grant 10,984,991 - Mizuguchi , et al. April 20, 2	2021-04-20
Substrate processing apparatus, substrate processing system and method of manufacturing semiconductor device Grant 10,930,533 - Mizuguchi , et al. February 23, 2	2021-02-23
Method Of Manufacturing Semiconductor Device App 20210028042 - MIZUGUCHI; Yasuhiro ; et al.	2021-01-28
Method Of Manufacturing Semiconductor Device App 20210028041 - MIZUGUCHI; Yasuhiro ; et al.	2021-01-28
Substrate Processing System, Method Of Manufacturing Semiconductor Device, And Recording Medium App 20210003990 - MIZUGUCHI; Yasuhiro ; et al.	2021-01-07
Substrate Processing Apparatus, A Non-transitory Computer-readable Recording Medium App 20200216961 - NOMURA; Makoto ; et al.	2020-07-09
Method of manufacturing semiconductor device by setting process chamber to maintenance enable state Grant 10,651,068 - Mizuguchi , et al.	2020-05-12
Substrate Processing Apparatus App 20200144037 - MIZUGUCHI; Yasuhiro ; et al.	2020-05-07
Substrate Processing Apparatus, Substrate Processing System And Method Of Manufacturing Semiconductor Device App 20190287831 - MIZUGUCHI; Yasuhiro ; et al.	2019-09-19
Method Of Manufacturing A Semiconductor Device App 20190221460 - MIZUGUCHI; Yasuhiro ; et al.	2019-07-18
Substrate processing apparatus, maintenance method, and maintenance program Grant 10,290,516 - Yoneda , et al.	2019-05-14
Method of Manufacturing Semiconductor Device App 20180350642 - MIZUGUCHI; Yasuhiro	2018-12-06
Method of manufacturing semiconductor device Grant 10,134,587 - Mizuguchi November 20, 2	2018-11-20
Substrate Processing Apparatus App 20180025920 - MIZUGUCHI; Yasuhiro	2018-01-25
Substrate processing apparatus Grant 9,875,920 - Mizuguchi January 23, 2	2018-01-23
Substrate Processing Apparatus, Method For Manufacturing Semiconductor Device, And Recording Medium App 20170011974 - YOKAWA; Takashi ; et al.	2017-01-12
Substrate processing apparatus, substrate processing method, non-transitory computer-readable recording medium, and substrate transfer method Grant 9,244,447 - Mizuguchi January 26, 2	2016-01-26
Substrate Processing Apparatus, Maintenance Method, And Maintenance Program App 20130253689 - YONEDA; Akihiko ; et al.	2013-09-26
Substrate Processing Apparatus, Substrate Processing Method, Non-transitory Computer-readable Recording Medium, And Substrate Transfer Method App 20130178954 - MIZUGUCHI; Yasuhiro	2013-07-11
Substrate Processing Apparatus, Substrate Transfer Method And Method For Manufacturing Semiconductor Device App 20130102159 - KOTANI; Hiroshi ; et al.	2013-04-25

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