Patent | Date |
---|
Pressure Sensor And Substrate Processing Apparatus App 20080236291 - Yane; Takeshi ;   et al. | 2008-10-02 |
Pressure sensor and substrate processing apparatus Grant 7,409,864 - Yane , et al. August 12, 2 | 2008-08-12 |
Substrate processing apparatus and substrate processing method Grant 7,396,199 - Koyama , et al. July 8, 2 | 2008-07-08 |
Differential pressure flowmeter, flow controller, and apparatus for processing substrate Grant 7,337,677 - Mizohata March 4, 2 | 2008-03-04 |
Plating Apparatus, Cartridge And Copper Dissolution Tank For Use In The Plating Apparatus, And Plating Method App 20070235341 - Mizohata; Yasuhiro ;   et al. | 2007-10-11 |
Plating apparatus, cartridge and copper dissolution tank for use in the plating apparatus, and plating method Grant 7,279,079 - Mizohata , et al. October 9, 2 | 2007-10-09 |
Plating apparatus and plating method Grant 7,204,916 - Mizohata April 17, 2 | 2007-04-17 |
Plating Apparatus, Plating Cup And Cathode Ring App 20070080057 - MIZOHATA; Yasuhiro ;   et al. | 2007-04-12 |
Plating Apparatus, Plating Cup And Cathode Ring App 20070023277 - Mizohata; Yasuhiro ;   et al. | 2007-02-01 |
Plating apparatus, plating cup and cathode ring Grant 7,169,269 - Mizohata , et al. January 30, 2 | 2007-01-30 |
Pressure sensor and substrate processing apparatus App 20060260409 - Yane; Takeshi ;   et al. | 2006-11-23 |
Apparatus and method for supplying liquid and apparatus for processing substrate App 20060248934 - Mizohata; Yasuhiro | 2006-11-09 |
Apparatus and method for supplying liquid and apparatus for processing substrate App 20060137419 - Mizohata; Yasuhiro | 2006-06-29 |
Differential pressure flowmeter, flow controller, and apparatus for processing substrate App 20060112771 - Mizohata; Yasuhiro | 2006-06-01 |
Plating apparatus and plating method Grant 6,958,113 - Mizohata , et al. October 25, 2 | 2005-10-25 |
Plating apparatus, plating cup and cathode ring App 20040140199 - Mizohata, Yasuhiro ;   et al. | 2004-07-22 |
Plating apparatus and plating method App 20040118676 - Mizohata, Yasuhiro ;   et al. | 2004-06-24 |
Plating apparatus and plating method App 20040084315 - Mizohata, Yasuhiro ;   et al. | 2004-05-06 |
Plating apparatus, cartridge and copper dissolution tank for use in the plating apparatus, and plating method App 20040069647 - Mizohata, Yasuhiro ;   et al. | 2004-04-15 |
Plating apparatus and plating method App 20040055890 - Mizohata, Yasuhiro | 2004-03-25 |
Substrate processing apparatus and substrate processing method App 20030123971 - Koyama, Yoshihiro ;   et al. | 2003-07-03 |
Substrate cooling method and apparatus Grant 5,638,687 - Mizohata , et al. June 17, 1 | 1997-06-17 |
Substrate cooling device and substrate heat-treating apparatus Grant 5,411,076 - Matsunaga , et al. May 2, 1 | 1995-05-02 |