| Patent | Date |
|---|
Substrate inspection apparatus, substrate inspection method and method of manufacturing semiconductor device
Grant 7,847,250 - Nagahama , et al. December 7, 2 | 2010-12-07 |
X-ray source
Grant 7,649,980 - Aoki , et al. January 19, 2 | 2010-01-19 |
Substrate inspection apparatus, substrate inspection method and method of manufacturing semiconductor device
App 20090072139 - Nagahama; Ichirota ; et al. | 2009-03-19 |
X-ray Source
App 20080304624 - Aoki; Nobutada ; et al. | 2008-12-11 |
Substrate inspection apparatus, substrate inspection method and method of manufacturing semiconductor device
Grant 7,462,829 - Nagahama , et al. December 9, 2 | 2008-12-09 |
Substrate inspection apparatus, substrate inspection method and method of manufacturing semiconductor device
App 20070187600 - Nagahama; Ichirota ; et al. | 2007-08-16 |
Substrate inspection apparatus, substrate inspection method and method of manufacturing semiconductor device
Grant 7,211,796 - Nagahama , et al. May 1, 2 | 2007-05-01 |
Electronic optical lens barrel and production method therefor
Grant 7,193,221 - Okumura , et al. March 20, 2 | 2007-03-20 |
Photomask repair method and apparatus
Grant 6,991,878 - Kanamitsu , et al. January 31, 2 | 2006-01-31 |
Electronic optical lens barrel and production method therefor
App 20050173649 - Okumura, Katsuya ; et al. | 2005-08-11 |
Substrate inspection apparatus, substrate inspection method and method of manufacturing semiconductor device
App 20050029451 - Nagahama, Ichirota ; et al. | 2005-02-10 |
Charged particle beam exposure system
Grant 6,815,698 - Nagano , et al. November 9, 2 | 2004-11-09 |
Substrate inspection system and method for controlling same
Grant 6,768,112 - Yamazaki , et al. July 27, 2 | 2004-07-27 |
Photomask repair method and apparatus
App 20030215722 - Kanamitsu, Shingo ; et al. | 2003-11-20 |
Eddy current loss measuring sensor, thickness measuring system, thickness measuring method, and recorded medium
Grant 6,563,308 - Nagano , et al. May 13, 2 | 2003-05-13 |
Substrate inspecting system using electron beam and substrate inspecting method using electron beam
Grant 6,563,114 - Nagahama , et al. May 13, 2 | 2003-05-13 |
Eddy Current Loss Measuring Sensor, Thickness Measuring System, Thickness Measuring Method, And Recorded Medium
App 20030067298 - Nagano, Osamu ; et al. | 2003-04-10 |
Electron beam lithography system and pattern writing method
Grant 6,525,328 - Miyoshi , et al. February 25, 2 | 2003-02-25 |
Pattern dimension measuring system and pattern dimension measuring method
Grant 6,515,296 - Komatsu , et al. February 4, 2 | 2003-02-04 |
Charged beam drawing apparatus
Grant 6,495,841 - Ando , et al. December 17, 2 | 2002-12-17 |
Substrate inspection system and method for controlling same
App 20020084411 - Yamazaki, Yuichiro ; et al. | 2002-07-04 |
Charged particle beam exposure system
App 20020033458 - Nagano, Osamu ; et al. | 2002-03-21 |
Inspection method and apparatus using electron beam
Grant 6,265,719 - Yamazaki , et al. July 24, 2 | 2001-07-24 |
Electron beam inspection method and apparatus
Grant 6,259,094 - Nagai , et al. July 10, 2 | 2001-07-10 |
Substrate inspecting apparatus, substrate inspecting system having the same apparatus and substrate inspecting method
Grant 6,038,018 - Yamazaki , et al. March 14, 2 | 2000-03-14 |
Electron beam irradiating apparatus and electric signal detecting apparatus
Grant 5,818,217 - Komatsu , et al. October 6, 1 | 1998-10-06 |
Focused ion beam deposition using TMCTS
Grant 5,639,699 - Nakamura , et al. June 17, 1 | 1997-06-17 |
Plasma apparatus
Grant 5,639,308 - Yamazaki , et al. June 17, 1 | 1997-06-17 |
Wafer pattern defect detection method and apparatus therefor
Grant 5,576,833 - Miyoshi , et al. November 19, 1 | 1996-11-19 |
Method and apparatus for repairing defect on plane surface of phase shift mask
Grant 5,569,392 - Miyoshi , et al. October 29, 1 | 1996-10-29 |
Magnetic field immersion type electron gun
Grant 5,548,183 - Miyoshi , et al. August 20, 1 | 1996-08-20 |
Electrostatic lens and method for producing the same
Grant 5,444,256 - Nagai , et al. August 22, 1 | 1995-08-22 |
Plasma processing apparatus
Grant 5,413,663 - Shimizu , et al. May 9, 1 | 1995-05-09 |
Electron optic column and scanning electron microscope
Grant 5,399,860 - Miyoshi , et al. March 21, 1 | 1995-03-21 |
Apparatus and method of aligning electron beam of scanning electron microscope
Grant 5,359,197 - Komatsu , et al. October 25, 1 | 1994-10-25 |
Method of testing semiconductor elements and apparatus for testing the same
Grant 5,030,908 - Miyoshi , et al. July 9, 1 | 1991-07-09 |
Electron beam apparatus including a plurality of ion pump blocks
Grant 5,021,702 - Miyoshi , et al. * June 4, 1 | 1991-06-04 |
Method of testing semiconductor elements
Grant 4,912,052 - Miyoshi , et al. March 27, 1 | 1990-03-27 |
Surface inspection method and apparatus therefor
Grant 4,902,131 - Yamazaki , et al. February 20, 1 | 1990-02-20 |
Electron beam apparatus including plurality of ion pump blocks
Grant 4,890,029 - Miyoshi , et al. December 26, 1 | 1989-12-26 |
Apparatus and method for controlling irradiation of an electron beam at a fixed position in an electron beam tester system
Grant 4,807,159 - Komatsu , et al. February 21, 1 | 1989-02-21 |
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