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Method for Purifying Polymerizable Fluoromonomer by Distillation
App 20210317065 - MIYAZAWA; Satoru ; et al. | 2021-10-14 |
Process for preparation of 2-fluoroacrylic esters
Grant 8,450,520 - Ishii , et al. May 28, 2 | 2013-05-28 |
Process for Preparation of 2-Fluoroacrylic Esters
App 20120059187 - Ishii; Akihiro ; et al. | 2012-03-08 |
Coating materials consisting of low- or medium-molecular organic compounds
Grant 7,919,224 - Miyazawa , et al. April 5, 2 | 2011-04-05 |
Fluorinated cyclic compound, polymerizable fluoromonomer, fluoropolymer, resist material comprising the same, and method of forming pattern with the same
Grant 7,781,602 - Komoriya , et al. August 24, 2 | 2010-08-24 |
Fluorine-containing polymerisable monomer and polymer prepared by using same
Grant 7,759,440 - Miyazawa , et al. July 20, 2 | 2010-07-20 |
Polymerizable acrylate compound containing hexafluorocarbinol group and polymer made therefrom
Grant 7,750,178 - Miyazawa , et al. July 6, 2 | 2010-07-06 |
Coating Materials Consisting of Low- or Medium-Molecular Organic Compounds
App 20090272295 - Miyazawa; Satoru ; et al. | 2009-11-05 |
Resist protective coating material and patterning process
Grant 7,569,323 - Hatakeyama , et al. August 4, 2 | 2009-08-04 |
Polyester compound and resist material using the same
Grant 7,517,635 - Miyazawa , et al. April 14, 2 | 2009-04-14 |
Fluorinated Cyclic Compound, Polymerizable Fluoromonomer, Fluoropolymer, Resist Material Comprising the Same, and Method of Forming Pattern with the Same
App 20080194764 - KOMORIYA; Haruhiko ; et al. | 2008-08-14 |
Top coat composition
Grant 7,402,626 - Maeda , et al. July 22, 2 | 2008-07-22 |
Process for producing .alpha.-substituted acrylic norbornanyyl compounds
Grant 7,385,079 - Komata , et al. June 10, 2 | 2008-06-10 |
Polyester compound and resist material using the same
App 20080050674 - Miyazawa; Satoru ; et al. | 2008-02-28 |
Process for producing acrylic ester compound
Grant 7,173,147 - Miyazawa , et al. February 6, 2 | 2007-02-06 |
Resist protective coating material and patterning process
App 20070026341 - Hatakeyama; Jun ; et al. | 2007-02-01 |
Fluorine-containing polymerisable monomer and polymer prepared by using same
App 20060252897 - Miyazawa; Satoru ; et al. | 2006-11-09 |
Polymers, resist compositions and patterning process
Grant 7,125,641 - Harada , et al. October 24, 2 | 2006-10-24 |
Sulfonates, polymers, resist compositions and patterning process
Grant 7,125,642 - Harada , et al. October 24, 2 | 2006-10-24 |
Novel polymerizable acrylate compound containing hexafluorocarbinol group and polymer made therefrom
App 20060217507 - Miyazawa; Satoru ; et al. | 2006-09-28 |
Fluorine-containing polymerizable monomer and polymer prepared by using same
Grant 7,094,850 - Miyazawa , et al. August 22, 2 | 2006-08-22 |
Process for producing .alpha.-substituted acrylic acid esters
Grant 7,067,691 - Komata , et al. June 27, 2 | 2006-06-27 |
Polymers, resist compositions and patterning process
Grant 7,005,228 - Hatakeyama , et al. February 28, 2 | 2006-02-28 |
Top coat composition
App 20050250898 - Maeda, Kazuhiko ; et al. | 2005-11-10 |
Polymers, resist compositions and patterning process
Grant 6,933,095 - Harada , et al. August 23, 2 | 2005-08-23 |
Process for producing acrylic ester compound
App 20050171375 - Miyazawa, Satoru ; et al. | 2005-08-04 |
Process for producing alpha-substituted acrylic acid esters
App 20050165249 - Komata, Takeo ; et al. | 2005-07-28 |
Process for producing alpha-substituted acrylic norbornanyyl compounds
App 20050131248 - Komata, Takeo ; et al. | 2005-06-16 |
Resist compositions and patterning process
Grant 6,875,556 - Harada , et al. April 5, 2 | 2005-04-05 |
Polymers, resist compositions and patterning process
Grant 6,864,037 - Hatakeyama , et al. March 8, 2 | 2005-03-08 |
Polymers, resist compositions and patterning process
Grant 6,861,197 - Harada , et al. March 1, 2 | 2005-03-01 |
Fluorine-containing cyclic compounds, fluorine-containing polymerizable monomers, fluorine-containing polymers resist compositions and patterning method
Grant 6,858,760 - Komoriya , et al. February 22, 2 | 2005-02-22 |
Fluorine-containing polymerisable monomer and polymer prepared by using same
App 20040236046 - Miyazawa, Satoru ; et al. | 2004-11-25 |
Fluorine-containing cyclic compounds, fluorine-containing polymerizable monomers, fluorine-containing polymers resist compositions and patterning method
App 20040225159 - Komoriya, Haruhiko ; et al. | 2004-11-11 |
Resist compositions and patterning process
Grant 6,790,586 - Hatakeyama , et al. September 14, 2 | 2004-09-14 |
Fluorine-containing acrylate monomers
Grant 6,784,312 - Miyazawa , et al. August 31, 2 | 2004-08-31 |
Polymers, resist compositions and patterning process
App 20040157155 - Harada, Yuji ; et al. | 2004-08-12 |
Sulfonates, polymers, resist compositions and patterning process
App 20040157156 - Harada, Yuji ; et al. | 2004-08-12 |
Resist compositions and patterning process
App 20040144752 - Harada, Yuji ; et al. | 2004-07-29 |
Polymers, resist compositions and patterning process
Grant 6,710,148 - Harada , et al. March 23, 2 | 2004-03-23 |
Ester compounds
Grant 6,680,389 - Harada , et al. January 20, 2 | 2004-01-20 |
Polymers, resist compositions and patterning process
App 20030082479 - Hatakeyama, Jun ; et al. | 2003-05-01 |
Fluorine-containing polymerisable monomer and polymer prepared by using same
App 20030078352 - Miyazawa, Satoru ; et al. | 2003-04-24 |
Polymers, resist compositions and patterning process
App 20030031953 - Hatakeyama, Jun ; et al. | 2003-02-13 |
Polymers, resist compositions and patterning process
App 20030031952 - Harada, Yuji ; et al. | 2003-02-13 |
Polymers, resist compositions and patterning process
App 20030008231 - Harada, Yuji ; et al. | 2003-01-09 |
Novel ester compounds
App 20020198390 - Harada, Yuji ; et al. | 2002-12-26 |
Polymers, resist compositions and patterning process
App 20020161148 - Harada, Yuji ; et al. | 2002-10-31 |
Resist compositions and patterning process
App 20020051935 - Hatakeyama, Jun ; et al. | 2002-05-02 |
Polymers, resist compositions and patterning process
App 20020051936 - Harada, Yuji ; et al. | 2002-05-02 |
Polymers, resist compositions and patterning process
App 20020048724 - Harada, Yuji ; et al. | 2002-04-25 |
Octafluorotricyclodecane derivatives and processes for producing same
App 20020022740 - Miyazawa, Satoru ; et al. | 2002-02-21 |
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