Miyazaki; Tadaki

Patent Applications and Registrations

Patent applications and USPTO patent grants for Miyazaki; Tadaki.The latest application filed is for "alignment apparatus, lithography apparatus, and article manufacturing method".

Company Profile

2.9.8

Miyazaki; Tadaki - Utsunomiya JP
Miyazaki; Tadaki - Utsunomiya-shi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Detection apparatus detection method and lithography apparatus Grant 11,156,929 - Miyazaki October 26, 2	2021-10-26
Alignment apparatus, lithography apparatus, and article manufacturing method Grant 10,659,736 - Miyazaki	2020-05-19
Position detection method, position detection apparatus, lithography apparatus, and article manufacturing method Grant 10,503,079 - Miyazaki Dec	2019-12-10
Alignment Apparatus, Lithography Apparatus, And Article Manufacturing Method App 20190199972 - Miyazaki; Tadaki	2019-06-27
Apparatus and method for detecting position, exposure apparatus, and method for the same Grant 10,314,142 - Miyazaki	2019-06-04
Detection Apparatus Detection Method And Lithography Apparatus App 20190121250 - Miyazaki; Tadaki	2019-04-25
Detection apparatus, detection method, and lithography apparatus Grant 10,185,876 - Miyazaki Ja	2019-01-22
Position Detection Method, Position Detection Apparatus, Lithography Apparatus, And Article Manufacturing Method App 20180059553 - Miyazaki; Tadaki	2018-03-01
Lithography apparatus, lithography method, and article manufacturing method Grant 9,703,214 - Miyazaki July 11, 2	2017-07-11
Measuring apparatus, measuring method, lithography apparatus, and method of manufacturing article Grant 9,606,461 - Miyazaki March 28, 2	2017-03-28
Apparatus And Method For Detecting Position, Exposure Apparatus, And Method For The Same App 20170060003 - Miyazaki; Tadaki	2017-03-02
Detection Apparatus, Detection Method, And Lithography Apparatus App 20150206298 - Miyazaki; Tadaki	2015-07-23
Measuring Apparatus, Measuring Method, Lithography Apparatus, And Method Of Manufacturing Article App 20150070679 - MIYAZAKI; Tadaki	2015-03-12
Lithography Apparatus, Lithography Method, And Article Manufacturing Method App 20150022797 - MIYAZAKI; Tadaki	2015-01-22
Position detection apparatus, exposure apparatus, and device fabrication method Grant 8,405,818 - Miyazaki March 26, 2	2013-03-26
Position Detection Apparatus, Exposure Apparatus, And Device Fabrication Method App 20110051111 - MIYAZAKI; Tadaki	2011-03-03

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