Miyazaki; Mitsuru

Patent Applications and Registrations

Patent applications and USPTO patent grants for Miyazaki; Mitsuru.The latest application filed is for "cleaning member mounting mechanism and substrate cleaning apparatus".

Company Profile

16.54.61

Miyazaki; Mitsuru - Tokyo JP
Miyazaki; Mitsuru - Ashikaga N/A JP
Miyazaki; Mitsuru - Tochigi JP
Miyazaki; Mitsuru - Minato-ku JP
Miyazaki; Mitsuru - Kamakura JP
Miyazaki, Mitsuru - Kamakura-shi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method Grant 11,426,834 - Miyazaki , et al. August 30, 2	2022-08-30
Cleaning Member Mounting Mechanism And Substrate Cleaning Apparatus App 20210384048 - Miyazaki; Mitsuru ; et al.	2021-12-09
Substrate processing apparatus, method of detaching substrate from vacuum suction table of substrate processing apparatus, and method of placing substrate onto vacuum suction table of substrate processing apparatus Grant 11,195,736 - Toyomura , et al. December 7, 2	2021-12-07
Buff processing device and substrate processing device Grant 11,103,972 - Aizawa , et al. August 31, 2	2021-08-31
Cleaning liquid supplying system, substrate processing apparatus and substrate processing system Grant 11,090,692 - Miyazaki , et al. August 17, 2	2021-08-17
Cleaning Apparatus And Polishing Apparatus App 20210202273 - MIYAZAKI; Mitsuru ; et al.	2021-07-01
Substrate Cleaning Apparatus And Cleaning Method Of Substrate App 20210111018 - OIKAWA; Fumitoshi ; et al.	2021-04-15
Table for holding workpiece and processing apparatus with the table Grant 10,898,987 - Toyomura , et al. January 26, 2	2021-01-26
Substrate Processing Apparatus And Processing Method App 20210013071 - Yamaguchi; Kuniaki ; et al.	2021-01-14
Substrate cleaning device, substrate cleaning apparatus, method for manufacturing cleaned substrate and substrate processing apparatus Grant 10,879,086 - Sakurai , et al. December 29, 2	2020-12-29
Substrate holding apparatus Grant 10,847,407 - Toyomura , et al. November 24, 2	2020-11-24
Substrate Support Apparatus And Substrate Cleaning Apparatus App 20200316742 - Miyazaki; Mitsuru	2020-10-08
Substrate Supporting Apparatus And Method Of Controlling Substrate Supporting Apparatus App 20200321237 - MIYAZAKI; Mitsuru ; et al.	2020-10-08
Substrate cleaning apparatus and substrate processing apparatus Grant 10,575,697 - Imamura , et al.	2020-03-03
Cleaning apparatus and substrate processing apparatus Grant 10,573,509 - Maeda , et al. Feb	2020-02-25
Substrate Processing Apparatus, Substrate Processing Method, Substrate Holding Mechanism, And Substrate Holding Method App 20200047309 - Miyazaki; Mitsuru ; et al.	2020-02-13
Sensor Target Cover Used In Combination With Liquid Level Detection Sensor, Wet Processing Device, Substrate Processing Device, App 20200049546 - TOYOMURA; Naoki ; et al.	2020-02-13
Substrate cleaning apparatus and substrate processing apparatus Grant 10,546,764 - Imamura , et al. Ja	2020-01-28
Jig And Installation Method Using Same Jig App 20200009702 - CHENG; Lien Yin ; et al.	2020-01-09
Substrate processing apparatus and substrate processing method Grant 10,500,691 - Imai , et al. Dec	2019-12-10
Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method Grant 10,486,285 - Miyazaki , et al. Nov	2019-11-26
Cleaning Liquid Supplying System, Substrate Processing Apparatus And Substrate Processing System App 20190308223 - MIYAZAKI; Mitsuru ; et al.	2019-10-10
Substrate processing apparatus and pipe cleaning method for substrate processing apparatus Grant 10,438,818 - Kunisawa , et al. O	2019-10-08
Cleaning apparatus and substrate processing apparatus Grant 10,438,817 - Xu , et al. O	2019-10-08
Substrate Processing Apparatus App 20190118338 - YAMAGUCHI; Kuniaki ; et al.	2019-04-25
Substrate processing apparatus Grant 10,201,888 - Yamaguchi , et al. Feb	2019-02-12
Buff Processing Device And Substrate Processing Device App 20180345452 - AIZAWA; Hideo ; et al.	2018-12-06
Substrate holding apparatus Grant 10,121,692 - Toyomura , et al. November 6, 2	2018-11-06
Substrate Cleaning Device, Substrate Cleaning Apparatus, Method For Manufacturing Cleaned Substrate And Substrate Processing Apparatus App 20180308716 - SAKURAI; Takeshi ; et al.	2018-10-25
Substrate Cleaning Apparatus And Substrate Processing Apparatus App 20180289230 - IMAMURA; Akira ; et al.	2018-10-11
Substrate cleaning device, substrate cleaning apparatus, method for manufacturing cleaned substrate and substrate processing apparatus Grant 10,032,655 - Sakurai , et al. July 24, 2	2018-07-24
Substrate Processing Apparatus And Substrate Processing Method App 20180056470 - IMAI; Masayoshi ; et al.	2018-03-01
Substrate gripping apparatus Grant 9,892,953 - Miyazaki , et al. February 13, 2	2018-02-13
Cleaning Apparatus And Substrate Processing Apparatus App 20170372893 - Maeda; Koji ; et al.	2017-12-28
Substrate Processing Apparatus App 20170252895 - YAMAGUCHI; Kuniaki ; et al.	2017-09-07
Substrate Processing Apparatus, Substrate Processing Method, Substrate Holding Mechanism, And Substrate Holding Method App 20170252894 - MIYAZAKI; Mitsuru ; et al.	2017-09-07
Dresser disk Grant D795,315 - Miyazaki , et al. August 22, 2	2017-08-22
Substrate Cleaning Apparatus And Substrate Processing Apparatus App 20170236730 - IMAMURA; Akira ; et al.	2017-08-17
Cleaning Apparatus And Substrate Processing Apparatus App 20170207106 - Xu; Haiyang ; et al.	2017-07-20
Substrate processing apparatus Grant 9,700,988 - Yamaguchi , et al. July 11, 2	2017-07-11
Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method Grant 9,687,957 - Miyazaki , et al. June 27, 2	2017-06-27
Vacuum contact pad Grant D790,489 - Toyomura , et al. June 27, 2	2017-06-27
Substrate Processing Apparatus, Method Of Detaching Substrate From Vacuum Suction Table Of Substrate Processing Apparatus, And Method Of Placing Substrate Onto Vacuum Suction Table Of Substrate Processing Apparatus App 20170162409 - TOYOMURA; Naoki ; et al.	2017-06-08
Substrate processing apparatus and processed substrate manufacturing method Grant 9,673,067 - Yokoyama , et al. June 6, 2	2017-06-06
Substrate Holding Apparatus App 20170148660 - TOYOMURA; Naoki ; et al.	2017-05-25
Substrate Processing Apparatus And Pipe Cleaning Method For Substrate Processing Apparatus App 20170117165 - KUNISAWA; Junji ; et al.	2017-04-27
Substrate holding apparatus and substrate cleaning apparatus Grant 9,558,971 - Miyazaki , et al. January 31, 2	2017-01-31
Substrate processing apparatus, substrate transfer method and substrate transfer device Grant 9,530,676 - Yokoyama , et al. December 27, 2	2016-12-27
Table For Holding Workpiece And Processing Apparatus With The Table App 20160346902 - TOYOMURA; Naoki ; et al.	2016-12-01
Polishing apparatus and polishing method Grant 9,362,129 - Miyazaki , et al. June 7, 2	2016-06-07
Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method Grant 9,358,662 - Miyazaki , et al. June 7, 2	2016-06-07
Substrate Holding Apparatus App 20160141201 - TOYOMURA; Naoki ; et al.	2016-05-19
Substrate Gripping Apparatus App 20160133503 - Miyazaki; Mitsuru ; et al.	2016-05-12
Substrate Processing Apparatus And Processing Method App 20160099156 - YAMAGUCHI; Kuniaki ; et al.	2016-04-07
Substrate Processing Apparatus App 20160059380 - YAMAGUCHI; Kuniaki ; et al.	2016-03-03
Substrate gripping apparatus Grant 9,269,605 - Miyazaki , et al. February 23, 2	2016-02-23
Substrate processing method and substrate processing unit Grant 9,165,799 - Wang , et al. October 20, 2	2015-10-20
Substrate Processing Apparatus, Substrate Transfer Method And Substrate Transfer Device App 20150221536 - YOKOYAMA; Toshio ; et al.	2015-08-06
Roller shaft for substrate cleaning Grant D735,429 - Miyazaki , et al. July 28, 2	2015-07-28
Roller shaft for substrate cleaning Grant D735,430 - Miyazaki , et al. July 28, 2	2015-07-28
Roller shaft for substrate cleaning Grant D735,431 - Miyazaki , et al. July 28, 2	2015-07-28
Substrate Processing Apparatus, Substrate Processing Method, Substrate Holding Mechanism, And Substrate Holding Method App 20150050863 - MIYAZAKI; Mitsuru ; et al.	2015-02-19
Substrate Cleaning Device, Substrate Cleaning Apparatus, Cleaned Substrate Manufacturing Method And Substrate Processing Apparatus App 20150020851 - Sakurai; Takeshi ; et al.	2015-01-22
Substrate Holding Apparatus And Substrate Cleaning Apparatus App 20140373289 - Miyazaki; Mitsuru ; et al.	2014-12-25
Substrate Processing Apparatus And Processed Substrate Manufacturing Method App 20140311532 - YOKOYAMA; Toshio ; et al.	2014-10-23
Substrate Processing Apparatus, Substrate Processing Method, Substrate Holding Mechanism, And Substrate Holding Method App 20140302676 - MIYAZAKI; Mitsuru ; et al.	2014-10-09
Seismic isolation device and seismic isolation structure Grant 8,833,745 - Fujita , et al. September 16, 2	2014-09-16
Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method Grant 8,795,032 - Miyazaki , et al. August 5, 2	2014-08-05
Substrate Gripping Apparatus App 20140197610 - Miyazaki; Mitsuru ; et al.	2014-07-17
Polishing Apparatus And Polishing Method App 20140120725 - MIYAZAKI; Mitsuru ; et al.	2014-05-01
Substrate Processing Apparatus App 20140083468 - MIYAZAKI; Mitsuru ; et al.	2014-03-27
Active dynamic vibration absorber Grant 8,484,910 - Shimoda , et al. July 16, 2	2013-07-16
Substrate Processing Method And Substrate Processing Unit App 20120318304 - WANG; Xinming ; et al.	2012-12-20
Substrate Processing Apparatus, Substrate Transfer Method And Substrate Transfer Device App 20120308356 - YOKOYAMA; Toshio ; et al.	2012-12-06
Active Dynamic Vibration Absorber App 20120266547 - Shimoda; Ikuo ; et al.	2012-10-25
Substrate processing method and apparatus Grant 8,225,803 - Katsuoka , et al. July 24, 2	2012-07-24
Substrate Polishing Apparatus And Method App 20110237163 - Katsuoka; Seiji ; et al.	2011-09-29
Seismic Isolation Device And Seismic Isolation Structure App 20110227265 - Fujita; Satoshi ; et al.	2011-09-22
Substrate Processing Method And Apparatus App 20110203518 - KATSUOKA; Seiji ; et al.	2011-08-25
Damper and vibration damping structure using the same Grant 8,002,093 - Mochimaru , et al. August 23, 2	2011-08-23
Substrate polishing apparatus and method Grant 7,976,362 - Katsuoka , et al. July 12, 2	2011-07-12
Substrate processing method and apparatus Grant 7,959,977 - Katsuoka , et al. June 14, 2	2011-06-14
Substrate Processing Method And Apparatus App 20100221432 - Katsuoka; Seiji ; et al.	2010-09-02
Substrate processing method and apparatus Grant 7,735,451 - Katsuoka , et al. June 15, 2	2010-06-15
Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method App 20090305612 - Miyazaki; Mitsuru ; et al.	2009-12-10
Friction Damper App 20090293380 - Sasaki; Kazuhiko ; et al.	2009-12-03
Substrate Polishing Apparatus And Method App 20090291624 - KATSUOKA; Seiji ; et al.	2009-11-26
Damper and vibration damping structure using the same App 20090260304 - Mochimaru; Masami ; et al.	2009-10-22
Substrate polishing apparatus and method Grant 7,585,205 - Katsuoka , et al. September 8, 2	2009-09-08
Substrate processing apparatus and substrate processing method Grant 7,575,636 - Katsuoka , et al. August 18, 2	2009-08-18
Damper and vibration damping structure using the same Grant 7,565,957 - Mochimaru , et al. July 28, 2	2009-07-28
Substrate processing apparatus and substrate processing method Grant 7,442,257 - Katsuoka , et al. October 28, 2	2008-10-28
Substrate polishing apparatus and method App 20080085658 - Katsuoka; Seiji ; et al.	2008-04-10
Substrate processing apparatus and substrate processing method App 20070214620 - Miyazaki; Mitsuru ; et al.	2007-09-20
Substrate processing apparatus and substrate processing method Grant 7,235,135 - Miyazaki , et al. June 26, 2	2007-06-26
Damper and vibration damping structure using the same App 20070108002 - Mochimaru; Masami ; et al.	2007-05-17
Damper and vibration damping structure using the same Grant 7,182,187 - Mochimaru , et al. February 27, 2	2007-02-27
Substrate processing apparatus and substrate processing method App 20060243204 - Katsuoka; Seiji ; et al.	2006-11-02
Substrate processing apparatus and substrate processing method App 20060243205 - Katsuoka; Seiji ; et al.	2006-11-02
Substrate processing apparatus and substrate processing method App 20060236929 - Katsuoka; Seiji ; et al.	2006-10-26
Substrate processing apparatus and substrate processing method Grant 7,087,117 - Katsuoka , et al. August 8, 2	2006-08-08
Substrate processing apparatus and substrate processing method App 20050158478 - Katsuoka, Seiji ; et al.	2005-07-21
Vibration absorber, and vibration control, structure using the same App 20050077664 - Mochimaru, Masami ; et al.	2005-04-14
Substrate processing apparatus and substrate processing method App 20050072358 - Katsuoka, Seiji ; et al.	2005-04-07
Electrolytic solution supply and recovery facility and liquid component replenishment apparatus App 20040256221 - Mishima, Koji ; et al.	2004-12-23
Substrate processing method and apparatus App 20040131766 - Katsuoka, Seiji ; et al.	2004-07-08
Substrate processing apparatus and substrate processing method App 20040040131 - Miyazaki, Mitsuru ; et al.	2004-03-04
Polishing apparatus Grant 6,629,883 - Katsuoka , et al. October 7, 2	2003-10-07
Polishing apparatus App 20010044266 - Katsuoka, Seiji ; et al.	2001-11-22
Seismic isolation apparatus Grant 6,123,313 - Otsuka , et al. September 26, 2	2000-09-26

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