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Substrate processing device and substrate processing method
Grant 10,406,566 - Matsushita , et al. Sept | 2019-09-10 |
Substrate processing apparatus and substrate processing method
Grant 10,281,210 - Miyazaki , et al. | 2019-05-07 |
Substrate processing apparatus and substrate processing method
Grant 9,966,282 - Miyazaki , et al. May 8, 2 | 2018-05-08 |
Processing Liquid Generator And Substrate Processing Apparatus Using The Same
App 20180033651 - HAYASHI; Konosuke ; et al. | 2018-02-01 |
Substrate Processing Device And Substrate Processing Method
App 20170259308 - MATSUSHITA; Jun ; et al. | 2017-09-14 |
Substrate Processing Apparatus And Substrate Processing Method
App 20160093486 - MIYAZAKI; Kunihiro ; et al. | 2016-03-31 |
Substrate Processing Apparatus And Substrate Processing Method
App 20160025409 - MIYAZAKI; Kunihiro ; et al. | 2016-01-28 |
Substrate Processing Device And Substrate Processing Method
App 20150090297 - MATSUSHITA; Jun ; et al. | 2015-04-02 |
Substrate Processing Device And Substrate Processing Method
App 20150090296 - NAGASHIMA; Yuji ; et al. | 2015-04-02 |
Substrate Processing Device And Substrate Processing Method
App 20150090298 - NAGASHIMA; Yuji ; et al. | 2015-04-02 |
Manufacturing method and apparatus for semiconductor device
Grant 8,841,205 - Kamimura , et al. September 23, 2 | 2014-09-23 |
Cleaning Solution Producing Apparatus, Cleaning Solution Producing Method, And Substrate Cleaning Apparatus
App 20140041694 - MIYAZAKI; Kunihiro ; et al. | 2014-02-13 |
Manufacturing method for semiconductor device and semiconductor device
Grant 8,148,717 - Ito , et al. April 3, 2 | 2012-04-03 |
Manufacturing Method And Apparatus For Semiconductor Device
App 20120052600 - Kamimura; Masaki ; et al. | 2012-03-01 |
Substrate Cleaning Apparatus And Substrate Cleaning Method
App 20120031441 - Tomita; Hiroshi ; et al. | 2012-02-09 |
Substrate cleaning apparatus and substrate cleaning method
Grant 8,066,020 - Tomita , et al. November 29, 2 | 2011-11-29 |
Manufacturing method for semiconductor device and semiconductor device
App 20110127578 - Ito; Takayuki ; et al. | 2011-06-02 |
Manufacturing method for semiconductor device and semiconductor device
App 20110089525 - Ito; Yasuhiro ; et al. | 2011-04-21 |
Manufacturing method for semiconductor device and semiconductor device
Grant 7,902,030 - Ito , et al. March 8, 2 | 2011-03-08 |
Heat Treatment Apparatus And Method For Manufacturing Semiconductor Device
App 20110034015 - Yoshino; Kenichi ; et al. | 2011-02-10 |
Manufacturing method for semiconductor device and semiconductor device
Grant 7,875,527 - Ito , et al. January 25, 2 | 2011-01-25 |
Semiconductor substrate treating method, semiconductor component and electronic appliance
Grant 7,875,557 - Matsuo , et al. January 25, 2 | 2011-01-25 |
Semiconductor Device And Method Of Manufacturing Semiconductor Device
App 20110001170 - Ito; Takayuki ; et al. | 2011-01-06 |
Method of manufacturing semiconductor device and cleaning apparatus
Grant 7,850,818 - Matsumura , et al. December 14, 2 | 2010-12-14 |
Manufacturing Method For Semiconductor Device And Heat Treatment Apparatus
App 20100151696 - ITO; Takayuki ; et al. | 2010-06-17 |
Method of manufacturing semiconductor device and cleaning apparatus
App 20100059180 - Matsumura; Tsuyoshi ; et al. | 2010-03-11 |
Method of manufacturing semiconductor device and cleaning apparatus
Grant 7,635,601 - Matsumura , et al. December 22, 2 | 2009-12-22 |
Manufacturing Method For Semiconductor Device And Semiconductor Device
App 20090309133 - Ito; Takayuki ; et al. | 2009-12-17 |
Electrical junction box
Grant 7,619,896 - Yamashita , et al. November 17, 2 | 2009-11-17 |
Manufacturing Method For Semiconductor Device And Semiconductor Device
App 20090212387 - Ito; Yasuhiro ; et al. | 2009-08-27 |
Electrical Junction Box
App 20080310121 - Yamashita; Hisanobu ; et al. | 2008-12-18 |
Method of manufacturing a semiconductor device, and a semiconductor substrate
Grant 7,439,183 - Miyazaki , et al. October 21, 2 | 2008-10-21 |
Wafer cleaning method and equipment
App 20080202559 - Miyazaki; Kunihiro ; et al. | 2008-08-28 |
Etching method, a method of forming a trench isolation structure, a semiconductor substrate and a semiconductor apparatus
Grant 7,365,012 - Matsuo , et al. April 29, 2 | 2008-04-29 |
Semiconductor manufacturing apparatus for use in process of cleaning semiconductor substrate and method of manufacturing semiconductor device using the same
App 20080006295 - Miyazaki; Kunihiro ; et al. | 2008-01-10 |
Material supply system in semiconductor device manufacturing plant
Grant 7,305,275 - Miyazaki , et al. December 4, 2 | 2007-12-04 |
System for controlling production of electronic devices, system and method for producing electronic devices, and computer program product
App 20070233302 - Miyazaki; Kunihiro ; et al. | 2007-10-04 |
Method of manufacturing semiconductor device and cleaning apparatus
App 20070178613 - Matsumura; Tsuyoshi ; et al. | 2007-08-02 |
Substrate cleaning apparatus and substrate cleaning method
App 20070095363 - Tomita; Hiroshi ; et al. | 2007-05-03 |
Manufacturing apparatus of semiconductor device having introducing section and withdrawing section
Grant 7,141,120 - Miyazaki November 28, 2 | 2006-11-28 |
Semiconductor substrate treating method, semiconductor component and electronic appliance
App 20060144421 - Matsuo; Hiroyuki ; et al. | 2006-07-06 |
Semiconductor manufacturing apparatus and chemical exchanging method
App 20060042756 - Miyazaki; Kunihiro ; et al. | 2006-03-02 |
Method of manufacturing a semiconductor device, and a semiconductor substrate
App 20060046487 - Miyazaki; Kunihiro ; et al. | 2006-03-02 |
Etching method, a method of forming a trench isolation structure, a semiconductor substrate and a semiconductor apparatus
App 20060033178 - Matsuo; Hiroyuki ; et al. | 2006-02-16 |
Electrical connection box
App 20050227552 - Yamashita, Hisanobu ; et al. | 2005-10-13 |
Material supply system in semiconductor device manufacturing plant
App 20050177273 - Miyazaki, Kunihiro ; et al. | 2005-08-11 |
Wafer cleaning method and equipment
App 20050081886 - Miyazaki, Kunihiro ; et al. | 2005-04-21 |
Substrate treating apparatus
Grant 6,832,616 - Miyazaki December 21, 2 | 2004-12-21 |
Semiconductor manufacturing device, semiconductor manufacturing system and substrate treating method
App 20030221960 - Nakao, Takashi ; et al. | 2003-12-04 |
Etching for manufacture of semiconductor devices
Grant 6,645,876 - Saito , et al. November 11, 2 | 2003-11-11 |
Manufacturing apparatus of semiconductor device having introducing section and withdrawing section
App 20030099535 - Miyazaki, Kunihiro | 2003-05-29 |
Substrate treating apparatus
App 20030024553 - Miyazaki, Kunihiro | 2003-02-06 |
Method of cleaning a semiconductor substrate
Grant 6,444,047 - Miyazaki September 3, 2 | 2002-09-03 |
Etching for manufacture of semiconductor devices
App 20020086552 - Saito, Mami ; et al. | 2002-07-04 |
Surface processing method and surface processing device for silicon substrates
Grant 5,868,855 - Fukazawa , et al. February 9, 1 | 1999-02-09 |
Fluorescent X-ray analyzing apparatus
Grant 5,732,120 - Shoji , et al. March 24, 1 | 1998-03-24 |
Surface processing method effected for total-reflection X-ray fluorescence analysis
Grant 5,686,314 - Miyazaki November 11, 1 | 1997-11-11 |
Polishing pad for semiconductor wafers
Grant 4,954,141 - Takiyama , et al. September 4, 1 | 1990-09-04 |
Abrasive composition and process for polishing plastic article
Grant 4,935,039 - Miyazaki , et al. June 19, 1 | 1990-06-19 |
Abrasive composition and process for polishing
Grant 4,929,257 - Miyazaki , et al. May 29, 1 | 1990-05-29 |
Abrasive composition and process for polishing
Grant 4,915,710 - Miyazaki , et al. April 10, 1 | 1990-04-10 |
Hard tissue substitute composition
Grant 4,902,649 - Kimura , et al. February 20, 1 | 1990-02-20 |
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