loadpatents
Patent applications and USPTO patent grants for MIYASHITA; Tetsuya.The latest application filed is for "substrate processing apparatus and abnormality detection method".
Patent | Date |
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Substrate Processing Apparatus And Abnormality Detection Method App 20220285197 - CHIHAYA; Hiroaki ;   et al. | 2022-09-08 |
Substrate Processing Apparatus And Abnormality Detection Method App 20220285182 - CHIHAYA; Hiroaki ;   et al. | 2022-09-08 |
Apparatus For Performing Sputtering Process And Method Thereof App 20220270866 - MIYASHITA; Tetsuya ;   et al. | 2022-08-25 |
Film Formation Apparatus And Film Formation Method App 20220223390 - SHINADA; Masato ;   et al. | 2022-07-14 |
Sputtering Apparatus And Method Of Controlling Sputtering Apparatus App 20220208534 - SHINADA; Masato ;   et al. | 2022-06-30 |
Film Forming Apparatus And Film Forming Method App 20220178014 - MAEDA; Koji ;   et al. | 2022-06-09 |
Magnetron Sputtering Apparatus And Magnetron Sputtering Method App 20220108880 - MIYASHITA; Tetsuya ;   et al. | 2022-04-07 |
Film Forming Apparatus, Film Forming System, And Film Forming Method App 20220081757 - Shinada; Masato ;   et al. | 2022-03-17 |
Vacuum Transfer Device, Substrate Processing System, And Substrate Processing Method App 20220037181 - HATANO; Tatsuo ;   et al. | 2022-02-03 |
PVD processing method and PVD processing apparatus Grant 11,193,200 - Maeda , et al. December 7, 2 | 2021-12-07 |
Film-forming Device App 20200071815 - TOSHIMA; Hiroyuki ;   et al. | 2020-03-05 |
Substrate processing apparatus Grant 10,468,237 - Gomi , et al. No | 2019-11-05 |
Film forming apparatus Grant 10,392,688 - Takei , et al. A | 2019-08-27 |
Film Forming System And Method For Forming Film On Substrate App 20190252165 - SHINADA; Masato ;   et al. | 2019-08-15 |
Mounting table system, substrate processing apparatus, and temperature control method Grant 10,325,801 - Mitsunaga , et al. | 2019-06-18 |
Pvd Processing Method And Pvd Processing Apparatus App 20190169737 - Maeda; Koji ;   et al. | 2019-06-06 |
Substrate Processing Apparatus App 20180315585 - Gomi; Atsushi ;   et al. | 2018-11-01 |
Substrate processing apparatus Grant 10,049,860 - Gomi , et al. August 14, 2 | 2018-08-14 |
Vacuum exhaust method Grant 10,014,145 - Saito , et al. July 3, 2 | 2018-07-03 |
Film Forming Apparatus App 20180155817 - TAKEI; Junichi ;   et al. | 2018-06-07 |
Vacuum Exhaust Method App 20170345609 - SAITO; Tomohiro ;   et al. | 2017-11-30 |
Mounting Table System, Substrate Processing Apparatus, And Temperature Control Method App 20170330787 - MITSUNAGA; Tadashi ;   et al. | 2017-11-16 |
Vacuum-processing apparatus, vacuum-processing method, and storage medium Grant 9,790,590 - Furukawa , et al. October 17, 2 | 2017-10-17 |
Cooling processing apparatus and method for operating the same Grant 9,673,078 - Miyashita , et al. June 6, 2 | 2017-06-06 |
Load lock device Grant 9,303,788 - Hara , et al. April 5, 2 | 2016-04-05 |
Substrate Processing System, Gate Valve and Substrate Transfer Method App 20150371812 - MAEDA; Kouji ;   et al. | 2015-12-24 |
Cooling Processing Apparatus And Method For Operating The Same App 20150357222 - MIYASHITA; Tetsuya ;   et al. | 2015-12-10 |
Gate valve unit, substrate processing device and substrate processing method thereof Grant 9,121,515 - Yamamoto , et al. September 1, 2 | 2015-09-01 |
Substrate Processing Apparatus App 20150235815 - Gomi; Atsushi ;   et al. | 2015-08-20 |
Vacuum-Processing Apparatus, Vacuum-Processing Method, and Storage Medium App 20150187546 - Furukawa; Shinji ;   et al. | 2015-07-02 |
Magnetron Sputtering Apparatus App 20150187549 - Kitada; Toru ;   et al. | 2015-07-02 |
Magnetron Sputtering Device, Magnetron Sputtering Method, And Non-transitory Computer-readable Storage Medium App 20150136596 - Nakamura; Kanto ;   et al. | 2015-05-21 |
Sputter Device App 20140346037 - MIZUNO; Shigeru ;   et al. | 2014-11-27 |
Load Lock Device App 20140124069 - HARA; Masamichi ;   et al. | 2014-05-08 |
Processing System App 20140076494 - MIYASHITA; Tetsuya ;   et al. | 2014-03-20 |
Gate Valve Unit, Substrate Processing Device And Substrate Processing Method Thereof App 20140003892 - Yamamoto; Kaoru ;   et al. | 2014-01-02 |
Magnetron Sputtering Apparatus And Method App 20130081938 - MIZUNO; Shigeru ;   et al. | 2013-04-04 |
Vacuum Processing Apparatus App 20120014768 - MIYASHITA; Tetsuya ;   et al. | 2012-01-19 |
Vacuum Processing System App 20100236478 - Miyashita; Tetsuya ;   et al. | 2010-09-23 |
Processing Apparatus Using Source Gas And Reactive Gas App 20090211526 - TANAKA; Masayuki ;   et al. | 2009-08-27 |
Vertical Alignment Film And Method Of Manufacturing Thereof, Vertical Alignment Substrate And Method Of Manufacturing Thereof, And Liquid Crystal Display Device App 20090147200 - Okuyama; Kentaro ;   et al. | 2009-06-11 |
Measuring method and device for liquid crystal viscosity coefficient Grant 7,389,677 - Uchida , et al. June 24, 2 | 2008-06-24 |
Processing Apparatus Using Source Gas and Reactive Gas App 20070251452 - Tanaka; Masayuki ;   et al. | 2007-11-01 |
Liquid Crystal Display Device And Method For Manufacturing The Same App 20070146599 - UCHIDA; Tatsuo ;   et al. | 2007-06-28 |
Rear projection display screen App 20070103603 - Katagiri; Baku ;   et al. | 2007-05-10 |
Measuring method and device for liquid crystal viscositycoefficient App 20060272395 - Uchida; Tatsuo ;   et al. | 2006-12-07 |
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