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Insulated-gate semiconductor device
Grant 11,205,719 - Miyashita December 21, 2 | 2021-12-21 |
Plasma probe device and plasma processing apparatus
Grant 11,164,730 - Ikeda , et al. November 2, 2 | 2021-11-02 |
Directional Coupler, Substrate Processing Apparatus, And Substrate Processing Method
App 20210234248 - TAKAHASHI; Isao ; et al. | 2021-07-29 |
Plasma Observation System And Plasma Observation Method
App 20210225623 - YAMAZAKI; Ryoji ; et al. | 2021-07-22 |
Apparatus And Method For Heat-treating Substrate
App 20210020477 - MIYASHITA; Hiroyuki ; et al. | 2021-01-21 |
Insulated-gate Semiconductor Device
App 20200303540 - MIYASHITA; Hiroyuki | 2020-09-24 |
Coagulation Factor Ix With Improved Pharmacokinetics
App 20200109390 - IGAWA; Tomoyuki ; et al. | 2020-04-09 |
Plasma Probe Device And Plasma Processing Apparatus
App 20190074166 - IKEDA; Taro ; et al. | 2019-03-07 |
Power combiner and microwave introduction mechanism
Grant 9,704,693 - Ikeda , et al. July 11, 2 | 2017-07-11 |
Acquisition method for S-parameters in microwave introduction modules, and malfunction detection method
Grant 9,702,913 - Ikeda , et al. July 11, 2 | 2017-07-11 |
Microwave radiation antenna, microwave plasma source and plasma processing apparatus
Grant 9,548,187 - Ikeda , et al. January 17, 2 | 2017-01-17 |
Tuner, microwave plasma source and impedance matching method
Grant 9,520,273 - Osada , et al. December 13, 2 | 2016-12-13 |
Microwave emission mechanism, microwave plasma source and surface wave plasma processing apparatus
Grant 9,520,272 - Ikeda , et al. December 13, 2 | 2016-12-13 |
Power Combiner and Microwave Introduction Mechanism
App 20160358750 - IKEDA; Taro ; et al. | 2016-12-08 |
Tuner, Microwave Plasma Source And Impedance Matching Method
App 20160276139 - Osada; Yuki ; et al. | 2016-09-22 |
Microwave introducing mechanism, microwave plasma source and microwave plasma processing apparatus
Grant 9,281,154 - Ikeda , et al. March 8, 2 | 2016-03-08 |
Impedance Matching Slug, Impedance Matching Device, Electromagnetic Wave Transmission Device, Electromagnetic Wave Radiation Device, And Plasma Processing Apparatus
App 20150348758 - MIYASHITA; Hiroyuki ; et al. | 2015-12-03 |
Acquisition Method For S-parameters In Microwave Introduction Modules, And Malfunction Detection Method
App 20150212127 - Ikeda; Taro ; et al. | 2015-07-30 |
Microwave Emission Mechanism, Microwave Plasma Source And Surface Wave Plasma Processing Apparatus
App 20140361684 - Ikeda; Taro ; et al. | 2014-12-11 |
Annealing apparatus
Grant 8,897,631 - Kasai , et al. November 25, 2 | 2014-11-25 |
Microwave Radiation Antenna, Microwave Plasma Source And Plasma Processing Apparatus
App 20140158302 - IKEDA; Taro ; et al. | 2014-06-12 |
Microwave Introducing Mechanism, Microwave Plasma Source And Microwave Plasma Processing Apparatus
App 20130180661 - Ikeda; Taro ; et al. | 2013-07-18 |
Annealing device
Grant 8,440,939 - Kasai , et al. May 14, 2 | 2013-05-14 |
Annealing Apparatus
App 20120279944 - KASAI; Shigeru ; et al. | 2012-11-08 |
Annealing apparatus
Grant 8,246,900 - Kasai , et al. August 21, 2 | 2012-08-21 |
Substrate processing method and substrate processing apparatus
Grant 8,124,168 - Tada , et al. February 28, 2 | 2012-02-28 |
Annealing Apparatus
App 20110033175 - Kasai; Shigeru ; et al. | 2011-02-10 |
Annealing Device
App 20100314377 - Kasai; Shigeru ; et al. | 2010-12-16 |
Differential comparator, and pipeline type A/D converter equipped with the same
Grant 7,817,077 - Miyashita October 19, 2 | 2010-10-19 |
Annealing Apparatus
App 20100038833 - Kasai; Shigeru ; et al. | 2010-02-18 |
Differential Comparator, And Pipeline Type A/d Converter Equipped With The Same
App 20090243906 - MIYASHITA; Hiroyuki | 2009-10-01 |
Alpha-ketoamide derivative, and production method and use thereof
Grant 7,491,705 - Shirasaki , et al. February 17, 2 | 2009-02-17 |
Single wafer processing unit
App 20080280048 - Kasai; Shigeru ; et al. | 2008-11-13 |
Substrate Processing Method and Substrate Processing Apparatus
App 20070292598 - Tada; Kunihiro ; et al. | 2007-12-20 |
Alpha-ketoamide derivative, and production method and use thereof
App 20070004643 - Shirasaki; Yoshihisa ; et al. | 2007-01-04 |
Semiconductor integrated circuit and operational amplifier
Grant 7,151,708 - Hinokuma , et al. December 19, 2 | 2006-12-19 |
Semiconductor integrated circuit and operational amplifier
App 20050281103 - Hinokuma, Yasuhiro ; et al. | 2005-12-22 |
Sheet-type treating device
App 20040069234 - Kasai, Shigeru ; et al. | 2004-04-15 |
Halftone phase shift photomask, halftone phase shift photomask blank, and method of producing the same
Grant 5,916,712 - Miyashita , et al. June 29, 1 | 1999-06-29 |
Phase shift photomask and phase shift photomask dry etching method
Grant 5,723,234 - Yokoyama , et al. March 3, 1 | 1998-03-03 |
Blanks for halftone phase shift photomasks, halftone phase shift photomasks, and methods for fabricating them
Grant 5,721,075 - Hashimoto , et al. February 24, 1 | 1998-02-24 |
Phase shift photomask, phase shift photomask blank, and process for fabricating them
Grant 5,702,847 - Tarumoto , et al. December 30, 1 | 1997-12-30 |
Phase shift layer-containing photomask, and its production and correction
Grant 5,614,336 - Mikami , et al. March 25, 1 | 1997-03-25 |
Overlying shifter type phase shift photomask blank, overlying shifter type phase shift photomask and methods of producing them
Grant 5,576,123 - Mohri , et al. November 19, 1 | 1996-11-19 |
Halftone phase shift photomask, halftone phase shift photomask blank, and methods of producing the same
Grant 5,538,816 - Hashimoto , et al. July 23, 1 | 1996-07-23 |
Key telephone transmission system
Grant 4,583,214 - Miyashita , et al. April 15, 1 | 1986-04-15 |
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