Patent | Date |
---|
Imprint apparatus and article manufacturing method Grant 10,558,117 - Truskett , et al. Feb | 2020-02-11 |
Mold, imprint apparatus, and method of manufacturing article Grant 10,409,156 - Choi , et al. Sept | 2019-09-10 |
Imprint apparatus, imprint method, and method of manufacturing article Grant 10,406,743 - Yamaguchi , et al. Sept | 2019-09-10 |
Application device, imprinting apparatus, and method for manufacturing object Grant 10,406,731 - Arai , et al. Sept | 2019-09-10 |
Imprint apparatus and article manufacturing method Grant 10,335,984 - Choi , et al. | 2019-07-02 |
Imprint apparatus, and method of manufacturing article Grant 10,199,244 - Kawahara , et al. Fe | 2019-02-05 |
Imprint apparatus, imprint method, and method of manufacturing article Grant 10,197,910 - Yamaguchi , et al. Fe | 2019-02-05 |
Imprint method, imprint apparatus, and production method for article Grant 10,112,324 - Miyajima , et al. October 30, 2 | 2018-10-30 |
Application Device, Imprinting Apparatus, And Method For Manufacturing Object App 20180297247 - Arai; Tsuyoshi ;   et al. | 2018-10-18 |
Application device, imprinting apparatus, and method for manufacturing object Grant 10,022,900 - Arai , et al. July 17, 2 | 2018-07-17 |
Imprint method, imprint apparatus, and method for manufacturing device Grant 9,952,504 - Miyajima , et al. April 24, 2 | 2018-04-24 |
Lithography apparatus, lithography method, program, lithography system, and article manufacturing method Grant 9,927,725 - Miyajima , et al. March 27, 2 | 2018-03-27 |
Lithography apparatus and article manufacturing method Grant 9,915,881 - Miyajima , et al. March 13, 2 | 2018-03-13 |
Imprint Apparatus, Imprint Method, And Method Of Producing Article App 20170057154 - Hayashi; Tatsuya ;   et al. | 2017-03-02 |
Imprint Apparatus, And Method Of Manufacturing Article App 20170047234 - Kawahara; Nobuto ;   et al. | 2017-02-16 |
Imprint Apparatus And Article Manufacturing Method App 20170028598 - Choi; Byung-jin ;   et al. | 2017-02-02 |
Imprint Apparatus, Imprint Method, And Method Of Manufacturing Article App 20170015045 - YAMAGUCHI; Hiromitsu ;   et al. | 2017-01-19 |
Imprint Apparatus And Article Manufacturing Method App 20160339626 - Truskett; Van Nguyen ;   et al. | 2016-11-24 |
Lithography Apparatus, Lithography Method, Program, Lithography System, And Article Manufacturing Method App 20160238946 - Miyajima; Yoshikazu ;   et al. | 2016-08-18 |
Mold, Imprint Apparatus, And Method Of Manufacturing Article App 20160236400 - Choi; Byung-Jin ;   et al. | 2016-08-18 |
Imprint Apparatus, Imprint System, And Method Of Manufacturing Article App 20160001493 - Mita; Yutaka ;   et al. | 2016-01-07 |
Imprint Apparatus, Imprint Method, And Method Of Manufacturing Article App 20150352756 - Yamaguchi; Hiromitsu ;   et al. | 2015-12-10 |
Lithography Apparatus And Article Manufacturing Method App 20150355558 - Miyajima; Yoshikazu ;   et al. | 2015-12-10 |
Application Device, Imprinting Apparatus, And Method For Manufacturing Object App 20150343680 - Arai; Tsuyoshi ;   et al. | 2015-12-03 |
Imprint Apparatus And Article Manufacturing Method App 20150328827 - Miyajima; Yoshikazu ;   et al. | 2015-11-19 |
Imprint Method, Imprint Apparatus, And Production Method For Article App 20150165650 - Miyajima; Yoshikazu ;   et al. | 2015-06-18 |
Mold App 20150004275 - Miyajima; Yoshikazu ;   et al. | 2015-01-01 |
Imprint Method, Imprint Apparatus, And Method For Manufacturing Device App 20150001746 - Miyajima; Yoshikazu ;   et al. | 2015-01-01 |
Motor apparatus, manufacturing method, exposure apparatus, and device fabrication method Grant 8,159,093 - Iwatani , et al. April 17, 2 | 2012-04-17 |
Substrate holding technique Grant 7,999,919 - Miyajima , et al. August 16, 2 | 2011-08-16 |
Motor Apparatus, Manufacturing Method, Exposure Apparatus, And Device Fabrication Method App 20090315413 - Iwatani; Satoshi ;   et al. | 2009-12-24 |
Substrate-holding technique Grant 7,602,476 - Miyajima October 13, 2 | 2009-10-13 |
Exposure apparatus, and device manufacturing method Grant 7,463,335 - Miyajima , et al. December 9, 2 | 2008-12-09 |
Exposure apparatus and device fabrication method Grant 7,426,013 - Miyajima September 16, 2 | 2008-09-16 |
Exposure apparatus and device manufacturing method Grant 7,423,724 - Hasegawa , et al. September 9, 2 | 2008-09-09 |
Plane motor device with surrounding member surrounding coil unit and with cooling channel provided within surrounding member Grant 7,408,276 - Sato , et al. August 5, 2 | 2008-08-05 |
Stage apparatus, exposure system using the same, and device manufacturing method Grant 7,391,495 - Miyajima , et al. June 24, 2 | 2008-06-24 |
Substrate-holding technique Grant 7,379,162 - Miyajima May 27, 2 | 2008-05-27 |
Reflection mirror apparatus, exposure apparatus and device manufacturing method Grant 7,349,063 - Miyajima March 25, 2 | 2008-03-25 |
Exposure method and apparatus having a projection optical system in which a projection gap is filled with liquid Grant 7,345,737 - Miyajima March 18, 2 | 2008-03-18 |
Substrate-holding Technique App 20080018036 - MIYAJIMA; Yoshikazu | 2008-01-24 |
Stage apparatus, exposure apparatus, and device manufacturing method Grant 7,321,418 - Sasaki , et al. January 22, 2 | 2008-01-22 |
Stage device, exposure apparatus using the unit, and device manufacturing method Grant 7,319,510 - Miyajima January 15, 2 | 2008-01-15 |
Exposure apparatus and device manufacturing method Grant 7,315,347 - Miyajima January 1, 2 | 2008-01-01 |
Positioning apparatus, exposure apparatus, and device manufacturing method Grant 7,312,848 - Tanaka , et al. December 25, 2 | 2007-12-25 |
Exposure Apparatus, And Device Manufacturing Method App 20070285648 - MIYAJIMA; Yoshikazu ;   et al. | 2007-12-13 |
Exposure apparatus and device manufacturing method Grant 7,307,698 - Miyajima , et al. December 11, 2 | 2007-12-11 |
Stage apparatus and exposure apparatus Grant 7,301,602 - Sato , et al. November 27, 2 | 2007-11-27 |
Positioning apparatus, exposure apparatus, and device manufacturing method Grant 7,289,194 - Miyajima October 30, 2 | 2007-10-30 |
Exposure apparatus and device fabrication method Grant 7,253,878 - Miyajima August 7, 2 | 2007-08-07 |
Exposure apparatus, and device manufacturing method Grant 7,253,877 - Miyajima , et al. August 7, 2 | 2007-08-07 |
Exposure apparatus Grant 7,236,228 - Miyajima June 26, 2 | 2007-06-26 |
Exposure apparatus and device fabrication method Grant 7,236,230 - Miyajima June 26, 2 | 2007-06-26 |
Substrate Holding Technique App 20070139851 - MIYAJIMA; Yoshikazu ;   et al. | 2007-06-21 |
Stage device, exposure apparatus, and device manufacturing method Grant 7,224,432 - Sasaki , et al. May 29, 2 | 2007-05-29 |
Substrate holding technique Grant 7,212,277 - Miyajima , et al. May 1, 2 | 2007-05-01 |
Exposure apparatus and device manufacturing method Grant 7,196,769 - Miyajima March 27, 2 | 2007-03-27 |
Exposure apparatus and device fabrication method App 20060262413 - Miyajima; Yoshikazu | 2006-11-23 |
Exposure apparatus and device manufacturing method Grant 7,130,016 - Miyajima October 31, 2 | 2006-10-31 |
Exposure apparatus and device manufacturing method App 20060215137 - Hasegawa; Noriyasu ;   et al. | 2006-09-28 |
Positioning apparatus, exposure apparatus, and device manufacturing method App 20060209287 - Tanaka; Hideo ;   et al. | 2006-09-21 |
Exposure apparatus and device fabrication method App 20060192934 - Miyajima; Yoshikazu | 2006-08-31 |
Exposure apparatus and device fabrication method Grant 7,061,580 - Miyajima June 13, 2 | 2006-06-13 |
Exposure apparatus, and device manufacturing method App 20060114433 - Miyajima; Yoshikazu ;   et al. | 2006-06-01 |
Stage device, exposure apparatus using the unit, and device manufacturing method App 20060113040 - Miyajima; Yoshikazu | 2006-06-01 |
Exposure apparatus and device fabrication method Grant 7,046,335 - Miyajima May 16, 2 | 2006-05-16 |
Stage apparatus, exposure apparatus, and device manufacturing method App 20060082754 - Sasaki; Yasuhito ;   et al. | 2006-04-20 |
Exposure apparatus and device manufacturing method App 20050275821 - Miyajima, Yoshikazu | 2005-12-15 |
Positioning apparatus, exposure apparatus, and device manufacturing method App 20050255624 - Miyajima, Yoshikazu | 2005-11-17 |
Stage device, exposure apparatus, and device manufacturing method App 20050254036 - Sasaki, Yasuhito ;   et al. | 2005-11-17 |
Stage apparatus and exprosure apparatus App 20050219501 - Sato, Hitoshi ;   et al. | 2005-10-06 |
Exposure apparatus and device manufacturing method App 20050185166 - Miyajima, Yoshikazu ;   et al. | 2005-08-25 |
Exposure apparatus and device manufacturing method App 20050168712 - Miyajima, Yoshikazu | 2005-08-04 |
Exposure apparatus and device manufacturing method App 20050140947 - Miyajima, Yoshikazu | 2005-06-30 |
Exposure apparatus and device manufacturing method App 20050128446 - Miyajima, Yoshikazu | 2005-06-16 |
Substrate-holding technique App 20050122505 - Miyajima, Yoshikazu | 2005-06-09 |
Substrate holding technique App 20050093666 - Miyajima, Yoshikazu ;   et al. | 2005-05-05 |
Reflection mirror apparatus, exposure apparatus and device manufacturing method App 20050073663 - Miyajima, Yoshikazu | 2005-04-07 |
Exposure technique App 20050052632 - Miyajima, Yoshikazu | 2005-03-10 |
Exposure apparatus App 20050007575 - Miyajima, Yoshikazu | 2005-01-13 |
Linear motor and exposure apparatus using the same Grant 6,836,031 - Emoto , et al. December 28, 2 | 2004-12-28 |
Linear motor, stage device having this linear motor, exposure device, and device manufacturing method App 20040245861 - Miyajima, Yoshikazu ;   et al. | 2004-12-09 |
Stage apparatus, exposure system using the same, and device manufacturing method App 20040223133 - Miyajima, Yoshikazu ;   et al. | 2004-11-11 |
Plane motor device with surrounding member surrounding coil unit and with cooling channel provided within surrounding member App 20040222707 - Sato, Hitoshi ;   et al. | 2004-11-11 |
Exposure apparatus and device fabrication method App 20040212792 - Miyajima, Yoshikazu | 2004-10-28 |
Exposure apparatus and device fabrication method App 20040207828 - Miyajima, Yoshikazu | 2004-10-21 |
Exposure apparatus and device fabrication method App 20040207826 - Miyajima, Yoshikazu | 2004-10-21 |
Exposure apparatus Grant 6,801,301 - Miyajima , et al. October 5, 2 | 2004-10-05 |
Exposure apparatus, device manufacturing method, semiconductor manufacturing factory, and exposure apparatus maintenance method Grant 6,791,670 - Miyajima , et al. September 14, 2 | 2004-09-14 |
Stage device, an exposure apparatus and a device manufacturing method using the same Grant 6,583,859 - Miyajima , et al. June 24, 2 | 2003-06-24 |
Exposure apparatus App 20030071982 - Miyajima, Yoshikazu ;   et al. | 2003-04-17 |
Linear motor and exposure apparatus using the same App 20020089239 - Emoto, Keiji ;   et al. | 2002-07-11 |
Exposure apparatus, device manufacturing method, semiconductor manufacturing factory, and exposure apparatus maintenance method App 20020081528 - Miyajima, Yoshikazu ;   et al. | 2002-06-27 |
Air cleaner system for motorcycle Grant 6,409,783 - Miyajima , et al. June 25, 2 | 2002-06-25 |
Stage system for exposure apparatus Grant 6,320,649 - Miyajima , et al. November 20, 2 | 2001-11-20 |
Stage device, an exposure apparatus and a device manufacturing method using the same App 20010028449 - Miyajima, Yoshikazu ;   et al. | 2001-10-11 |
Stage device, an exposure apparatus and a device manufacturing method using the same Grant 6,266,133 - Miyajima , et al. July 24, 2 | 2001-07-24 |
Exposure apparatus and device manufacturing method Grant 6,262,794 - Miyajima July 17, 2 | 2001-07-17 |
Magneto-optical recording/reproducing method with optical head servo inhibited during magnetic head loading Grant 5,379,283 - Miyajima January 3, 1 | 1995-01-03 |
Recording head for magneto-optical information recording apparatus Grant 4,843,600 - Miyajima , et al. June 27, 1 | 1989-06-27 |