| Patent | Date |
|---|
Sensor built-in filter structure and wafer accommodation container
Grant 11,199,528 - Kotsugai , et al. December 14, 2 | 2021-12-14 |
Load Port Apparatus, Semiconductor Manufacturing Apparatus, And Method Of Controlling Atmosphere In Pod
App 20200035530 - KOTSUGAI; Tatsuhiro ; et al. | 2020-01-30 |
Sensor Built-in Filter Structure And Wafer Accommodation Container
App 20200033308 - KOTSUGAI; Tatsuhiro ; et al. | 2020-01-30 |
Gas purge unit
Grant 10,276,415 - Kudo , et al. | 2019-04-30 |
Gas Purge Unit
App 20170025297 - KUDO; Takuya ; et al. | 2017-01-26 |
Pod and purge system using the same
Grant 9,543,177 - Miyajima , et al. January 10, 2 | 2017-01-10 |
Load port unit and EFEM system
Grant 9,536,765 - Iwamoto , et al. January 3, 2 | 2017-01-03 |
Load Port Unit And Efem System
App 20150311100 - MIYAJIMA; Toshihiko ; et al. | 2015-10-29 |
Load port apparatus
Grant 9,153,468 - Emoto , et al. October 6, 2 | 2015-10-06 |
Pod And Purge System Using The Same
App 20150243538 - MIYAJIMA; Toshihiko ; et al. | 2015-08-27 |
Purge device and load port apparatus including the same
Grant 8,978,718 - Emoto , et al. March 17, 2 | 2015-03-17 |
Load port apparatus
Grant 8,979,463 - Igarashi , et al. March 17, 2 | 2015-03-17 |
Load Port Unit And Efem System
App 20140363258 - Iwamoto; Tadamasa ; et al. | 2014-12-11 |
Substrate storage pod and lid opening/closing system for the same
Grant 8,876,173 - Igarashi , et al. November 4, 2 | 2014-11-04 |
Lid Opening/closing System For Closed Container, And Substrate Processing Method Using The Same
App 20140157722 - IWAMOTO; Tadamasa ; et al. | 2014-06-12 |
Lid opening/closing system for closed container
Grant 8,657,346 - Okabe , et al. February 25, 2 | 2014-02-25 |
Load port apparatus
Grant 8,562,273 - Igarashi , et al. October 22, 2 | 2013-10-22 |
Closed container and lid opening/closing system therefor
Grant 8,528,947 - Igarashi , et al. September 10, 2 | 2013-09-10 |
Substrate storage pod with replacement function of clean gas
Grant 8,522,836 - Okabe , et al. September 3, 2 | 2013-09-03 |
Purge Device And Load Port Apparatus Including The Same
App 20130042945 - Emoto; Jun ; et al. | 2013-02-21 |
Load Port Apparatus
App 20130011223 - Emoto; Jun ; et al. | 2013-01-10 |
Closed container and lid opening/closing system therefor
Grant 8,322,759 - Okabe , et al. December 4, 2 | 2012-12-04 |
Lid closing method for closed container and lid opening/closing system for closed container
Grant 8,251,636 - Sasaki , et al. August 28, 2 | 2012-08-28 |
Contained object transfer system
Grant 8,186,927 - Okabe , et al. May 29, 2 | 2012-05-29 |
Load Port Apparatus
App 20120063869 - IGARASHI; Hiroshi ; et al. | 2012-03-15 |
Load Port Apparatus
App 20120051871 - IGARASHI; Hiroshi ; et al. | 2012-03-01 |
Contained object transfer system
Grant 8,083,456 - Okabe , et al. December 27, 2 | 2011-12-27 |
Gas replacement system
Grant 8,061,738 - Okabe , et al. November 22, 2 | 2011-11-22 |
Dust resistant load port apparatus and mini-environment system
Grant 8,029,227 - Suzuki , et al. October 4, 2 | 2011-10-04 |
Substrate Storage Pod And Lid Opening/closing System For The Same
App 20110215028 - Igarashi; Hiroshi ; et al. | 2011-09-08 |
Substrate Storage Pod With Replacement Function Of Clean Gas
App 20110210041 - OKABE; Tsutomu ; et al. | 2011-09-01 |
Pod clamping unit load port equipped with pod clamping unit and mini environment system including pod and load port
Grant 7,927,058 - Miyajima , et al. April 19, 2 | 2011-04-19 |
Dust Resistant Load Port Apparatus And Mini-environment System
App 20100254786 - SUZUKI; Hitoshi ; et al. | 2010-10-07 |
Dust resistant load port apparatus and mini-environment system
Grant 7,748,942 - Suzuki , et al. July 6, 2 | 2010-07-06 |
Lid Closing Method For Closed Container And Lid Opening/closing System For Closed Container
App 20100135755 - Sasaki; Mutsuo ; et al. | 2010-06-03 |
Lid Opening/closing System For Closed Container
App 20100133270 - Okabe; Tsutomu ; et al. | 2010-06-03 |
Closed Container And Lid Opening/closing System Therefor
App 20100117377 - OKABE; Tsutomu ; et al. | 2010-05-13 |
Clean Device With Clean Box-opening/closing Device
App 20100108564 - MIYAJIMA; TOSHIHIKO ; et al. | 2010-05-06 |
Closed Container And Lid Opening/closing System Therefor
App 20100059408 - IGARASHI; Hiroshi ; et al. | 2010-03-11 |
Clean device with clean box-opening/closing device
Grant 7,674,083 - Miyajima , et al. March 9, 2 | 2010-03-09 |
Purging apparatus and purging method
Grant 7,654,291 - Miyajima , et al. February 2, 2 | 2010-02-02 |
Contained Object Transfer System
App 20090297298 - Okabe; Tsutomu ; et al. | 2009-12-03 |
Lid Opening/closing System For Closed Container, Contained Object Insertion/takeout System Having Same Lid Opening/closing System, And Substrate Processing Method Using Same Lid Opening/closing System
App 20090294442 - IGARASHI; HIROSHI ; et al. | 2009-12-03 |
Pod clamping unit in pod opener, pod corresponding to pod clamping unit, and clamping mechanism and clamping method using pod clamping unit
Grant 7,621,714 - Miyajima , et al. November 24, 2 | 2009-11-24 |
Closed Container, Lid Opening And Closing System For Closed Container, Wafer Transfer System, And Lid Closing Method For Closed Container
App 20090245981 - Miyajima; Toshihiko ; et al. | 2009-10-01 |
Nterface Seal
App 20090218773 - Okabe; Tsutomu ; et al. | 2009-09-03 |
Contained Object Transfer System
App 20090175709 - OKABE; TSUTOMU ; et al. | 2009-07-09 |
Container Lid Opening/closing System And Substrate Processing Method Using The System
App 20090142166 - MIYAJIMA; Toshihiko ; et al. | 2009-06-04 |
Container Lid Opening/closing System And Substrate Processing Method Using The System
App 20090142164 - MIYAJIMA; Toshihiko ; et al. | 2009-06-04 |
Enclosed container lid opening/closing system and enclosed container lid opening/closing method
Grant 7,523,769 - Miyajima , et al. April 28, 2 | 2009-04-28 |
Lid Opening/closing System For Closed Container And Substrate Processing Method Using Same
App 20090035098 - IGARASHI; Hiroshi ; et al. | 2009-02-05 |
Wafer detecting device
Grant 7,379,174 - Miyajima , et al. May 27, 2 | 2008-05-27 |
Wafer processing apparatus including clean box stopping mechanism
Grant 7,360,985 - Okabe , et al. April 22, 2 | 2008-04-22 |
Purging system and purging method for the interior of a portable type hermetically sealed container
Grant 7,360,346 - Miyajima , et al. April 22, 2 | 2008-04-22 |
Dust Resistant Load Port Apparatus And Mini-environment System
App 20080019807 - SUZUKI; Hitoshi ; et al. | 2008-01-24 |
Pod Cramping Unit, Load Port Equipped With Pod Cramping Unit And Mini-environment System Including Pod And Load Port
App 20070231112 - Miyajima; Toshihiko ; et al. | 2007-10-04 |
Interface Seal
App 20070210533 - Okabe; Tsutomu ; et al. | 2007-09-13 |
Clean device with clean box-opening/closing device
App 20070080096 - Miyajima; Toshihiko ; et al. | 2007-04-12 |
Purging apparatus and purging method
App 20060272169 - Miyajima; Toshihiko | 2006-12-07 |
Wafer detecting device
App 20060087661 - Miyajima; Toshihiko ; et al. | 2006-04-27 |
Enclosed container lid opening/closing system and enclosed container lid opening/closing method
App 20060088406 - Miyajima; Toshihiko ; et al. | 2006-04-27 |
Wafer processing apparatus capable of mapping wafers
Grant 6,984,839 - Igarashi , et al. January 10, 2 | 2006-01-10 |
Pod clamping unit in pod opener, pod corresponding to pod clamping unit, and clamping mechanism and clamping method using pod clamping unit
App 20050095098 - Miyajima, Toshihiko ; et al. | 2005-05-05 |
Load port mounting mechanism
Grant 6,883,770 - Miyajima , et al. April 26, 2 | 2005-04-26 |
Purging system and purging method for the interior of a portable type hermetically sealed container
App 20050069420 - Miyajima, Toshihiko ; et al. | 2005-03-31 |
Purge system for product container and interface seal used in the system
App 20040237244 - Suzuki, Hitoshi ; et al. | 2004-12-02 |
Clean box, clean transfer method and system
Grant 6,796,763 - Miyajima , et al. September 28, 2 | 2004-09-28 |
Wafer processing apparatus including clean box stopping mechanism
App 20040127048 - Okabe, Tsutomu ; et al. | 2004-07-01 |
Mini-environment system and operating method thereof
App 20040126206 - Araya, Shinichi ; et al. | 2004-07-01 |
Wafer processing apparatus including clean box stopping mechanism
App 20040127029 - Okabe, Tsutomu ; et al. | 2004-07-01 |
Wafer processing apparatus capable of mapping wafers
App 20040099826 - Igarashi, Hiroshi ; et al. | 2004-05-27 |
Wafer processing apparatus capable of mapping wafers
App 20040099824 - Igarashi, Hiroshi ; et al. | 2004-05-27 |
Clean box, clean transfer method and system
App 20040035493 - Miyajima, Toshihiko ; et al. | 2004-02-26 |
Clean box, clean transfer method and system
Grant 6,641,349 - Miyajima , et al. November 4, 2 | 2003-11-04 |
Clean box, clean transfer method and apparatus therefor
Grant 6,561,894 - Miyajima May 13, 2 | 2003-05-13 |
Clean box, clean transfer method and apparatus therefor
Grant 6,430,802 - Miyajima August 13, 2 | 2002-08-13 |
Container and method for sealing the container
Grant 6,390,145 - Okabe , et al. May 21, 2 | 2002-05-21 |
Clean box, clean transfer method and apparatus therefor
Grant 6,199,604 - Miyajima March 13, 2 | 2001-03-13 |
Vacuum clean box, clean transfer method and apparatus therefor
Grant 6,168,364 - Miyajima January 2, 2 | 2001-01-02 |
Clean transfer method and apparatus therefor
Grant 6,136,168 - Masujima , et al. October 24, 2 | 2000-10-24 |
Clean transfer method and apparatus therefor
Grant 5,730,573 - Masujima , et al. March 24, 1 | 1998-03-24 |
Apparatus for clean transfer of objects
Grant 5,364,219 - Takahashi , et al. November 15, 1 | 1994-11-15 |
Clean transfer method and system therefor
Grant 5,139,459 - Takahashi , et al. August 18, 1 | 1992-08-18 |
| 