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Patent applications and USPTO patent grants for MIYAHARA; Takahiro.The latest application filed is for "film forming method, method for cleaning processing chamber for film formation, and film forming apparatus".
Patent | Date |
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Film Forming Method, Method For Cleaning Processing Chamber For Film Formation, And Film Forming Apparatus App 20200263295 - MIYAHARA; Takahiro ;   et al. | 2020-08-20 |
Etching method and etching apparatus Grant 10,672,617 - Murakami , et al. | 2020-06-02 |
Heating method, film forming method, semiconductor device manufacturing method, and film forming apparatus Grant 10,475,665 - Miyahara , et al. Nov | 2019-11-12 |
Nitride film forming method and storage medium Grant 10,312,078 - Murakami , et al. | 2019-06-04 |
Method and apparatus for forming nitride film Grant 10,304,676 - Miyahara , et al. | 2019-05-28 |
Etching Method And Etching Apparatus App 20180286691 - MURAKAMI; Hiroki ;   et al. | 2018-10-04 |
Heating Method, Film Forming Method, Semiconductor Device Manufacturing Method, And Film Forming Apparatus App 20180277389 - MIYAHARA; Takahiro ;   et al. | 2018-09-27 |
High-molecular-weight electrolyte and use thereof Grant 9,985,309 - Miyahara , et al. May 29, 2 | 2018-05-29 |
Nitride film forming method and storage medium Grant 9,972,486 - Murakami , et al. May 15, 2 | 2018-05-15 |
Boron Film, Boron Film Forming Method, Hard Mask, And Hard Mask Manufacturing Method App 20180090311 - MIYAHARA; Takahiro ;   et al. | 2018-03-29 |
Hard Mask And Manufacturing Method Thereof App 20180090319 - Miyahara; Takahiro ;   et al. | 2018-03-29 |
Method and Apparatus for Forming Nitride Film App 20180033608 - MIYAHARA; Takahiro ;   et al. | 2018-02-01 |
Thin film forming method Grant 9,777,366 - Kakimoto , et al. October 3, 2 | 2017-10-03 |
Nitride Film Forming Method and Storage Medium App 20170278697 - MURAKAMI; Hiroki ;   et al. | 2017-09-28 |
Nitride Film Forming Method And Storage Medium App 20170278705 - MURAKAMI; Hiroki ;   et al. | 2017-09-28 |
Boron Nitride Film Forming Method And Semiconductor Device Manufacturing Method App 20170117145 - MIYAHARA; Takahiro | 2017-04-27 |
Film forming method of SiCN film Grant 9,390,907 - Shimizu , et al. July 12, 2 | 2016-07-12 |
Method of forming silicon film Grant 9,293,323 - Obu , et al. March 22, 2 | 2016-03-22 |
Method of forming seed layer, method of forming silicon film, and film forming apparatus Grant 9,263,256 - Obu , et al. February 16, 2 | 2016-02-16 |
Film Forming Method of SiCN Film App 20150348778 - SHIMIZU; Akira ;   et al. | 2015-12-03 |
Thin film forming method and film forming apparatus Grant 9,145,604 - Kakimoto , et al. September 29, 2 | 2015-09-29 |
Thin Film Forming Method App 20150270126 - KAKIMOTO; Akinobu ;   et al. | 2015-09-24 |
High-molecular-weight Electrolyte And Use Thereof App 20150064601 - Miyahara; Takahiro ;   et al. | 2015-03-05 |
Silicon film formation apparatus and method for using same Grant 8,808,452 - Noro , et al. August 19, 2 | 2014-08-19 |
Method Of Forming Silicon Film And Film Forming Apparatus App 20140187025 - OBU; Tomoyuki ;   et al. | 2014-07-03 |
Method Of Forming Seed Layer, Method Of Forming Silicon Film, And Film Forming Apparatus App 20140187024 - OBU; Tomoyuki ;   et al. | 2014-07-03 |
Thin Film Forming Method And Film Forming Apparatus App 20130084693 - KAKIMOTO; Akinobu ;   et al. | 2013-04-04 |
Method for forming poly-silicon film Grant 7,923,357 - Okada , et al. April 12, 2 | 2011-04-12 |
Silicon Film Formation Apparatus And Method For Using Same App 20100212581 - NORO; Naotaka ;   et al. | 2010-08-26 |
Method for forming poly-silicon film App 20090124077 - Okada; Mitsuhiro ;   et al. | 2009-05-14 |
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