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Patent applications and USPTO patent grants for Miyahara; Junichi.The latest application filed is for "shaft-equipped heater unit and method for manufacturing shaft-equipped heater unit".
Patent | Date |
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Method of manufacturing ceramic sintered body, ceramic sintered body, and ceramic heater Grant 10,462,850 - Hirano , et al. Oc | 2019-10-29 |
Substrate support device Grant 10,276,410 - Tachikawa , et al. | 2019-04-30 |
Shaft-equipped heater unit and method for manufacturing shaft-equipped heater unit Grant 9,414,441 - Takahara , et al. August 9, 2 | 2016-08-09 |
Substrate support device Grant 9,153,463 - Futakuchiya , et al. October 6, 2 | 2015-10-06 |
Shaft-equipped Heater Unit And Method For Manufacturing Shaft-equipped Heater Unit App 20140083995 - Takahara; Gou ;   et al. | 2014-03-27 |
Method Of Manufacturing Ceramic Sintered Body, Ceramic Sintered Body, And Ceramic Heater App 20130200067 - Hirano; Satoshi ;   et al. | 2013-08-08 |
Substrate Support Device App 20130134148 - TACHIKAWA; Toshihiro ;   et al. | 2013-05-30 |
Substrate Support Device App 20130134147 - FUTAKUCHIYA; Jun ;   et al. | 2013-05-30 |
Ceramics heater Grant 7,372,001 - Tachikawa , et al. May 13, 2 | 2008-05-13 |
Ceramics heater App 20040112888 - Tachikawa, Toshihiro ;   et al. | 2004-06-17 |
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