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Patent applications and USPTO patent grants for Miyagawa; Daiki.The latest application filed is for "substrate conveying system and method".
Patent | Date |
---|---|
Substrate conveying system and method Grant 10,553,471 - Hashimoto , et al. Fe | 2020-02-04 |
End effector and substrate conveying robot Grant 10,483,143 - Hashimoto , et al. Nov | 2019-11-19 |
End effector and substrate conveying robot Grant 10,297,482 - Fukushima , et al. | 2019-05-21 |
End effector device Grant 10,062,594 - Fukushima , et al. August 28, 2 | 2018-08-28 |
Substrate Conveying System And Method App 20160351434 - HASHIMOTO; Yasuhiko ;   et al. | 2016-12-01 |
End Effector And Substrate Conveying Robot App 20160329227 - HASHIMOTO; Yasuhiko ;   et al. | 2016-11-10 |
End Effector Device App 20160322246 - FUKUSHIMA; Takayuki ;   et al. | 2016-11-03 |
End Effector And Substrate Conveying Robot App 20160322247 - FUKUSHIMA; Takayuki ;   et al. | 2016-11-03 |
End effector device Grant 9,343,344 - Hashimoto , et al. May 17, 2 | 2016-05-17 |
End Effector Device App 20150357219 - HASHIMOTO; Yasuhiko ;   et al. | 2015-12-10 |
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