MIYA; Katsuhiko

Patent Applications and Registrations

Patent applications and USPTO patent grants for MIYA; Katsuhiko.The latest application filed is for "substrate processing apparatus and substrate processing method".

Company Profile

2.40.60

MIYA; Katsuhiko - Kyoto JP
MIYA; Katsuhiko - Kyoto-shi JP
Miya; Katsuhiko - Shiga JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Substrate Processing Apparatus And Substrate Processing Method App 20210090910 - MIYA; Katsuhiko	2021-03-25
Substrate processing apparatus and substrate processing method Grant 10,619,894 - Kitagawa , et al.	2020-04-14
Vapor supplying apparatus, vapor drying apparatus, vapor supplying method, and vapor drying method Grant 10,612,844 - Hanawa , et al.	2020-04-07
Substrate processing apparatus and substrate processing method Grant 10,586,693 - Kato , et al.	2020-03-10
Substrate cleaning method and substrate cleaning apparatus Grant 10,286,425 - Sasaki , et al.	2019-05-14
Substrate Processing Apparatus App 20180345328 - KITAGAWA; Hiroaki ; et al.	2018-12-06
Substrate processing method and substrate processing apparatus Grant 10,065,218 - Kitagawa , et al. September 4, 2	2018-09-04
Vapor Supplying Apparatus, Vapor Drying Apparatus, Vapor Supplying Method, And Vapor Drying Method App 20180238621 - HANAWA; Yosuke ; et al.	2018-08-23
Substrate Processing Apparatus App 20180147609 - MIYA; Katsuhiko ; et al.	2018-05-31
Vapor supplying apparatus, vapor drying apparatus, vapor supplying method, and vapor drying method Grant 9,976,804 - Hanawa , et al. May 22, 2	2018-05-22
Apparatus for and method of processing substrate Grant 9,922,848 - Miya , et al. March 20, 2	2018-03-20
Substrate cleaning method and substrate cleaning apparatus Grant 9,859,110 - Hanawa , et al. January 2, 2	2018-01-02
Substrate Cleaning Method And Substrate Cleaning Apparatus App 20170309472 - HANAWA; Yosuke ; et al.	2017-10-26
Substrate Processing Apparatus And Substrate Processing Method App 20170287700 - KATO; Masahiko ; et al.	2017-10-05
Substrate Processing Apparatus And Substrate Processing Method App 20170278726 - MIYA; Katsuhiko	2017-09-28
Substrate cleaning method and substrate cleaning apparatus Grant 9,728,396 - Hanawa , et al. August 8, 2	2017-08-08
Substrate Processing Apparatus And Substrate Processing Method App 20170213725 - KITAGAWA; Hiroaki ; et al.	2017-07-27
Substrate Cleaning Method And Substrate Cleaning Apparatus App 20170043379 - SASAKI; Yuta ; et al.	2017-02-16
Substrate Processing Method And Substrate Processing Apparatus App 20160279679 - KITAGAWA; Hiroaki ; et al.	2016-09-29
Substrate processing apparatus and substrate processing method Grant 9,431,276 - Miya , et al. August 30, 2	2016-08-30
Vapor Supplying Apparatus, Vapor Drying Apparatus, Vapor Supplying Method, And Vapor Drying Method App 20160243461 - HANAWA; Yosuke ; et al.	2016-08-25
Substrate Cleaning Method And Substrate Cleaning Apparatus App 20160074913 - HANAWA; Yosuke ; et al.	2016-03-17
Substrate Processing Apparatus App 20160059274 - MIYA; Katsuhiko ; et al.	2016-03-03
Substrate processing method and substrate processing apparatus Grant 9,214,331 - Miya , et al. December 15, 2	2015-12-15
Substrate Cleaning Method And Substrate Cleaning Apparatus App 20150273537 - MIYA; Katsuhiko	2015-10-01
Apparatus For And Method Of Processing Substrate App 20150255315 - MIYA; Katsuhiko ; et al.	2015-09-10
Substrate processing apparatus and substrate processing method Grant 9,111,966 - Kitagawa , et al. August 18, 2	2015-08-18
Substrate Processing Apparatus And Substrate Processing Method App 20150020850 - KATO; Masahiko ; et al.	2015-01-22
Substrate Processing Apparatus And Substrate Processing Method App 20150020852 - KATO; Masahiko ; et al.	2015-01-22
Substrate processing apparatus and substrate processing method Grant 8,857,449 - Miya October 14, 2	2014-10-14
Substrate Processing Apparatus And Substrate Processing Method App 20140174483 - MIYA; Katsuhiko ; et al.	2014-06-26
Substrate processing method Grant 8,696,825 - Miya , et al. April 15, 2	2014-04-15
Substrate processing method and substrate processing apparatus Grant 8,623,146 - Kato , et al. January 7, 2	2014-01-07
Substrate Processing Apparatus And Substrate Processing Method App 20130167877 - FUJIWARA; Naozumi ; et al.	2013-07-04
Substrate Processing Apparatus And Substrate Processing Method App 20130074873 - KITAGAWA; Hiroaki ; et al.	2013-03-28
Substrate Processing Method And Substrate Processing Apparatus App 20120186275 - KATO; Masahiko ; et al.	2012-07-26
Substrate Processing Method And Substrate Processing Apparatus App 20120175819 - MIYA; Katsuhiko ; et al.	2012-07-12
Substrate Processing Apparatus And Substrate Processing Method App 20120090647 - MIYA; Katsuhiko ; et al.	2012-04-19
Apparatus For And Method Of Processing Substrate App 20120073599 - MIYA; Katsuhiko ; et al.	2012-03-29
Substrate processing apparatus and substrate processing method Grant 8,109,282 - Miya , et al. February 7, 2	2012-02-07
Substrate processing apparatus and a substrate processing method Grant 8,075,731 - Miya December 13, 2	2011-12-13
Substrate processing apparatus, liquid film freezing method and substrate processing method Grant 8,029,622 - Miya , et al. October 4, 2	2011-10-04
Substrate processing apparatus and substrate processing method Grant 8,020,570 - Kishimoto , et al. September 20, 2	2011-09-20
Substrate processing apparatus and substrate processing method Grant 7,964,042 - Kojimaru , et al. June 21, 2	2011-06-21
Substrate processing apparatus and substrate processing method Grant 7,942,976 - Miya , et al. May 17, 2	2011-05-17
Substrate Cleaning Method And Substrate Cleaning Apparatus App 20100313915 - Fujiwara; Naozumi ; et al.	2010-12-16
Substrate processing apparatus and substrate processing method Grant 7,823,597 - Miya November 2, 2	2010-11-02
Substrate processing apparatus and substrate processing method drying substrate Grant 7,811,412 - Miya , et al. October 12, 2	2010-10-12
Substrate processing apparatus and substrate processing method Grant 7,767,026 - Miya August 3, 2	2010-08-03
Apparatus for and method of processing a substrate with processing liquid Grant 7,722,736 - Miya May 25, 2	2010-05-25
Substrate processing method and substrate processing apparatus Grant 7,607,967 - Naoki , et al. October 27, 2	2009-10-27
Substrate processing apparatus and method Grant 7,608,152 - Miya , et al. October 27, 2	2009-10-27
Substrate processing apparatus Grant 7,584,760 - Miya , et al. September 8, 2	2009-09-08
Substrate position correcting method and apparatus using either substrate radius or center of rotation correction adjustment sum Grant 7,547,181 - Fukatsu , et al. June 16, 2	2009-06-16
Substrate Processing Apparatus And A Substrate Processing Method App 20090107400 - MIYA; Katsuhiko	2009-04-30
Substrate processing apparatus and substrate processing method which performs predetermined processing on a substrate which is positioned approximately horizontally at a substrate processing position Grant 7,503,978 - Miya , et al. March 17, 2	2009-03-17
Substrate Processing Apparatus And Substrate Processing Method App 20090032067 - Kojimaru; Tomonori ; et al.	2009-02-05
Substrate Processing Apparatus And Substrate Processing Method App 20080254224 - Kishimoto; Takuya ; et al.	2008-10-16
Substrate Processing Apparatus And Substrate Processing Method App 20080189975 - MIYA; Katsuhiko	2008-08-14
Substrate Processing Apparatus And Substrate Processing Method App 20080121252 - Miya; Katsuhiko	2008-05-29
Substrate Processing Apparatus And Substrate Processing Method App 20080121251 - Miya; Katsuhiko ; et al.	2008-05-29
Substrate processing apparatus and method with proximity guide and liquid-tight layer Grant 7,373,736 - Miya May 20, 2	2008-05-20
Substrate Processing Apparatus And Substrate Processing Method App 20080078426 - MIYA; Katsuhiko ; et al.	2008-04-03
Substrate Processing Apparatus, Liquid Film Freezing Method And Substrate Processing Method App 20080060686 - Miya; Katsuhiko ; et al.	2008-03-13
Substrate Processing Method And Substrate Processing Apparatus App 20080052947 - Miya; Katsuhiko	2008-03-06
Substrate Processing Apparatus And Substrate Processing Method App 20080035610 - MIYA; Katsuhiko ; et al.	2008-02-14
Substrate Processing Apparatus And Substrate Processing Method App 20080017222 - Miya; Katsuhiko ; et al.	2008-01-24
Substrate Processing Method And Substrate Processing Apparatus App 20070295365 - Miya; Katsuhiko ; et al.	2007-12-27
Substrate Processing Method And Substrate Processing Apparatus App 20070235062 - Fujiwara; Naozumi ; et al.	2007-10-11
Substrate Processing Apparatus And Substrate Processing Method App 20070227566 - Miya; Katsuhiko	2007-10-04
Substrate Processing Apparatus And Substrate Processing Method App 20070221254 - Izumi; Akira ; et al.	2007-09-27
Substrate Processing Method And Substrate Processing Apparatus App 20070220775 - Miya; Katsuhiko	2007-09-27
Substrate Processing Method And Substrate Processing Apparatus App 20070141951 - Naoki; Kazuki ; et al.	2007-06-21
Substrate Processing Method And Substrate Processing Apparatus App 20070113874 - Izumi; Akira ; et al.	2007-05-24
Substrate processing method and substrate processing apparatus Grant 7,182,821 - Izumi , et al. February 27, 2	2007-02-27
Substrate processing apparatus and substrate processing method App 20060218815 - Miya; Katsuhiko	2006-10-05
Substrate processing apparatus and substrate processing method App 20060219264 - Miya; Katsuhiko	2006-10-05
Substrate processing apparatus, substrate processing method, substrate position correcting apparatus, and substrate position correcting method App 20060102289 - Fukatsu; Eiji ; et al.	2006-05-18
Substrate processing apparatus and method App 20060045652 - Miya; Katsuhiko	2006-03-02
Substrate processing apparatus which performs predetermined processing by supplying a processing liquid to a substrate which is held at a substrate processing position App 20060027323 - Miya; Katsuhiko ; et al.	2006-02-09
Apparatus for and method of processing a substrate with processing liquid App 20060021636 - Miya; Katsuhiko	2006-02-02
Substrate processing apparatus and substrate processing method which performs predetermined processing on a substrate which is positioned approximately horizontally at a substrate processing position App 20050284369 - Miya, Katsuhiko ; et al.	2005-12-29
Substrate processing apparatus and method App 20050276921 - Miya, Katsuhiko ; et al.	2005-12-15
Method, apparatus and system for rinsing substrate with pH-adjusted rinse solution App 20050271985 - Miya, Katsuhiko ; et al.	2005-12-08
Method and apparatus for processing a substrate with rinsing liquid App 20050006348 - Miya, Katsuhiko ; et al.	2005-01-13
Substrate processing apparatus App 20040050491 - Miya, Katsuhiko ; et al.	2004-03-18
Substrate processing apparatus and substrate processing method drying substrate App 20040040584 - Miya, Katsuhiko ; et al.	2004-03-04
Substrate processing apparatus and substrate processing method Grant 6,669,808 - Adachi , et al. December 30, 2	2003-12-30
Substrate processing method and substrate processing apparatus App 20030196683 - Izumi, Akira ; et al.	2003-10-23
Substrate processing apparatus and method App 20030194878 - Miya, Katsuhiko	2003-10-16
Substrate processing apparatus and substrate processing method App 20020134512 - Adachi, Hideki ; et al.	2002-09-26
Substrate processing apparatus Grant 5,927,303 - Miya , et al. July 27, 1	1999-07-27

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