loadpatents
Patent applications and USPTO patent grants for Miya; Hironobu.The latest application filed is for "substrate processing system".
Patent | Date |
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Substrate processing system Grant 8,641,829 - Horita , et al. February 4, 2 | 2014-02-04 |
Substrate Processing System App 20130298947 - HORITA; Tomoki ;   et al. | 2013-11-14 |
Substrate processing system Grant 8,506,714 - Horita , et al. August 13, 2 | 2013-08-13 |
Method of manufacturing a semiconductor device and processing apparatus Grant 8,481,434 - Miya , et al. July 9, 2 | 2013-07-09 |
Substrate Processing Apparatus, Method For Manufacturing Solar Battery, And Method For Manufacturing Substrate App 20120258566 - NISHITANI; Eisuke ;   et al. | 2012-10-11 |
Method of producing semiconductor device Grant 8,227,346 - Miya , et al. July 24, 2 | 2012-07-24 |
Method Of Producing Semiconductor Device App 20120077350 - MIYA; Hironobu ;   et al. | 2012-03-29 |
Method Of Producing Semiconductor Device App 20120034790 - Miya; Hironobu ;   et al. | 2012-02-09 |
Method of producing semiconductor device Grant 8,105,957 - Miya , et al. January 31, 2 | 2012-01-31 |
Semiconductor device producing method Grant 8,058,184 - Miya , et al. November 15, 2 | 2011-11-15 |
Production method for semiconductor device Grant 8,039,404 - Miya , et al. October 18, 2 | 2011-10-18 |
Semiconductor device producing method and substrate processing apparatus Grant 7,981,815 - Miya , et al. July 19, 2 | 2011-07-19 |
Substrate Processing Apparatus And Producing Method Of Semiconductor Device App 20110045675 - MIYA; Hironobu ;   et al. | 2011-02-24 |
Substrate processing apparatus and producing method of semiconductor device Grant 7,892,983 - Miya , et al. February 22, 2 | 2011-02-22 |
Production Method For Semiconductor Device And Substrate Processing Apparatus App 20100233887 - Miya; Hironobu ;   et al. | 2010-09-16 |
Production method for semiconductor device and substrate processing apparatus Grant 7,779,785 - Miya , et al. August 24, 2 | 2010-08-24 |
Semiconductor device producing method Grant 7,767,594 - Miya , et al. August 3, 2 | 2010-08-03 |
Cleaning Method And Substrate Processing Apparatus App 20100186774 - Miya; Hironobu ;   et al. | 2010-07-29 |
Semiconductor Device Producing Method App 20100173501 - Miya; Hironobu ;   et al. | 2010-07-08 |
Method Of Manufacturing Semiconductor Device And Substrate Processing Apparatus App 20100087069 - MIYA; Hironobu ;   et al. | 2010-04-08 |
Method for manufacturing semiconductor device background Grant 7,662,727 - Miya , et al. February 16, 2 | 2010-02-16 |
Production Method For Semiconductor Device And Substrate Processing Apparatus App 20090280652 - Miya; Hironobu ;   et al. | 2009-11-12 |
Manufacturing Method Of Semiconductor Device And Substrate Processing Apparatus App 20090163037 - Miya; Hironobu ;   et al. | 2009-06-25 |
Method of manufacturing a semiconductor device and processing apparatus App 20090130860 - Miya; Hironobu ;   et al. | 2009-05-21 |
Semiconductor Device Producing Method App 20090104792 - Miya; Hironobu ;   et al. | 2009-04-23 |
Cleaning Method And Substrate Processing Apparatus App 20090071505 - Miya; Hironobu ;   et al. | 2009-03-19 |
Semiconductor Device Producing Method and Substrate Processing Apparatus App 20090053906 - Miya; Hironobu ;   et al. | 2009-02-26 |
Manufacturing Method Of Semiconductor Device App 20090035951 - Miya; Hironobu ;   et al. | 2009-02-05 |
Substrate Processing System App 20080302302 - Horita; Tomoki ;   et al. | 2008-12-11 |
Substrate Processing Apparatus and Producing Method of Semiconductor Device App 20080166882 - Miya; Hironobu ;   et al. | 2008-07-10 |
Method for manufacturing semiconductor device background App 20080132084 - Miya; Hironobu ;   et al. | 2008-06-05 |
Production Method for Semiconductor Device and Substrate Processing Apparatus App 20080124945 - Miya; Hironobu ;   et al. | 2008-05-29 |
Method for manufacturing semiconductor device and substrate processing apparatus App 20060240677 - Horii; Sadayoshi ;   et al. | 2006-10-26 |
Method for manufaturing semiconductor device and substrate processing system App 20060035470 - Horii; Sadayoshi ;   et al. | 2006-02-16 |
Substrate processing apparatus App 20040018650 - Sasajima, Ryota ;   et al. | 2004-01-29 |
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