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Substrate having thin film of GaN joined thereon and method of fabricating the same, and a GaN-based semiconductor device and method of fabricating the same Grant 8,143,140 - Kasai , et al. March 27, 2 | 2012-03-27 |
METHOD OF MANUFACTURING GaN SUBSTRATE, METHOD OF MANUFACTURING EPITAXIALWAFER, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND EPITAXIALWAFER App 20110163325 - NAKANISHI; Fumitake ;   et al. | 2011-07-07 |
Method of manufacturing GaN substrate, method of manufacturing epitaxialwafer, method of manufacturing semiconductor device and epitaxialwafer Grant 7,932,114 - Nakanishi , et al. April 26, 2 | 2011-04-26 |
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GaN substrate, substrate with epitaxial layer, semiconductor device, and method of manufacturing GaN substrate Grant 7,816,238 - Osada , et al. October 19, 2 | 2010-10-19 |
SUBSTRATE HAVING THIN FILM OF GaN JOINED THEREON AND METHOD OF FABRICATING THE SAME, AND A GaN-BASED SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME App 20100210089 - KASAI; Hitoshi ;   et al. | 2010-08-19 |
Substrate having thin film of GaN joined thereon and method of fabricating the same, and a GaN-based semiconductor device and method of fabricating the same Grant 7,728,348 - Kasai , et al. June 1, 2 | 2010-06-01 |
Gallium nitride baseplate, epitaxial substrate, and method of forming gallium nitride Grant 7,518,216 - Koukitu , et al. April 14, 2 | 2009-04-14 |
METHOD OF MANUFACTURING GaN SUBSTRATE, METHOD OF MANUFACTURING EPITAXIALWAFER, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND EPITAXIALWAFER App 20090093077 - NAKANISHI; Fumitake ;   et al. | 2009-04-09 |
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