MIURA; Takaharu

Patent Applications and Registrations

Patent applications and USPTO patent grants for MIURA; Takaharu.The latest application filed is for "chamber system and heat-insulating panel".

Company Profile

0.5.5

MIURA; Takaharu - Yamato-shi JP
Miura; Takaharu - Yamato JP
Miura, Takaharu - Yamato City JP
Miura; Takaharu - Chiba JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Chamber System And Heat-insulating Panel App 20150047806 - MIURA; Takaharu ; et al.	2015-02-19
Exposure apparatus and methods utilizing plural mask and object stages movable in opposite directions, and methods of producing devices using the same Grant 6,894,763 - Murakami , et al. May 17, 2	2005-05-17
Charged-particle-beam microlithography systems that detect and offset beam-perturbing displacements of optical-column components App 20040113101 - Li, Shiwen ; et al.	2004-06-17
Gas-actuated stages including reaction-force-canceling mechanisms for use in charged-particle-beam microlithography systems Grant 6,674,085 - Miura , et al. January 6, 2	2004-01-06
Exposure apparatus and methods utilizing plural mask and object stages movable in opposite directions, and methods of producing devices using the same App 20030218730 - Murakami, Seiro ; et al.	2003-11-27
Non-contacting holding devices for an optical component, and optical systems and lithographic exposure systems comprising same App 20030213889 - Miura, Takaharu	2003-11-20
Gas-actuated stages including reaction-force-canceling mechanisms for use in charged-particle-beam microlithography systems App 20020085192 - Miura, Takaharu ; et al.	2002-07-04
Support sheet for photographic printing paper and process for producing the sheet Grant 5,470,652 - Miura , et al. November 28, 1	1995-11-28
Support sheet for photographic printing sheet Grant 5,374,508 - Miura , et al. December 20, 1	1994-12-20
Process for the preparation of support sheet for photographic printing paper and resulting article Grant 5,055,320 - Miura , et al. October 8, 1	1991-10-08

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