Miura; Shigehiro

Patent Applications and Registrations

Patent applications and USPTO patent grants for Miura; Shigehiro.The latest application filed is for "deposition method".

Company Profile

8.38.55

Miura; Shigehiro - Oshu JP
Miura; Shigehiro - Yamanashi JP
Miura; Shigehiro - Iwate JP
MIURA; Shigehiro - Nirasaki City JP
MIURA; Shigehiro - Oshu-shi JP
Miura; Shigehiro - Aichi JP
Miura; Shigehiro - Mie N/A JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Film forming apparatus Grant 11,390,948 - Yonezawa , et al. July 19, 2	2022-07-19
Deposition method Grant 11,328,901 - Miura , et al. May 10, 2	2022-05-10
Film deposition apparatus Grant 11,274,372 - Miura March 15, 2	2022-03-15
Film deposition apparatus and film deposition method Grant 11,131,023 - Miura , et al. September 28, 2	2021-09-28
Plasma processing method and plasma processing apparatus Grant 11,118,264 - Miura September 14, 2	2021-09-14
Film forming method and recording medium Grant 11,085,113 - Kato , et al. August 10, 2	2021-08-10
Film deposition method Grant 10,796,902 - Miura October 6, 2	2020-10-06
Deposition Method App 20200312621 - MIURA; Shigehiro ; et al.	2020-10-01
Film forming apparatus Grant 10,683,573 - Kato , et al.	2020-06-16
Film deposition apparatus Grant 10,604,837 - Kato , et al.	2020-03-31
Method For Dry Cleaning A Susceptor And Substrate Processing Apparatus App 20190360092 - SATO; Jun ; et al.	2019-11-28
Film deposition method Grant 10,480,067 - Kato , et al. Nov	2019-11-19
Film Forming Method And Film Forming Apparatus App 20190284691 - MIURA; Shigehiro ; et al.	2019-09-19
Film Forming Apparatus App 20190276935 - YONEZAWA; Masato ; et al.	2019-09-12
Film forming apparatus Grant 10,385,453 - Yonezawa , et al. A	2019-08-20
Substrate processing apparatus Grant 10,358,720 - Miura	2019-07-23
Film deposition method Grant 10,287,675 - Miura	2019-05-14
Substrate processing apparatus, substrate processing method and substrate holding member Grant 10,217,642 - Sato , et al. Feb	2019-02-26
Substrate processing method and substrate processing apparatus Grant 10,202,687 - Miura , et al. Feb	2019-02-12
Method for processing a substrate and substrate processing apparatus Grant 10,151,031 - Kato , et al. Dec	2018-12-11
Substrate processing method including supplying a fluorine-containing gas on a surface of a substrate Grant 10,151,034 - Miura Dec	2018-12-11
Film Forming Apparatus, Film Forming Method, and Recording Medium App 20180327906 - KATO; Hitoshi ; et al.	2018-11-15
Plasma processing device and operation method Grant 10,103,009 - Miura , et al. October 16, 2	2018-10-16
Film forming apparatus, film forming method, and recording medium Grant 10,072,336 - Kato , et al. September 11, 2	2018-09-11
Substrate processing apparatus and substrate processing method Grant 10,043,639 - Miura August 7, 2	2018-08-07
Film Deposition Apparatus And Film Deposition Method App 20180135178 - MIURA; Shigehiro ; et al.	2018-05-17
Substrate Processing Apparatus And Substrate Processing Method App 20180047545 - MIURA; Shigehiro	2018-02-15
Method and apparatus for gap fill using deposition and etch processes Grant 9,865,499 - Sato , et al. January 9, 2	2018-01-09
Substrate processing apparatus and substrate processing method Grant 9,865,454 - Kato , et al. January 9, 2	2018-01-09
Film Deposition Apparatus App 20170335453 - MIURA; Shigehiro	2017-11-23
Film Deposition Method App 20170338099 - MIURA; Shigehiro	2017-11-23
Method of depositing a film, recording medium, and film deposition apparatus Grant 9,777,369 - Kato , et al. October 3, 2	2017-10-03
Method For Processing A Substrate And Substrate Processing Apparatus App 20170268104 - KATO; Hitoshi ; et al.	2017-09-21
Film Deposition Method App 20170253964 - KATO; Hitoshi ; et al.	2017-09-07
Film Deposition Method App 20170218516 - MIURA; Shigehiro	2017-08-03
Film Deposition Method App 20170218510 - KATO; Hitoshi ; et al.	2017-08-03
Method for processing a substrate and substrate processing apparatus Grant 9,714,467 - Kato , et al. July 25, 2	2017-07-25
Substrate processing apparatus and method of processing a substrate Grant 9,711,370 - Miura , et al. July 18, 2	2017-07-18
Dimming device and illumination system using same Grant 9,693,434 - Miura , et al. June 27, 2	2017-06-27
Plasma Processing Apparatus And Film Deposition Method App 20170167019 - HASEBE; Kazuhide ; et al.	2017-06-15
Plasma Processing Method And Plasma Processing Apparatus App 20170130333 - MIURA; Shigehiro	2017-05-11
Substrate Processing Apparatus, Substrate Processing Method And Substrate Holding Member App 20170125258 - SATO; Jun ; et al.	2017-05-04
Method of depositing a silicon-containing film Grant 9,607,828 - Sato , et al. March 28, 2	2017-03-28
Plasma processing method and plasma processing apparatus Grant 9,601,318 - Miura , et al. March 21, 2	2017-03-21
Film formation device, substrate processing device, and film formation method Grant 9,583,312 - Yamawaku , et al. February 28, 2	2017-02-28
Plasma processing apparatus, plasma processing method, and recording medium Grant 9,583,318 - Miura , et al. February 28, 2	2017-02-28
Film Forming Apparatus App 20170051403 - YONEZAWA; Masato ; et al.	2017-02-23
Substrate Processing Apparatus App 20170009341 - MIURA; Shigehiro	2017-01-12
Substrate Processing Method and Substrate Processing Apparatus App 20170002464 - MIURA; Shigehiro ; et al.	2017-01-05
Method And Apparatus For Depositing A Silicon-containing Film App 20160379868 - SATO; Jun ; et al.	2016-12-29
Substrate Processing Apparatus And Substrate Processing Method App 20160358794 - MIURA; Shigehiro	2016-12-08
Plasma processing apparatus and plasma processing method Grant 9,502,215 - Kato , et al. November 22, 2	2016-11-22
Plasma Processing Apparatus, Plasma Processing Method, And Recording Medium App 20160293390 - MIURA; Shigehiro ; et al.	2016-10-06
Plasma Processing Device And Operation Method App 20160268105 - MIURA; Shigehiro ; et al.	2016-09-15
Substrate Processing Apparatus And Substrate Processing Method App 20160258065 - MIURA; Shigehiro	2016-09-08
Substrate Processing Apparatus And Substrate Processing Method App 20160260587 - MIURA; Shigehiro	2016-09-08
Method Of Depositing A Silicon-containing Film App 20160254136 - SATO; Jun ; et al.	2016-09-01
Film Deposition Apparatus App 20160244877 - KATO; Hitoshi ; et al.	2016-08-25
Plasma processing device and operation method Grant 9,376,751 - Miura , et al. June 28, 2	2016-06-28
Film Forming Apparatus App 20160138159 - KATO; Hitoshi ; et al.	2016-05-19
Film Forming Apparatus, Film Forming Method, And Recording Medium App 20160122872 - KATO; Hitoshi ; et al.	2016-05-05
Plasma Processing Device And Plasma Processing Method App 20160071722 - MIURA; Shigehiro ; et al.	2016-03-10
Substrate Processing Apparatus And Method Of Processing A Substrate App 20160064246 - MIURA; Shigehiro ; et al.	2016-03-03
Method of operating film deposition apparatus and film deposition apparatus Grant 9,209,011 - Kato , et al. December 8, 2	2015-12-08
Plasma Processing Method And Plasma Processing Apparatus App 20150332895 - MIURA; Shigehiro ; et al.	2015-11-19
Dimming Device And Illumination System Using Same App 20150264782 - MIURA; Shigehiro ; et al.	2015-09-17
Device control system, wireless control apparatus, and computer readable recording medium Grant 9,129,518 - Sasaki , et al. September 8, 2	2015-09-08
Plasma Processing Device And Operation Method App 20150235813 - MIURA; Shigehiro ; et al.	2015-08-20
Film deposition apparatus, substrate processing apparatus and film deposition method Grant 9,111,747 - Yamawaku , et al. August 18, 2	2015-08-18
Method For Processing A Substrate And Substrate Processing Apparatus App 20150225849 - KATO; Hitoshi ; et al.	2015-08-13
Plasma Processing Apparatus And Plasma Processing Method App 20150132505 - KATO; Hitoshi ; et al.	2015-05-14
Substrate Processing Apparatus And Substrate Processing Method App 20150126044 - KATO; Hitoshi ; et al.	2015-05-07
Plasma Processing Apparatus And Method Of Performing Plasma Process App 20150118415 - KATO; Hitoshi ; et al.	2015-04-30
Film deposition apparatus and method of depositing film Grant 8,927,440 - Kato , et al. January 6, 2	2015-01-06
Method Of Depositing A Film, Recording Medium, And Film Deposition Apparatus App 20150004332 - KATO; Hitoshi ; et al.	2015-01-01
Film deposition apparatus, and method of depositing a film Grant 8,871,654 - Kato , et al. October 28, 2	2014-10-28
Substrate Processing Apparatus And Method Of Depositing A Film App 20140220260 - Yamawaku; Jun ; et al.	2014-08-07
Method Of Depositing A Film And Film Deposition Apparatus App 20140199856 - KATO; Hitoshi ; et al.	2014-07-17
Device Control System, Wireless Control Apparatus, And Computer Readable Recording Medium App 20140169796 - Sasaki; Tomoaki ; et al.	2014-06-19
Film Formation Device, Substrate Processing Device, And Film Formation Method App 20140170859 - YAMAWAKU; Jun ; et al.	2014-06-19
Plasma Process Apparatus And Plasma Generating Device App 20140123895 - KATO; Hitoshi ; et al.	2014-05-08
Film Deposition Apparatus And Film Deposition Method App 20140024200 - KATO; Hitoshi ; et al.	2014-01-23
Film Deposition Apparatus And Method Of Depositing Film App 20140017905 - Kato; Hitoshi ; et al.	2014-01-16
Method Of Operating Film Deposition Apparatus And Film Deposition Apparatus App 20140011370 - KATO; Hitoshi ; et al.	2014-01-09
Film Deposition Apparatus, And Method Of Depositing A Film App 20140011369 - KATO; Hitoshi ; et al.	2014-01-09
Film Deposition Apparatus, Substrate Processing Apparatus And Film Deposition Method App 20130337635 - YAMAWAKU; Jun ; et al.	2013-12-19
Film Deposition Apparatus App 20130206067 - Kato; Hitoshi ; et al.	2013-08-15
Film Deposition Apparatus And Film Deposition Method App 20130203268 - KATO; Hitoshi ; et al.	2013-08-08
Film Deposition Apparatus App 20130180452 - KATO; Hitoshi ; et al.	2013-07-18
Film Deposition Apparatus And Substrate Processing Apparatus App 20130087097 - KATO; Hitoshi ; et al.	2013-04-11