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Patent applications and USPTO patent grants for Miura; Kazutaka.The latest application filed is for "manufacturing apparatus and manufacturing method of semiconductor device".
Patent | Date |
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Manufacturing apparatus of semiconductor device Grant 7,513,981 - Miura , et al. April 7, 2 | 2009-04-07 |
Manufacturing apparatus and manufacturing method of semiconductor device App 20050241932 - Miura, Kazutaka ;   et al. | 2005-11-03 |
Method of manufacturing a semiconductor device utilizing active oxygen Grant 6,900,062 - Miura May 31, 2 | 2005-05-31 |
Method Of Manufacturing A Semiconductor Device App 20040147046 - MIURA, Kazutaka | 2004-07-29 |
Semiconductor device and method of manufacturing the same App 20030089938 - Saigoh, Kaoru ;   et al. | 2003-05-15 |
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