Miura; Atsuyasu

Patent Applications and Registrations

Patent applications and USPTO patent grants for Miura; Atsuyasu.The latest application filed is for "substrate processing method and substrate processing device".

Company Profile

9.11.14

Miura; Atsuyasu - Kyoto JP
MIURA; Atsuyasu - Kyoto-shi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Chemical liquid preparation method, chemical liquid preparation device, and substrate processing device Grant 11,439,967 - Nishide , et al. September 13, 2	2022-09-13
Substrate processing method and substrate processing apparatus Grant 10,854,481 - Tanizawa , et al. December 1, 2	2020-12-01
Substrate processing method and substrate processing apparatus Grant 10,786,836 - Miura , et al. September 29, 2	2020-09-29
Substrate processing apparatus and processing cup cleaning method Grant 10,658,203 - Tsujikawa , et al.	2020-05-19
Substrate Processing Method And Substrate Processing Device App 20200144081 - TSUJIKAWA; Hiroki ; et al.	2020-05-07
Recovery piping cleaning method and substrate processing apparatus Grant 10,639,683 - Tsuchihashi , et al.	2020-05-05
Substrate processing apparatus and nozzle cleaning method Grant 10,622,225 - Miura , et al.	2020-04-14
Chemical Liquid Preparation Method, Chemical Liquid Preparation Device, And Substrate Processing Device App 20190091640 - NISHIDE; Hajime ; et al.	2019-03-28
Substrate Processing Method And Substrate Processing Apparatus App 20190067047 - TANIZAWA; Shigeki ; et al.	2019-02-28
Substrate processing method and substrate processing apparatus Grant 10,199,243 - Fujita , et al. Fe	2019-02-05
Chemical liquid preparation method of preparing a chemical liquid for substrate processing, chemical liquid preparation unit preparing a chemical liquid for substrate processing, and substrate processing system Grant 10,186,435 - Miura , et al. Ja	2019-01-22
Substrate Processing Method App 20180207685 - MIURA; Atsuyasu ; et al.	2018-07-26
Substrate Processing Method And Substrate Processing Apparatus App 20180158698 - Fujita; Kazuhiro ; et al.	2018-06-07
Substrate processing method Grant 9,956,594 - Miura , et al. May 1, 2	2018-05-01
Recovery Piping Cleaning Method And Substrate Processing Apparatus App 20180085795 - TSUCHIHASHI; Yuya ; et al.	2018-03-29
Substrate Processing Apparatus And Nozzle Cleaning Method App 20180061678 - MIURA; Atsuyasu ; et al.	2018-03-01
Substrate Processing Method And Substrate Processing Apparatus App 20180029089 - MIURA; Atsuyasu ; et al.	2018-02-01
Substrate Processing Apparatus And Processing Cup Cleaning Method App 20180025922 - TSUJIKAWA; Hiroki ; et al.	2018-01-25
Chemical Liquid Preparation Method Of Preparing A Chemical Liquid For Substrate Processing, Chemical Liquid Preparation Unit Preparing A Chemical Liquid For Substrate Processing, And Substrate Processing System App 20170294323 - MIURA; Atsuyasu ; et al.	2017-10-12
Substrate processing apparatus Grant 9,687,887 - Miura June 27, 2	2017-06-27
Substrate Processing Method App 20160184870 - MIURA; Atsuyasu ; et al.	2016-06-30
Substrate treatment apparatus and substrate treatment method Grant 9,050,616 - Miura , et al. June 9, 2	2015-06-09
Substrate Processing Apparatus App 20150075571 - Miura; Atsuyasu	2015-03-19
Chemical Liquid Preparation Method Of Preparing A Chemical Liquid For Substrate Processing, Chemical Liquid Preparation Unit Preparing A Chemical Liquid For Substrate Processing, And Substrate Processing System App 20130306238 - MIURA; Atsuyasu ; et al.	2013-11-21
Substrate Treatment Apparatus And Substrate Treatment Method App 20130256273 - MIURA; Atsuyasu ; et al.	2013-10-03

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