Patent | Date |
---|
Substrate Transporter And Substrate Processing Apparatus Including Substrate Transporter App 20220005716 - Yazawa; Akihiro ;   et al. | 2022-01-06 |
Substrate Processing Apparatus, Substrate Processing Method, And Storage Medium That Stores Program To Cause Computer In Substrate Processing Apparatus To Execute Substrate Processing Method App 20210402548 - Mitsuya; Takashi ;   et al. | 2021-12-30 |
Substrate treatment apparatus, controller of substrate treatment apparatus, method for controlling substrate treatment apparatus, and memory medium storing program Grant 11,177,147 - Mitsuya November 16, 2 | 2021-11-16 |
Scheduler, substrate processing apparatus, and substrate conveyance method Grant 11,099,546 - Nonobe , et al. August 24, 2 | 2021-08-24 |
Plating system, a plating system control method, and a storage medium containing a program for causing a computer to execute the plating system control method Grant 11,098,414 - Mitsuya , et al. August 24, 2 | 2021-08-24 |
Scheduler, Substrate Processing Apparatus, And Substrate Conveyance Method App 20210011462 - Nonobe; Koji ;   et al. | 2021-01-14 |
Scheduler, substrate processing apparatus, and substrate conveyance method Grant 10,824,135 - Nonobe , et al. November 3, 2 | 2020-11-03 |
Scheduler, substrate processing apparatus, and substrate conveyance method Grant 10,824,138 - Nonobe , et al. November 3, 2 | 2020-11-03 |
Plating System, A Plating System Control Method, And A Storage Medium Containing A Program For Causing A Computer To Execute The App 20200056301 - Mitsuya; Takashi ;   et al. | 2020-02-20 |
Plating system, a plating system control method, and a storage medium containing a program for causing a computer to execute the plating system control method Grant 10,501,862 - Mitsuya , et al. Dec | 2019-12-10 |
Scheduler, Substrate Processing Apparatus, And Substrate Conveyance Method App 20190271970 - NONOBE; Koji ;   et al. | 2019-09-05 |
Substrate Treatment Apparatus, Controller Of Substrate Treatment Apparatus, Method For Controlling Substrate Treatment Apparatus App 20190237350 - MITSUYA; Takashi | 2019-08-01 |
Substrate processing apparatus and substrate transfer method Grant 10,141,211 - Yokoyama , et al. Nov | 2018-11-27 |
Scheduler, Substrate Processing Apparatus, And Substrate Conveyance Method App 20180203434 - NONOBE; Koji ;   et al. | 2018-07-19 |
Plating System, A Plating System Control Method, And A Storage Medium Containing A Program For Causing A Computer To Execute The Plating System Control Method App 20180038008 - MITSUYA; Takashi ;   et al. | 2018-02-08 |
Substrate Processing Apparatus And Substrate Tranfser Method App 20170358472 - YOKOYAMA; Toshio ;   et al. | 2017-12-14 |
Substrate processing apparatus and method of transferring a substrate Grant 9,786,532 - Yokoyama , et al. October 10, 2 | 2017-10-10 |
Substrate Processing Apparatus And Substrate Tranfser Method App 20150270151 - YOKOYAMA; Toshio ;   et al. | 2015-09-24 |
Substrate Processing Apparatus And Resist Removing Unit App 20150270147 - KOBAYASHI; Kenichi ;   et al. | 2015-09-24 |
Method of operating substrate processing apparatus and substrate processing apparatus Grant 8,550,875 - Torii , et al. October 8, 2 | 2013-10-08 |
Polishing apparatus and polishing method Grant 8,398,811 - Sasaki , et al. March 19, 2 | 2013-03-19 |
Method Of Operating Substrate Processing Apparatus And Substrate Processing Apparatus App 20120231703 - Torii; Hiroomi ;   et al. | 2012-09-13 |
Method of operating substrate processing apparatus and substrate processing apparatus Grant 8,202,139 - Torii , et al. June 19, 2 | 2012-06-19 |
Polishing apparatus and substrate processing method Grant 8,128,458 - Saito , et al. March 6, 2 | 2012-03-06 |
Polishing Apparatus And Polishing Method App 20110306274 - SASAKI; Tatsuya ;   et al. | 2011-12-15 |
Polishing apparatus and polishing method Grant 8,025,759 - Sasaki , et al. September 27, 2 | 2011-09-27 |
Polishing apparatus and substrate processing method App 20090209175 - Saito; Kenichiro ;   et al. | 2009-08-20 |
Method of operating substrate processing apparatus and substrate processing apparatus App 20090186557 - Torii; Hiroomi ;   et al. | 2009-07-23 |
Polishing apparatus and polishing method App 20060166503 - Sasaki; Tatsuya ;   et al. | 2006-07-27 |