Patent | Date |
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Pattern defect inspection using data based on secondary electron from pattern Grant 9,153,419 - Mitsui October 6, 2 | 2015-10-06 |
Pattern inspection method and semiconductor device manufacturing method Grant 8,532,395 - Mitsui September 10, 2 | 2013-09-10 |
Pattern evaluation system, pattern evaluation method and semiconductor device manufacturing method Grant 8,355,560 - Mitsui January 15, 2 | 2013-01-15 |
Defect inspection apparatus and defect inspection method Grant 8,290,242 - Mitsui October 16, 2 | 2012-10-16 |
Pattern shape evaluation method, program, and semiconductor device manufacturing method Grant 8,160,349 - Mitsui April 17, 2 | 2012-04-17 |
Image processing apparatus, image processing method, defect detection method, semiconductor device manufacturing method, and program Grant 8,150,177 - Mitsui April 3, 2 | 2012-04-03 |
Pattern measurement apparatus and pattern measurement method Grant 8,144,338 - Mitsui March 27, 2 | 2012-03-27 |
Pattern evaluation method, computer-readable recording medium, and manufacturing method of semiconductor device Grant 8,144,969 - Mitsui March 27, 2 | 2012-03-27 |
Pattern Defect Inspection Apparatus And Pattern Defect Inspection Method App 20120068065 - MITSUI; Tadashi | 2012-03-22 |
Alignment of semiconductor wafer patterns by corresponding edge groups Grant 8,126,257 - Miyano , et al. February 28, 2 | 2012-02-28 |
Pattern misalignment measurement method, program, and semiconductor device manufacturing method Grant 8,090,192 - Mitsui January 3, 2 | 2012-01-03 |
Pattern evaluation method, pattern matching method and computer readable medium Grant 8,086,041 - Mitsui December 27, 2 | 2011-12-27 |
Pattern Inspection Method And Semiconductor Device Manufacturing Method App 20110286658 - MITSUI; Tadashi | 2011-11-24 |
Image processing apparatus, image processing method, defect detection method, semiconductor device manufacturing method, and program App 20110280471 - Mitsui; Tadashi | 2011-11-17 |
Pattern edge detecting method and pattern evaluating method Grant 8,045,807 - Mitsui October 25, 2 | 2011-10-25 |
Pattern evaluation method, computer-readable medium, and semiconductor device manufacturing method Grant 8,041,105 - Mitsui October 18, 2 | 2011-10-18 |
Pattern matching method, program and semiconductor device manufacturing method Grant 8,036,445 - Onishi , et al. October 11, 2 | 2011-10-11 |
Pattern shape evaluation method and pattern shape evaluation apparatus utilizing the same Grant 8,019,149 - Abe , et al. September 13, 2 | 2011-09-13 |
Image processing apparatus, image processing method, defect detection method, semiconductor device manufacturing method, and program Grant 8,019,165 - Mitsui September 13, 2 | 2011-09-13 |
Pattern Evaluation System, Pattern Evaluation Method And Semiconductor Device Manufacturing Method App 20110164807 - MITSUI; Tadashi | 2011-07-07 |
Method for preparing functional nanomaterials utilizing endothermic reaction Grant 7,879,309 - Mitsui , et al. February 1, 2 | 2011-02-01 |
Pattern Edge Detecting Method And Pattern Evaluating Method App 20100303361 - MITSUI; Tadashi | 2010-12-02 |
Pattern shape evaluation apparatus, pattern shape evaluation method, method of manufacturing semiconductor device, and program Grant 7,787,687 - Miyano , et al. August 31, 2 | 2010-08-31 |
Method for preparing functional nanomaterials utilizing endothermic reaction Grant 7,771,697 - Mitsui , et al. August 10, 2 | 2010-08-10 |
Method For Preparing Functional Nanomaterials Utilizing Endothermic Reaction App 20100183494 - MITSUI; Tadashi ;   et al. | 2010-07-22 |
Defect Inspection Apparatus And Defect Inspection Method App 20100177952 - MITSUI; Tadashi | 2010-07-15 |
Methods for manufacturing optical fiber probe and for processing micromaterial Grant 7,754,114 - Mitsui , et al. July 13, 2 | 2010-07-13 |
Pattern evaluation method, pattern matching method and computer readable medium App 20100158389 - Mitsui; Tadashi | 2010-06-24 |
Pattern Shape Evaluation Method And Pattern Shape Evaluation Apparatus Utilizing The Same App 20100128966 - ABE; Hideaki ;   et al. | 2010-05-27 |
Pattern evaluation method, pattern matching method and computer readable medium Grant 7,702,157 - Mitsui April 20, 2 | 2010-04-20 |
Pattern Measurement Apparatus And Pattern Measurement Method App 20100046006 - MITSUI; Tadashi | 2010-02-25 |
Pattern evaluation method, method of manufacturing semiconductor, program and pattern evaluation apparatus Grant 7,668,373 - Mitsui February 23, 2 | 2010-02-23 |
Pattern Evaluation Method, Computer-readable Recording Medium, And Manufacturing Method Of Semiconductor Device App 20090202140 - MITSUI; Tadashi | 2009-08-13 |
Measurement system and method and computer program for processing measurement data Grant 7,526,408 - Mitsui April 28, 2 | 2009-04-28 |
Pattern shape evaluation method, program, and semiconductor device manufacturing method App 20080138916 - Mitsui; Tadashi | 2008-06-12 |
Methods for manufacturing optical fiber probe and for processing micromaterial App 20080121614 - Mitsui; Tadashi ;   et al. | 2008-05-29 |
Method of manufacturing optical fiber probe and for finishing micro material Grant 7,341,681 - Mitsui , et al. March 11, 2 | 2008-03-11 |
Pattern evaluation method, computer-readable medium, and semiconductor device manufacturing method App 20080056558 - Mitsui; Tadashi | 2008-03-06 |
Image processing apparatus, image processing method, defect detection method, semiconductor device manufacturing method, and program App 20070280547 - Mitsui; Tadashi | 2007-12-06 |
Pattern shape evaluation apparatus, pattern shape evaluation method, semiconductor device manufacturing method, and program App 20070280541 - Miyano; Yumiko ;   et al. | 2007-12-06 |
Pattern misalignment measurement method, program, and semiconductor device manufacturing method App 20070248258 - Mitsui; Tadashi | 2007-10-25 |
Pattern evaluation system, pattern evaluation method and program Grant 7,274,820 - Mitsui September 25, 2 | 2007-09-25 |
Pattern shape evaluation apparatus, pattern shape evaluation method, method of manufacturing semiconductor device, and program App 20070098249 - Miyano; Yumiko ;   et al. | 2007-05-03 |
Pattern measurement method, manufacturing method of semiconductor device, pattern measurement apparatus, and program Grant 7,151,855 - Mitsui December 19, 2 | 2006-12-19 |
Pattern evaluation method, pattern matching method and computer readable medium App 20060262977 - Mitsui; Tadashi | 2006-11-23 |
Pattern measuring system and semiconductor device manufacturing method App 20060261268 - Mitsui; Tadashi | 2006-11-23 |
Pattern matching method, program and semiconductor device manufacturing method App 20060110042 - Onishi; Atsushi ;   et al. | 2006-05-25 |
Pattern evaluation method, method of manufacturing semiconductor, program and pattern evaluation apparatus App 20060023933 - Mitsui; Tadashi | 2006-02-02 |
Pattern evaluation method, pattern evaluation system and computer-readable recorded medium Grant 6,985,626 - Mitsui January 10, 2 | 2006-01-10 |
Measurement system and method and computer program for processing measurement data App 20050256669 - Mitsui, Tadashi | 2005-11-17 |
Method of manufacturing optical fiber probe and for finishing micro material App 20050115922 - Mitsui, Tadashi ;   et al. | 2005-06-02 |
Method for preparing functional nanomaterials utilizing endothermic reaction App 20050002849 - Mitsui, Tadashi ;   et al. | 2005-01-06 |
Pattern measuring apparatus, pattern measuring method, and manufacturing method of semiconductor device App 20040247172 - Mitsui, Tadashi | 2004-12-09 |
IC handler and contact cleaning method Grant 6,769,963 - Mitsui , et al. August 3, 2 | 2004-08-03 |
Pattern measurement method, manufacturing method of semiconductor device, pattern measurement apparatus, and program App 20040131257 - Mitsui, Tadashi | 2004-07-08 |
Pattern evaluation system, pattern evaluation method and program App 20030059104 - Mitsui, Tadashi | 2003-03-27 |
Pattern evaluation method, pattern evaluation system and computer-readable recorded medium App 20020141647 - Mitsui, Tadashi | 2002-10-03 |
IC handler and contact cleaning method App 20020065026 - Mitsui, Tadashi ;   et al. | 2002-05-30 |
Method and apparatus for measuring dimensions of a feature of a specimen Grant 6,278,114 - Mitsui August 21, 2 | 2001-08-21 |
Plurality of photolithographic alignment marks with shape, size and spacing based on circuit pattern features Grant 5,702,567 - Mitsui , et al. December 30, 1 | 1997-12-30 |
Assembly for measuring a trench depth parameter of a workpiece Grant 5,691,540 - Halle , et al. November 25, 1 | 1997-11-25 |
Method for producing tips for atomic force microscopes Grant 5,611,942 - Mitsui , et al. March 18, 1 | 1997-03-18 |
Handling apparatus for transferring a semiconductor wafer or LCD Grant 5,049,029 - Mitsui , et al. September 17, 1 | 1991-09-17 |
Surface-mounted-type inductance element Grant 4,939,494 - Masuda , et al. July 3, 1 | 1990-07-03 |
Inductance element Grant 4,549,158 - Mitsui , et al. October 22, 1 | 1985-10-22 |
Ferrite core Grant D280,810 - Mitsui October 1, 1 | 1985-10-01 |
Ferrite core Grant 4,424,504 - Mitsui , et al. January 3, 1 | 1984-01-03 |