Patent | Date |
---|
Phosphorylated dispersants in fluids for electric vehicles Grant 11,332,689 - Adachi , et al. May 17, 2 | 2022-05-17 |
Phosphorylated Dispersants in Fluids for Electric Vehicles App 20220041951 - Adachi; Tsuneo ;   et al. | 2022-02-10 |
Method of manufacturing a transfer mask and method of manufacturing a semiconductor device Grant 8,609,304 - Tanabe , et al. December 17, 2 | 2013-12-17 |
Method Of Manufacturing A Transfer Mask And Method Of Manufacturing A Semiconductor Device App 20120251928 - TANABE; Masaru ;   et al. | 2012-10-04 |
Photomask Blank, Photomask, and Pattern Transfer Method Using Photomask App 20120034553 - Kureishi; Mitsuhiro ;   et al. | 2012-02-09 |
Photomask blank, photomask, and methods of manufacturing the same Grant 8,048,594 - Hashimoto , et al. November 1, 2 | 2011-11-01 |
Photomask blank, photomask, and methods of manufacturing the same Grant 8,021,806 - Hashimoto , et al. September 20, 2 | 2011-09-20 |
Manufacturing method and apparatus of phase shift mask blank Grant 8,012,314 - Nozawa , et al. September 6, 2 | 2011-09-06 |
Halftone type phase shift mask blank and phase shift mask thereof Grant 7,862,963 - Shiota , et al. January 4, 2 | 2011-01-04 |
Photomask Blank, Photomask, And Methods Of Manufacturing The Same App 20100075236 - Hashimoto; Masahiro ;   et al. | 2010-03-25 |
Halftone Type Phase Shift Mask Blank And Phase Shift Mask Thereof App 20100040961 - Shiota; Yuuki ;   et al. | 2010-02-18 |
Photomask Blank, Photomask, And Methods Of Manufacturing The Same App 20090325084 - HASHIMOTO; Masahiro ;   et al. | 2009-12-31 |
Halftone phase shift mask blank, halftone phase shift mask, and method of producing the same Grant 7,632,612 - Shiota , et al. December 15, 2 | 2009-12-15 |
Halftone type phase shift mask blank and phase shift mask thereof Grant 7,592,106 - Shiota , et al. September 22, 2 | 2009-09-22 |
Manufacturing method and apparatus of phase shift mask blank Grant 7,402,228 - Nozawa , et al. July 22, 2 | 2008-07-22 |
Lubricating Oil Composition App 20070287644 - Mitsui; Hideaki ;   et al. | 2007-12-13 |
Manufacturing method and apparatus of phase shift mask blank Grant 7,282,121 - Nozawa , et al. October 16, 2 | 2007-10-16 |
Manufacturing Method and Apparatus of Phase Shift Mask Blank App 20070187228 - Nozawa; Osamu ;   et al. | 2007-08-16 |
Halftone Type Phase Shift Mask Blank And Phase Shift Mask Thereof App 20070092808 - Shiota; Yuuki ;   et al. | 2007-04-26 |
Halftone phase shift mask blank, halftone phase shift mask, and method of producing the same App 20070082278 - Shiota; Yuuki ;   et al. | 2007-04-12 |
Phase shift mask blank, photo mask blank, and manufacturing apparatus and method of blanks App 20070034499 - Nozawa; Osamu ;   et al. | 2007-02-15 |
Halftone type phase shift mask blank and phase shift mask thereof Grant 7,169,513 - Shiota , et al. January 30, 2 | 2007-01-30 |
Halftone phase shift mask blank, halftone phase shift mask, and method of producing the same Grant 7,115,341 - Shiota , et al. October 3, 2 | 2006-10-03 |
Halftone phase-shift mask blank and halftone phase-shift mask Grant 7,060,394 - Shiota , et al. June 13, 2 | 2006-06-13 |
Halftone-type phase-shift mask blank, and halftone-type phase-shift mask Grant 7,011,910 - Shiota , et al. March 14, 2 | 2006-03-14 |
Lubricating oil composition App 20050288193 - Fujimaki, Yoshitomo ;   et al. | 2005-12-29 |
Mask blank, phase shift mask manufacturing method and template manufacturing method App 20050277034 - Mitsui, Hideaki | 2005-12-15 |
Method for producing a halftone phase shift mask blank, a halftone phase shift mask blank and halftone phase shift mask Grant 6,844,119 - Nozawa , et al. January 18, 2 | 2005-01-18 |
Manufacturing method and apparatus of phase shift mask blank App 20040191651 - Nozawa, Osamu ;   et al. | 2004-09-30 |
Manufacturing method and apparatus of phase shift mask blank Grant 6,783,634 - Nozawa , et al. August 31, 2 | 2004-08-31 |
Manufacturing method and apparatus of phase shift mask blank App 20040157138 - Nozawa, Osamu ;   et al. | 2004-08-12 |
Phase shift mask blank, photo mask blank and manufacturing apparatus and method of blanks Grant 6,762,000 - Nozawa , et al. July 13, 2 | 2004-07-13 |
Halftone-type phase-shift mask blank, and halftone-type phase-shift mask App 20040086788 - Shiota, Yuki ;   et al. | 2004-05-06 |
Method for manufacturing phase shift mask blank and method for manufacturing phase shift mask Grant 6,723,477 - Nozawa , et al. April 20, 2 | 2004-04-20 |
Phase shift mask blank, photo mask blank, and manufacturing apparatus and method of blanks App 20040058254 - Nozawa, Osamu ;   et al. | 2004-03-25 |
Method for producing a halftone phase shift mask blank, a halftone phase shift mask blank and halftone phase shift mask App 20040023125 - Nozawa, Osamu ;   et al. | 2004-02-05 |
Phase shift mask blank, phase shift mask, and method for manufacturing the same Grant 6,677,087 - Nozawa , et al. January 13, 2 | 2004-01-13 |
Halftone type phase shift mask blank and phase shift mask thereof App 20030180630 - Shiota, Yuuki ;   et al. | 2003-09-25 |
Halftone phase shift mask blank, halftone phase shift mask, and method of producing the same App 20030180631 - Shiota, Yuuki ;   et al. | 2003-09-25 |
Aqueous dispersion, process for producing the same, and use thereof App 20030162887 - Mitsui, Hideaki ;   et al. | 2003-08-28 |
Package of solid chlorinated polyolefin modified with carboxylic acid anhydrideand method of storing the solid App 20030134064 - Urata, Keiji ;   et al. | 2003-07-17 |
Binder resin solution composition having satisfactory solution property App 20030130378 - Urata, Keiji ;   et al. | 2003-07-10 |
Halftone phase-shift mask blank and halftone phase-shift mask App 20030064297 - Shiota, Yuki ;   et al. | 2003-04-03 |
Phase shift mask blank, photo mask blank and manufacturing apparatus and method of blanks App 20020110741 - Nozawa, Osamu ;   et al. | 2002-08-15 |
Manufacturing method and apparatus of phase shift mask blank App 20020086220 - Nozawa, Osamu ;   et al. | 2002-07-04 |
Phase shift mask blank, phase shift mask, and method for manufacturing the same App 20020061452 - Nozawa, Osamu ;   et al. | 2002-05-23 |
Method for manufacturing phase shift mask blank and method for manufacturing phase shift mask App 20020058186 - Nozawa, Osamu ;   et al. | 2002-05-16 |
Polyamide-modified polyolefinic composition and uses thereof App 20020032277 - Fujino, Kenichi ;   et al. | 2002-03-14 |
Phase shift mask and phase shift mask blank Grant 6,335,124 - Mitsui , et al. January 1, 2 | 2002-01-01 |
Phase shift mask and phase shift mask blank Grant 6,087,047 - Mitsui , et al. July 11, 2 | 2000-07-11 |