Mitsuhashi; Kouji

Patent Applications and Registrations

Patent applications and USPTO patent grants for Mitsuhashi; Kouji.The latest application filed is for "internal member of a plasma processing vessel".

Company Profile

0.31.38

Mitsuhashi; Kouji - Yamanashi JP
Mitsuhashi; Kouji - Nirasaki N/A JP
MITSUHASHI; Kouji - Nirasaki-shi JP
Mitsuhashi, Kouji - Nirasaki-shi Yamanashi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Internal member of a plasma processing vessel Grant 8,877,002 - Mitsuhashi , et al. November 4, 2	2014-11-04
Plasma treatment container internal member, and plasma treatment apparatus having the plasma treatment container internal member Grant 8,739,732 - Nagayama , et al. June 3, 2	2014-06-03
Internal Member Of A Plasma Processing Vessel App 20130255881 - MITSUHASHI; Kouji ; et al.	2013-10-03
Internal member of a plasma processing vessel Grant 8,449,715 - Mitsuhashi , et al. May 28, 2	2013-05-28
Component For Substrate Processing Apparatus And Method Of Forming Film On The Component App 20120186985 - MITSUHASHI; Kouji ; et al.	2012-07-26
Method and apparatus for an improved baffle plate in a plasma processing system Grant 8,118,936 - Saigusa , et al. February 21, 2	2012-02-21
Apparatus for an improved deposition shield in a plasma processing system Grant 8,117,986 - Saigusa , et al. February 21, 2	2012-02-21
Method and apparatus for an improved baffle plate in a plasma processing system Grant 8,057,600 - Nishimoto , et al. November 15, 2	2011-11-15
Components for substrate processing apparatus and manufacturing method thereof Grant 8,058,186 - Moriya , et al. November 15, 2	2011-11-15
Ceramic sprayed member-cleaning method Grant 7,942,975 - Moriya , et al. May 17, 2	2011-05-17
In-chamber member, a cleaning method therefor and a plasma processing apparatus Grant 7,892,361 - Nagayama , et al. February 22, 2	2011-02-22
Internal Member Of A Plasma Processing Vessel App 20100307687 - MITSUHASHI; Kouji ; et al.	2010-12-09
Method and apparatus for an improved optical window deposition shield in a plasma processing system Grant 7,811,428 - Nishimoto , et al. October 12, 2	2010-10-12
Internal member of a plasma processing vessel Grant 7,780,786 - Mitsuhashi , et al. August 24, 2	2010-08-24
Method and apparatus for an improved bellows shield in a plasma processing system Grant 7,678,226 - Saigusa , et al. March 16, 2	2010-03-16
Method and apparatus for an improved upper electrode plate with deposition shield in a plasma processing system Grant 7,566,379 - Nishimoto , et al. July 28, 2	2009-07-28
Method and apparatus for an improved upper electrode plate in a plasma processing system Grant 7,566,368 - Saigusa , et al. July 28, 2	2009-07-28
Ceramic Sprayed Member-cleaning Method, Program For Implementing The Method, Storage Medium Storing The Program, And Ceramic Sprayed Member App 20090133717 - MORIYA; Tsuyoshi ; et al.	2009-05-28
Processing device and method of maintaining the device, mechanism and method for assembling processing device parts, and lock mechanism and method for locking the lock mechanism Grant 7,481,903 - Senzaki , et al. January 27, 2	2009-01-27
In-chamber member, a cleaning method therefor and a plasma processing apparatus App 20080196744 - NAGAYAMA; Nobuyuki ; et al.	2008-08-21
Component For Substrate Processing Apparatus And Method Of Forming Film On The Component App 20080105203 - Mitsuhashi; Kouji ; et al.	2008-05-08
Internal member for plasma-treating vessel and method of producing the same Grant 7,364,798 - Harada , et al. April 29, 2	2008-04-29
Internal member for plasma-treating vessel and method of producing the same App 20080070028 - Harada; Yoshio ; et al.	2008-03-20
Internal member for plasma-treating vessel and method of producing the same App 20080070051 - Harada; Yoshio ; et al.	2008-03-20
Internal member for plasma-treating vessel and method of producing the same App 20080066647 - Harada; Yoshio ; et al.	2008-03-20
Method and apparatus for an improved baffle plate in a plasma processing system Grant 7,282,112 - Nishimoto , et al. October 16, 2	2007-10-16
Method And Apparatus For An Improved Baffle Plate In A Plasma Processing System App 20070204794 - Nishimoto; Shinya ; et al.	2007-09-06
Method And Apparatus For An Improved Bellows Shield In A Plasma Processing System App 20070125494 - SAIGUSA; Hidehito ; et al.	2007-06-07
Method And Apparatus For An Improved Baffle Plate In A Plasma Processing System App 20070107846 - Saigusa; Hidehito ; et al.	2007-05-17
Method And Apparatus For An Improved Optical Window Deposition Shield In A Plasma Processing System App 20070102287 - Nishimoto; Shinya ; et al.	2007-05-10
Method And Apparatus For An Improved Upper Electrode Plate In A Plasma Processing System App 20070096658 - SAIGUSA; Hidehito ; et al.	2007-05-03
Method and apparatus for an improved bellows shield in a plasma processing system Grant 7,204,912 - Saigusa , et al. April 17, 2	2007-04-17
Method and apparatus for an improved upper electrode plate with deposition shield in a plasma processing system App 20070034337 - Nishimoto; Shinya ; et al.	2007-02-15
Method and apparatus for an improved deposition shield in a plasma processing system App 20070028839 - Saigusa; Hidehito ; et al.	2007-02-08
Method and apparatus for an improved upper electrode plate in a plasma processing system Grant 7,166,200 - Saigusa , et al. January 23, 2	2007-01-23
Method and apparatus for an improved baffle plate in a plasma processing system Grant 7,166,166 - Saigusa , et al. January 23, 2	2007-01-23
Method and apparatus for an improved optical window deposition shield in a plasma processing system Grant 7,163,585 - Nishimoto , et al. January 16, 2	2007-01-16
Method and apparatus for an improved upper electrode plate with deposition shield in a plasma processing system Grant 7,147,749 - Nishimoto , et al. December 12, 2	2006-12-12
Method and apparatus for an improved deposition shield in a plasma processing system Grant 7,137,353 - Saigusa , et al. November 21, 2	2006-11-21
Components for substrate processing apparatus and manufacturing method thereof App 20060096703 - Moriya; Tsuyoshi ; et al.	2006-05-11
Ceramic sprayed member-cleaning method, program for implementing the method, storage medium storing the program, and ceramic sprayed member App 20060099444 - Moriya; Tsuyoshi ; et al.	2006-05-11
Processing device and method of maintaining the device, mechanism and method for assembling processing device parts, and lock mechanism and method for locking the lock mechanism App 20050150456 - Senzaki, Shigeru ; et al.	2005-07-14
Internal member for plasma-treating vessel and method of producing the same App 20050147852 - Harada, Yoshio ; et al.	2005-07-07
Processing device and method of maintaining the device, mechanism and method for assembling processing device part, and lock mechanism and method for locking the lock mechanism Grant 6,899,786 - Senzaki , et al. May 31, 2	2005-05-31
Method and apparatus for an improved baffle plate in a plasma processing system App 20050103268 - Nishimoto, Shinya ; et al.	2005-05-19
Internal member for plasma-treating vessel and method of producing the same Grant 6,884,516 - Harada , et al. April 26, 2	2005-04-26
Method and apparatus for an improved baffle plate in a plasma processing system Grant 6,837,966 - Nishimoto , et al. January 4, 2	2005-01-04
Method of cleaning a plasma processing apparatus App 20040216769 - Takase, Taira ; et al.	2004-11-04
Internal member of a plasma processing vessel App 20040216667 - Mitsuhashi, Kouji ; et al.	2004-11-04
Internal member for plasma-treating vessel and method of producing the same App 20040214026 - Harada, Yoshio ; et al.	2004-10-28
Method of processing quartz member for plasma processing device, quartz member for plasma processing device, and plasma processing device having quartz member for plasma processing device mounted thereon App 20040200804 - Sugiyama, Norikazu ; et al.	2004-10-14
Method and apparatus for an improved optical window deposition shield in a plasma processing system Grant 6,798,519 - Nishimoto , et al. September 28, 2	2004-09-28
Method of cleaning a plasma processing apparatus Grant 6,790,289 - Takase , et al. September 14, 2	2004-09-14
Method and apparatus for an improved optical window deposition shield in a plasma processing system App 20040173155 - Nishimoto, Shinya ; et al.	2004-09-09
Plasma processing container internal member and production method thereof Grant 6,783,863 - Harada , et al. August 31, 2	2004-08-31
Coating agent, plasma-resistant component having coating film formed by the coating agent, plasma processing device provided with the plasma-resistant component App 20040163591 - Nagayama, Nobuyuki ; et al.	2004-08-26
Plasma treatment container internal member, and plasma treatment device having the plasma treatment container internal member App 20040144319 - Nagayama, Nobuyuki ; et al.	2004-07-29
Processing device and method of maintaining the device, mechanism and method for assembling processing device part, and lock mechanism and method for locking the lock mechanism App 20040108068 - Senzaki, Shigeru ; et al.	2004-06-10
Method and apparatus for an improved upper electrode plate with deposition shield in a plasma processing system App 20040060661 - Nishimoto, Shinya ; et al.	2004-04-01
Method and apparatus for an improved baffle plate in a plasma processing system App 20040060658 - Nishimoto, Shinya ; et al.	2004-04-01
Method and apparatus for an improved bellows shield in a plasma processing system App 20040060656 - Saigusa, Hidehito ; et al.	2004-04-01
Method and apparatus for an improved deposition shield in a plasma processing system App 20040060657 - Saigusa, Hidehito ; et al.	2004-04-01
Method And Apparatus For An Improved Optical Window Deposition Shield In A Plasma Processing System App 20040060516 - Nishimoto, Shinya ; et al.	2004-04-01
Method and apparatus for an improved baffle plate in a plasma processing system App 20040063333 - Saigusa, Hidehito ; et al.	2004-04-01
Method and apparatus for an improved upper electrode plate in a plasma processing system App 20040061447 - Saigusa, Hidehito ; et al.	2004-04-01
Method of cleaning a plasma processing apparatus App 20030172952 - Takase, Taira ; et al.	2003-09-18
Plasma processing container internal member and production method thereof App 20020177001 - Harada, Yoshio ; et al.	2002-11-28

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