| Patent | Date |
|---|
Method for cleaning polysilicon
Grant 7,067,428 - Hori June 27, 2 | 2006-06-27 |
Method for analyzing impurities in a silicon substrate and apparatus for decomposing a silicon substrate through vapor-phase reaction
Grant 6,995,834 - Shabani , et al. February 7, 2 | 2006-02-07 |
Evaluation method for polycrystalline silicon
Grant 6,916,657 - Hori , et al. July 12, 2 | 2005-07-12 |
Method of purging CVD apparatus and method for judging maintenance of times of semiconductor production apparatuses
Grant 6,887,721 - Hasegawa , et al. May 3, 2 | 2005-05-03 |
Epitaxial wafer
Grant 6,818,197 - Ikezawa , et al. November 16, 2 | 2004-11-16 |
Dielectrically separated wafer and method of the same
Grant 6,815,774 - Oi , et al. November 9, 2 | 2004-11-09 |
Semiconductor manufacturing method and semiconductor manufacturing apparatus
Grant 6,794,204 - Hasegawa , et al. September 21, 2 | 2004-09-21 |
Semiconductor manufacturing apparatus having a moisture measuring device
Grant 6,776,805 - Hasegawa , et al. August 17, 2 | 2004-08-17 |
Semiconductor manufacturing method and semiconductor manufacturing apparatus
App 20040092043 - Hasegawa, Hiroyuki ; et al. | 2004-05-13 |
Method for evaluating the quality of a semiconductor substrate
Grant 6,693,286 - Hasegawa , et al. February 17, 2 | 2004-02-17 |
Silicon wafer, and heat treatment method of the same and the heat-treated silicon wafer
Grant 6,682,597 - Koya , et al. January 27, 2 | 2004-01-27 |
Silicon wafer, and manufacturing method and heat treatment method of the same
Grant 6,663,708 - Morita , et al. December 16, 2 | 2003-12-16 |
Crystal-pulling apparatus for pulling and growing a monocrystalline silicon ingot, and method therefor
Grant 6,648,967 - Todt , et al. November 18, 2 | 2003-11-18 |
Anisotropic etching method and apparatus
App 20030124853 - Oi, Hiroyuki | 2003-07-03 |
Semiconductor substrate, field effect transistor, method of forming SiGe layer and method of forming strained Si layer using same, and method of manufacturing field effect transistor
Grant 6,525,338 - Mizushima , et al. February 25, 2 | 2003-02-25 |
Linearity measuring apparatus for wafer orientation flat
App 20020189118 - Kohanek, Cindy ; et al. | 2002-12-19 |
Wafer holder
Grant 6,474,987 - Nakai , et al. November 5, 2 | 2002-11-05 |
Method for analyzing impurities in a silicon substrate and apparatus for decomposing a silicon substrate through vapor-phase reaction
App 20020101576 - Shabani, Mohammad B. ; et al. | 2002-08-01 |
Method and apparatus for evaluating the quality of a semiconductor substrate
App 20020045283 - Hasegawa, Takeshi ; et al. | 2002-04-18 |
Dielectrically separated wafer and method of manufacturing the same
App 20020045329 - Oi, Hiroyuki ; et al. | 2002-04-18 |
Method for simulating the shape of the solid-liquid interface between a single crystal and a molten liquid, and the distribution of point defects of the single crystal
App 20010042504 - Kitamura, Kounosuke ; et al. | 2001-11-22 |
Detecting method of impurity concentration in crystal, method for producing single crystal and apparatus for the pull-up of a single crystal
Grant 6,019,837 - Maeda , et al. February 1, 2 | 2000-02-01 |
Detecting method of impurity concentration in crystal, method for producing single crystal and apparatus for the pull-up of a single crystal
Grant 6,004,393 - Maeda , et al. December 21, 1 | 1999-12-21 |
Single crystal pulling apparatus
Grant 5,871,581 - Atami , et al. February 16, 1 | 1999-02-16 |
Method for growing a semiconductor single-crystal
Grant 5,858,085 - Arai , et al. January 12, 1 | 1999-01-12 |
A SOI substrate fabricating method
Grant 5,705,421 - Matsushita , et al. January 6, 1 | 1998-01-06 |
Method for intrinsic-gettering silicon wafer
Grant 5,674,756 - Satoh , et al. October 7, 1 | 1997-10-07 |
Method of exhausting silicon oxide
Grant 5,573,591 - Ikezawa , et al. November 12, 1 | 1996-11-12 |
Semiconductor substrate having a gettering layer
Grant 5,539,245 - Imura , et al. July 23, 1 | 1996-07-23 |
System for pulling-up monocrystal and method of exhausting silicon oxide
Grant 5,476,065 - Ikezawa , et al. December 19, 1 | 1995-12-19 |
Double crucible for growing a silicon single crystal
Grant 5,474,022 - Abe , et al. December 12, 1 | 1995-12-12 |
Process for production of semiconductor substrate
Grant 5,459,104 - Sakai October 17, 1 | 1995-10-17 |
Continuous heat treatment system of semiconductor wafers for eliminating thermal donor
Grant 5,449,883 - Tsuruta September 12, 1 | 1995-09-12 |
Method for manufacturing wafer
Grant 5,429,711 - Watanabe , et al. July 4, 1 | 1995-07-04 |
Wafer binding method and apparatus
Grant 5,254,205 - Tsutsumi , et al. October 19, 1 | 1993-10-19 |
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