Patent | Date |
---|
Imprint Method, Imprint Apparatus, And Film Formation Apparatus App 20220082954 - HIGUCHI; Takeshi ;   et al. | 2022-03-17 |
Template, Template Manufacturing Method, And Semiconductor Device Manufacturing Method App 20220055254 - KOBAYASHI; Kei ;   et al. | 2022-02-24 |
Template, template manufacturing method, and semiconductor device manufacturing method Grant 11,192,282 - Kobayashi , et al. December 7, 2 | 2021-12-07 |
Template, Patterning Method, And Method For Manufacturing Semiconductor Device App 20210294208 - MITRA; Anupam ;   et al. | 2021-09-23 |
Template, Template Manufacturing Method, And Semiconductor Device Manufacturing Method App 20210294209 - WATANABE; Jun ;   et al. | 2021-09-23 |
Pattern Forming Method And Imprint Apparatus App 20200402843 - MITRA; Anupam ;   et al. | 2020-12-24 |
Pattern forming method and imprint apparatus Grant 10,796,948 - Mitra , et al. October 6, 2 | 2020-10-06 |
Template substrate, method of manufacturing template substrate, and method of manufacturing semiconductor device Grant 10,725,374 - Mitra | 2020-07-28 |
Pattern Forming Method And Imprint Apparatus App 20200006124 - MITRA; Anupam ;   et al. | 2020-01-02 |
Template, Template Manufacturing Method, And Semiconductor Device Manufacturing Method App 20190263024 - KOBAYASHI; Kei ;   et al. | 2019-08-29 |
Template and method of manufacturing semiconductor device Grant 10,274,822 - Mitra , et al. | 2019-04-30 |
Template Substrate, Method Of Manufacturing Template Substrate, And Method Of Manufacturing Semiconductor Device App 20190079393 - MITRA; Anupam | 2019-03-14 |
Template And Method Of Manufacturing Semiconductor Device App 20180164680 - MITRA; Anupam ;   et al. | 2018-06-14 |
Pattern Forming Method And Imprint Apparatus App 20180151418 - MITRA; Anupam ;   et al. | 2018-05-31 |
Resin for thermal imprinting Grant 9,242,407 - Takemori , et al. January 26, 2 | 2016-01-26 |
Resin For Thermal Imprinting App 20140339735 - Toshifumi; Takemori ;   et al. | 2014-11-20 |
Resin for thermal imprint Grant 8,721,950 - Toshifumi , et al. May 13, 2 | 2014-05-13 |
Mold, Fine Pattern Product, And Method Of Manufacturing Those App 20140015162 - Kusuura; Takahisa ;   et al. | 2014-01-16 |
Etching mask, base material having etching mask, finely processed article, and method for production of finely processed article Grant 8,597,769 - Takaya , et al. December 3, 2 | 2013-12-03 |
Resin For Thermal Imprint App 20130056906 - Toshifumi; Takemori ;   et al. | 2013-03-07 |
Resin for thermal imprint Grant 8,324,332 - Toshifumi , et al. December 4, 2 | 2012-12-04 |
Etching Mask, Base Material Having Etching Mask, Finely Processed Article, And Method For Production Of Finely Processed Article App 20100310830 - Takaya; Yoshiaki ;   et al. | 2010-12-09 |
Mold, Fine Pattern Product, and Method of Manufacturing Those App 20100304087 - Kusuura; Takahisa ;   et al. | 2010-12-02 |
Thermal-imprinting Resin Solution, Thermal-imprinting Resin Thin Film, And Method Of Manufacturing Those App 20100189984 - Takaya; Yoshiaki ;   et al. | 2010-07-29 |
Thermal-imprinting Resin, Thermal-imprinting-resin Solution, Thermal-imprinting Injection-molded Body, Thermal-imprinting Thin Film And Production Method Thereof App 20100189985 - Satsuka; Takuro ;   et al. | 2010-07-29 |
Resin for Thermal Imprinting App 20100019410 - Toshifumi; Takemori ;   et al. | 2010-01-28 |
Resin for Thermal Imprint App 20100013122 - Toshifumi; Takemori ;   et al. | 2010-01-21 |
Method for Manufacturing Zeolite Membrane App 20080160189 - Mitra; Anupam | 2008-07-03 |