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Patent applications and USPTO patent grants for Mitome; Noriyuki.The latest application filed is for "foreign substance inspection apparatus".
Patent | Date |
---|---|
Foreign substance inspection apparatus Grant 7,986,403 - Mitome July 26, 2 | 2011-07-26 |
Foreign Substance Inspection Apparatus App 20100238434 - Mitome; Noriyuki | 2010-09-23 |
Foreign substance inspection apparatus Grant 7,733,471 - Mitome June 8, 2 | 2010-06-08 |
Foreign Substance Inspection Apparatus App 20080259319 - Mitome; Noriyuki | 2008-10-23 |
Alignment method and semiconductor exposure method Grant 5,695,897 - Mitome , et al. December 9, 1 | 1997-12-09 |
Exposure apparatus Grant 5,172,189 - Mitome December 15, 1 | 1992-12-15 |
Alignment and exposure apparatus Grant 4,901,109 - Mitome , et al. February 13, 1 | 1990-02-13 |
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