Patent | Date |
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Method of cleaving a single crystal substrate parallel to its active planar surface and method of using the cleaved daughter substrate Grant 10,589,445 - Furukawa , et al. | 2020-03-17 |
Method of making integrated circuit chip utilizing oriented carbon nanotube conductive layers Grant 7,989,222 - Furukawa , et al. August 2, 2 | 2011-08-02 |
Immersion lithography with equalized pressure on at least projection optics component and wafer Grant 7,889,317 - Furukawa , et al. February 15, 2 | 2011-02-15 |
Methods and structures for promoting stable synthesis of carbon nanotubes Grant 7,851,064 - Furukawa , et al. December 14, 2 | 2010-12-14 |
Vertical carbon nanotube field effect transistors and arrays Grant 7,829,883 - Furukawa , et al. November 9, 2 | 2010-11-09 |
Method of Making Integrated Circuit Chip Utilizing Oriented Carbon Nanotube Conductive Layers App 20100273298 - Furukawa; Toshiharu ;   et al. | 2010-10-28 |
Methods of fabricating vertical carbon nanotube field effect transistors for arrangement in arrays and field effect transistors and arrays formed thereby Grant 7,820,502 - Furukawa , et al. October 26, 2 | 2010-10-26 |
Integrated circuit chip utilizing oriented carbon nanotube conductive layers Grant 7,786,583 - Furukawa , et al. August 31, 2 | 2010-08-31 |
Vertical nanotube semiconductor device structures and methods of forming the same Grant 7,691,720 - Furukawa , et al. April 6, 2 | 2010-04-06 |
Method of forming a dual gated FinFET gain cell Grant 7,674,674 - Furukawa , et al. March 9, 2 | 2010-03-09 |
Sub-lithographic imaging techniques and processes Grant 7,585,614 - Furukawa , et al. September 8, 2 | 2009-09-08 |
Method of forming a dual gated FinFET gain cell Grant 7,566,613 - Furukawa , et al. July 28, 2 | 2009-07-28 |
Methods for forming a wrap-around gate field effect transistor Grant 7,560,347 - Furukawa , et al. July 14, 2 | 2009-07-14 |
Vertical carbon nanotube transistor integration Grant 7,535,016 - Furukawa , et al. May 19, 2 | 2009-05-19 |
Shallow trench isolation fill by liquid phase deposition of SiO.sub.2 Grant 7,525,156 - Hakey , et al. April 28, 2 | 2009-04-28 |
Method for making integrated circuit chip having carbon nanotube composite interconnection vias Grant 7,473,633 - Furukawa , et al. January 6, 2 | 2009-01-06 |
Dual Gated Finfet Gain Cell App 20080261363 - Furukawa; Toshiharu ;   et al. | 2008-10-23 |
Method for making integrated circuit chip utilizing oriented carbon nanotube conductive layers Grant 7,439,081 - Furukawa , et al. October 21, 2 | 2008-10-21 |
Methods for forming a wrap-around gate field effect transistor Grant 7,435,653 - Furukawa , et al. October 14, 2 | 2008-10-14 |
Vertical Nanotube Semiconductor Device Structures And Methods Of Forming The Same App 20080227264 - Furukawa; Toshiharu ;   et al. | 2008-09-18 |
Wrap-around Gate Field Effect Transistor App 20080206937 - Furukawa; Toshiharu ;   et al. | 2008-08-28 |
SHALLOW TRENCH ISOLATION FILL BY LIQUID PHASE DEPOSITION OF SiO2 App 20080197448 - Hakey; Mark Charles ;   et al. | 2008-08-21 |
Immersion Lithography With Equalized Pressure On At Least Projection Optics Component And Wafer App 20080165335 - Furukawa; Toshiharu ;   et al. | 2008-07-10 |
Methods And Structures For Promoting Stable Synthesis Of Carbon Nanotubes App 20080160312 - Furukawa; Toshiharu ;   et al. | 2008-07-03 |
Immersion lithography with equalized pressure on at least projection optics component and wafer Grant 7,385,673 - Furukawa , et al. June 10, 2 | 2008-06-10 |
Methods and structures for promoting stable synthesis of carbon nanotubes Grant 7,374,793 - Furukawa , et al. May 20, 2 | 2008-05-20 |
Methods Of Fabricating Vertical Carbon Nanotube Field Effect Transistors For Arrangement In Arrays And Field Effect Transistors And Arrays Formed Thereby App 20080044954 - Furukawa; Toshiharu ;   et al. | 2008-02-21 |
Design Structures Incorporating Shallow Trench Isolation Filled by Liquid Phase Deposition of SiO2 App 20080040696 - Hakey; Mark Charles ;   et al. | 2008-02-14 |
Vertical field effect transistors incorporating semiconducting nanotubes grown in a spacer-defined passage Grant 7,329,567 - Furukawa , et al. February 12, 2 | 2008-02-12 |
Illumination Light In Immersion Lithography Stepper For Particle Or Bubble Detection App 20070296937 - Furukawa; Toshiharu ;   et al. | 2007-12-27 |
SHALLOW TRENCH ISOLATION FILL BY LIQUID PHASE DEPOSITION OF SiO2 App 20070228510 - Hakey; Mark Charles ;   et al. | 2007-10-04 |
Shallow trench isolation fill by liquid phase deposition of SiO2 Grant 7,273,794 - Hakey , et al. September 25, 2 | 2007-09-25 |
Wrap-around gate field effect transistor Grant 7,271,444 - Furukawa , et al. September 18, 2 | 2007-09-18 |
Wafer cell for immersion lithography Grant 7,271,878 - Furukawa , et al. September 18, 2 | 2007-09-18 |
Methods of forming alternating phase shift masks having improved phase-shift tolerance Grant 7,264,415 - Furukawa , et al. September 4, 2 | 2007-09-04 |
Integrated Circuit Chip Utilizing Dielectric Layer Having Oriented Cylindrical Voids Formed from Carbon Nanotubes App 20070184647 - Furukawa; Toshiharu ;   et al. | 2007-08-09 |
Wrap-around Gate Field Effect Transistor App 20070184588 - Furukawa; Toshiharu ;   et al. | 2007-08-09 |
Double-gate FETs (Field Effect Transistors) Grant 7,250,347 - Furukawa , et al. July 31, 2 | 2007-07-31 |
Integrated circuit chip utilizing dielectric layer having oriented cylindrical voids formed from carbon nanotubes Grant 7,229,909 - Furukawa , et al. June 12, 2 | 2007-06-12 |
Vertical field effect transistors incorporating semiconducting nanotubes grown in a spacer-defined passage Grant 7,211,844 - Furukawa , et al. May 1, 2 | 2007-05-01 |
Integrated Circuit Chip Utilizing Oriented Carbon Nanotube Conductive Layers App 20070048879 - Furukawa; Toshiharu ;   et al. | 2007-03-01 |
Immersion Lithography With Equalized Pressure On At Least Projection Optics Component And Wafer App 20060289794 - Furukawa; Toshiharu ;   et al. | 2006-12-28 |
Method For Making Integrated Circuit Chip Having Carbon Nanotube Composite Interconnection Vias App 20060292861 - Furukawa; Toshiharu ;   et al. | 2006-12-28 |
Integrated circuit chip utilizing carbon nanotube composite interconnection vias Grant 7,135,773 - Furukawa , et al. November 14, 2 | 2006-11-14 |
Integrated circuit chip utilizing oriented carbon nanotube conductive layers Grant 7,129,097 - Furukawa , et al. October 31, 2 | 2006-10-31 |
Horizontal memory gain cells Grant 7,109,546 - Furukawa , et al. September 19, 2 | 2006-09-19 |
Moving lens for immersion optical lithography Grant 7,088,422 - Hakey , et al. August 8, 2 | 2006-08-08 |
Vertical Carbon Nanotube Transistor Integration App 20060169972 - Furukawa; Toshiharu ;   et al. | 2006-08-03 |
DOUBLE-GATE FETs (FIELD EFFECT TRANSISTORS) App 20060172496 - Furukawa; Toshiharu ;   et al. | 2006-08-03 |
Integrated circuit chip utilizing dielectric layer having oriented cylindrical voids formed from carbon nanotubes App 20060128137 - Furukawa; Toshiharu ;   et al. | 2006-06-15 |
Selective synthesis of semiconducting carbon nanotubes Grant 7,038,299 - Furukawa , et al. May 2, 2 | 2006-05-02 |
Liquid-filled balloons for immersion lithography Grant 7,026,259 - Hakey , et al. April 11, 2 | 2006-04-11 |
System and apparatus for photolithography Grant 7,027,125 - Hakey , et al. April 11, 2 | 2006-04-11 |
Sub-lithographic Imaging Techniques And Processes App 20060060562 - Furukawa; Toshiharu ;   et al. | 2006-03-23 |
Alternating phase mask built by additive film deposition Grant 6,998,204 - Furukawa , et al. February 14, 2 | 2006-02-14 |
Integrated circuit chip utilizing oriented carbon nanotube conductive layers App 20060022221 - Furukawa; Toshiharu ;   et al. | 2006-02-02 |
Method of forming FinFET gates without long etches Grant 6,989,308 - Furukawa , et al. January 24, 2 | 2006-01-24 |
Dual gated finfet gain cell App 20060008927 - Furukawa; Toshiharu ;   et al. | 2006-01-12 |
Horizontal memory gain cells App 20050286293 - Furukawa, Toshiharu ;   et al. | 2005-12-29 |
Vertical field effect transistors incorporating semiconducting nanotubes grown in a spacer-defined passage App 20050266627 - Furukawa, Toshiharu ;   et al. | 2005-12-01 |
Dual gated finfet gain cell Grant 6,970,372 - Furukawa , et al. November 29, 2 | 2005-11-29 |
Wafer cell for immersion lithography App 20050237501 - Furukawa, Toshiharu ;   et al. | 2005-10-27 |
System and apparatus for photolithography App 20050213061 - Hakey, Mark Charles ;   et al. | 2005-09-29 |
Methods of forming alternating phase shift masks having improved phase-shift tolerance App 20050202322 - Furukawa, Toshiharu ;   et al. | 2005-09-15 |
Method of forming FinFET gates without long etches App 20050202607 - Furukawa, Toshiharu ;   et al. | 2005-09-15 |
Integrated circuit chip utilizing carbon nanotube composite interconnection vias App 20050189655 - Furukawa, Toshiharu ;   et al. | 2005-09-01 |
Methods of fabricating vertical carbon nanotube field effect transistors for arrangement in arrays and field effect transistors and arrays formed thereby App 20050179029 - Furukawa, Toshiharu ;   et al. | 2005-08-18 |
Vertical field effect transistors incorporating semiconducting nanotubes grown in a spacer-defined passage App 20050167740 - Furukawa, Toshiharu ;   et al. | 2005-08-04 |
Vertical nanotube semiconductor device structures and methods of forming the same App 20050167655 - Furukawa, Toshiharu ;   et al. | 2005-08-04 |
Liquid-filled Balloons For Immersion Lithography App 20050158673 - Hakey, Mark C. ;   et al. | 2005-07-21 |
Vertical Carbon Nanotube Field Effect Transistor App 20050145838 - Furukawa, Toshiharu ;   et al. | 2005-07-07 |
Moving lens for immersion optical lithography App 20050145803 - Hakey, Mark Charles ;   et al. | 2005-07-07 |
Shallow trench isolation fill by liquid phase deposition of SiO2 App 20050130387 - Hakey, Mark Charles ;   et al. | 2005-06-16 |
Methods and structures for promoting stable synthesis of carbon nanotubes App 20050129948 - Furukawa, Toshiharu ;   et al. | 2005-06-16 |
Wrap-around gate field effect transistor App 20050127466 - Furukawa, Toshiharu ;   et al. | 2005-06-16 |
Selective synthesis of semiconducting carbon nanotubes App 20050130341 - Furukawa, Toshiharu ;   et al. | 2005-06-16 |
Alternating Phase Mask Built By Additive Film Deposition App 20050106472 - Furukawa, Toshiharu ;   et al. | 2005-05-19 |
Method for supporting a bond pad in a multilevel interconnect structure and support structure formed thereby Grant 6,890,828 - Horak , et al. May 10, 2 | 2005-05-10 |
Method Of Forming Gas Dielectric With Support Structure App 20050087875 - Furukawa, Toshiharu ;   et al. | 2005-04-28 |
Method for forming quadruple density sidewall image transfer (SIT) structures Grant 6,875,703 - Furukawa , et al. April 5, 2 | 2005-04-05 |
Method of forming gas dielectric with support structure Grant 6,875,685 - Furukawa , et al. April 5, 2 | 2005-04-05 |
Method for supporting a bond pad in a multilevel interconnect structure and support structure formed thereby App 20040245637 - Horak, David Vaclav ;   et al. | 2004-12-09 |
Method for manufacturing a multi-level interconnect structure Grant 6,713,835 - Horak , et al. March 30, 2 | 2004-03-30 |
Dual use alignment aid Grant 6,342,735 - Colelli , et al. January 29, 2 | 2002-01-29 |