Patent | Date |
---|
Symmetric Vhf Source For A Plasma Reactor App 20210313147 - Ramaswamy; Kartik ;   et al. | 2021-10-07 |
Symmetric VHF source for a plasma reactor Grant 11,043,361 - Ramaswamy , et al. June 22, 2 | 2021-06-22 |
Symmetric VHF Source for a Plasma Reactor App 20180053630 - Ramaswamy; Kartik ;   et al. | 2018-02-22 |
Symmetric VHF source for a plasma reactor Grant 9,824,862 - Ramaswamy , et al. November 21, 2 | 2017-11-21 |
Electron beam plasma source with reduced metal contamination Grant 9,721,760 - Dorf , et al. August 1, 2 | 2017-08-01 |
Temperature controlled chamber liner Grant 9,653,267 - Carducci , et al. May 16, 2 | 2017-05-16 |
Electron beam plasma source with segmented suppression electrode for uniform plasma generation Grant 9,443,700 - Dorf , et al. September 13, 2 | 2016-09-13 |
Plasma reactor with electron beam plasma source having a uniform magnetic field Grant 9,269,546 - Wu , et al. February 23, 2 | 2016-02-23 |
Electron beam plasma source with arrayed plasma sources for uniform plasma generation Grant 9,129,777 - Dorf , et al. September 8, 2 | 2015-09-08 |
Symmetric Vhf Source For A Plasma Reactor App 20150075719 - Ramaswamy; Kartik ;   et al. | 2015-03-19 |
Electron beam plasma source with segmented beam dump for uniform plasma generation Grant 8,951,384 - Dorf , et al. February 10, 2 | 2015-02-10 |
Symmetric VHF source for a plasma reactor Grant 8,920,597 - Ramaswamy , et al. December 30, 2 | 2014-12-30 |
Symmetric VHF source for a plasma reactor Grant 08920597 - | 2014-12-30 |
Electron Beam Plasma Source With Reduced Metal Contamination App 20140338835 - Dorf; Leonid ;   et al. | 2014-11-20 |
Electron Beam Plasma Source With Segmented Suppression Electrode For Uniform Plasma Generation App 20140265855 - Dorf; Leonid ;   et al. | 2014-09-18 |
Method of differential counter electrode tuning in an RF plasma reactor Grant 8,734,664 - Yang , et al. May 27, 2 | 2014-05-27 |
Differential Counter Electrode Tuning In A Plasma Reactor With An Rf-driven Ceiling Electrode App 20140069584 - Yang; Yang ;   et al. | 2014-03-13 |
Method Of Differential Counter Electrode Tuning In An Rf Plasma Reactor App 20140034612 - Yang; Yang ;   et al. | 2014-02-06 |
Differential Counter Electrode Tuning In A Plasma Reactor With An Rf-driven Workpiece Support Electrode App 20140034239 - Yang; Yang ;   et al. | 2014-02-06 |
Plasma Reactor With Electron Beam Plasma Source Having A Uniform Magnetic Field App 20140035458 - Wu; Ming-Feng ;   et al. | 2014-02-06 |
Plasma Processing Using Rf Return Path Variable Impedance Controller With Two-dimensional Tuning Space App 20130277333 - Misra; Nipun ;   et al. | 2013-10-24 |
Temperature Controlled Chamber Liner App 20130118686 - Carducci; James D. ;   et al. | 2013-05-16 |
Switched Electron Beam Plasma Source Array For Uniform Plasma Production App 20130098872 - Dorf; Leonid ;   et al. | 2013-04-25 |
E-beam Plasma Source With Profiled E-beam Extraction Grid For Uniform Plasma Generation App 20130098552 - Dorf; Leonid ;   et al. | 2013-04-25 |
Electron Beam Plasma Source With Segmented Beam Dump For Uniform Plasma Generation App 20130098882 - Dorf; Leonid ;   et al. | 2013-04-25 |
Electron Beam Plasma Source With Arrayed Plasma Sources For Uniform Plasma Generation App 20130098551 - Dorf; Leonid ;   et al. | 2013-04-25 |
Symmetric Vhf Source For A Plasma Reactor App 20120043023 - Ramaswamy; Kartik ;   et al. | 2012-02-23 |
Selective processing of semiconductor nanowires by polarized visible radiation Grant 7,786,024 - Stumbo , et al. August 31, 2 | 2010-08-31 |
Selective Processing Of Semiconductor Nanowires By Polarized Visible Radiation App 20080150165 - Stumbo; David P. ;   et al. | 2008-06-26 |