Patent | Date |
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Polishing Compositions And Methods Of Using The Same App 20220306899 - Cheng; Qingmin ;   et al. | 2022-09-29 |
Polishing compositions and methods of using same Grant 11,424,131 - Ballesteros , et al. August 23, 2 | 2022-08-23 |
Polishing Compositions Containing Charged Abrasive App 20220169892 - Mishra; Abhudaya | 2022-06-02 |
Polishing Compositions and Methods of Using Same App 20220145130 - Turner; Eric ;   et al. | 2022-05-12 |
Polishing Compositions And Methods Of Using The Same App 20220135840 - Cheng; Qingmin ;   et al. | 2022-05-05 |
Polishing Compositions Containing Charged Abrasive App 20210348029 - Mishra; Abhudaya | 2021-11-11 |
Cleaning Compositions And Methods Of Use Thereof App 20210292685 - Mishra; Abhudaya ;   et al. | 2021-09-23 |
Polishing compositions containing charged abrasive Grant 11,034,861 - Mishra June 15, 2 | 2021-06-15 |
Polishing Compositions And Methods Of Using Same App 20200343098 - Ballesteros; Carl ;   et al. | 2020-10-29 |
Polishing Compositions And Methods Of Using Same App 20200339837 - Turner; Eric ;   et al. | 2020-10-29 |
Polishing compositions containing charged abrasive Grant 10,808,145 - Mishra October 20, 2 | 2020-10-20 |
Polishing compositions and methods of using same Grant 10,763,119 - Ballesteros , et al. Sep | 2020-09-01 |
Polishing compositions and methods of using same Grant 10,759,970 - Turner , et al. Sep | 2020-09-01 |
Polishing Compositions And Methods Of Use Thereof App 20200224058 - Leonov; Alexei P. ;   et al. | 2020-07-16 |
Polishing compositions and methods of use thereof Grant 10,703,937 - Leonov , et al. | 2020-07-07 |
Polishing Compositions And Methods Of Using Same App 20200203172 - Ballesteros; Carl ;   et al. | 2020-06-25 |
Polishing Compositions And Methods Of Using Same App 20200199409 - Turner; Eric ;   et al. | 2020-06-25 |
Polishing Compositions Containing Charged Abrasive App 20190359857 - Mishra; Abhudaya | 2019-11-28 |
Polishing Compositions Containing Charged Abrasive App 20190359858 - Mishra; Abhudaya | 2019-11-28 |
Polishing compositions containing charged abrasive Grant 10,428,241 - Mishra October 1, 2 | 2019-10-01 |
Advanced Fluid Processing Methods And Systems App 20190105620 - Chou; Shih-Pin ;   et al. | 2019-04-11 |
Polishing Compositions Containing Charged Abrasive App 20190106596 - Mishra; Abhudaya | 2019-04-11 |
Polishing Compositions And Methods Of Use Thereof App 20190055431 - Leonov; Alexei P. ;   et al. | 2019-02-21 |
Advanced fluid processing methods and systems Grant 10,159,949 - Chou , et al. Dec | 2018-12-25 |
Polishing compositions and methods of use thereof Grant 10,106,705 - Leonov , et al. October 23, 2 | 2018-10-23 |
Polishing Compositions And Methods Of Use Thereof App 20180282580 - Leonov; Alexei P. ;   et al. | 2018-10-04 |
Advanced Fluid Processing Methods And Systems App 20170259229 - Chou; Shih-Pin ;   et al. | 2017-09-14 |
Polishing compositions and methods for polishing cobalt films Grant 9,735,030 - Wang , et al. August 15, 2 | 2017-08-15 |
Polishing compositions and methods for polishing cobalt films Grant 9,735,031 - Wang , et al. August 15, 2 | 2017-08-15 |
Polishing compositions and methods for selectively polishing silicon nitride over silicon oxide films Grant 9,583,359 - Mishra , et al. February 28, 2 | 2017-02-28 |
Polishing compositions and methods for selectively polishing silicon nitride over silicon oxide films Grant 9,558,959 - Mishra , et al. January 31, 2 | 2017-01-31 |
Polishing Compositions And Methods For Polishing Cobalt Films App 20160189976 - Wang; Luling ;   et al. | 2016-06-30 |
Chemical mechanical polishing of silicon carbide comprising surfaces Grant 9,368,367 - Singh , et al. June 14, 2 | 2016-06-14 |
Polishing Compositions And Methods For Selectively Polishing Silicon Nitride Over Silicon Oxide Films App 20160079080 - Mishra; Abhudaya ;   et al. | 2016-03-17 |
Polishing Compositions And Methods For Polishing Cobalt Films App 20160068710 - Wang; Luling ;   et al. | 2016-03-10 |
Polishing Compositions And Methods For Selectively Polishing Silicon Nitride Over Silicon Oxide Films App 20150284593 - Wang; Luling ;   et al. | 2015-10-08 |
Chemical mechanical polishing of group III-nitride surfaces Grant 8,828,874 - Singh , et al. September 9, 2 | 2014-09-09 |
CMP tool implementing cyclic self-limiting CM process Grant 8,652,295 - Singh , et al. February 18, 2 | 2014-02-18 |
Cmp Tool Implementing Cyclic Self-limiting Cm Process App 20140000808 - SINGH; RAJIV ;   et al. | 2014-01-02 |
Chemical mechanical polishing of silicon carbide comprising surfaces Grant 8,557,133 - Singh , et al. October 15, 2 | 2013-10-15 |
Cyclic self-limiting CMP removal and associated processing tool Grant 8,506,835 - Singh , et al. August 13, 2 | 2013-08-13 |
Chemical Mechanical Polishing Of Group Iii-nitride Surfaces App 20120252213 - Singh; Rajiv K. ;   et al. | 2012-10-04 |
Chemical Mechanical Polishing Of Silicon Carbide Comprising Surfaces App 20120070991 - SINGH; RAJIV K. ;   et al. | 2012-03-22 |
Cyclic Self-limiting Cmp Removal And Associated Processing Tool App 20110256802 - Singh; Rajiv ;   et al. | 2011-10-20 |
Chemical Mechanical Polishing Of Silicon Carbide Comprising Surfaces App 20100258528 - SINGH; RAJIV K. ;   et al. | 2010-10-14 |