| Patent | Date |
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Processing Apparatus, Measurement Apparatus, Lithography Apparatus, Method Of Manufacturing Article, Model, Processing Method, Measurement Method, Generation Method, And Generation Apparatus
App 20220130028 - Jimbo; Satoru ; et al. | 2022-04-28 |
Imprint lithography apparatus and device manufacturing method therefor
Grant 9,718,234 - Maeda , et al. August 1, 2 | 2017-08-01 |
Imprint apparatus, imprint method, and device manufacturing method
Grant 9,645,514 - Maeda , et al. May 9, 2 | 2017-05-09 |
Lithography apparatus, determination method, and method of manufacturing article
Grant 9,606,456 - Ogura , et al. March 28, 2 | 2017-03-28 |
Detection apparatus, lithography apparatus and method of manufacturing article
Grant 9,594,315 - Miyaharu , et al. March 14, 2 | 2017-03-14 |
Detection apparatus, imprint apparatus, and method of manufacturing products
Grant 9,595,447 - Inada , et al. March 14, 2 | 2017-03-14 |
Exposure apparatus, exposure method, and device manufacturing method
Grant 9,400,434 - Takenaka , et al. July 26, 2 | 2016-07-26 |
Position detection apparatus, imprint apparatus, and position detection method
Grant 9,283,720 - Minoda , et al. March 15, 2 | 2016-03-15 |
Lithography apparatus, alignment method, and method of manufacturing article
Grant 9,261,802 - Mishima , et al. February 16, 2 | 2016-02-16 |
Imprint Apparatus, Imprint Method, And Device Manufacturing Method
App 20160033884 - Maeda; Hironori ; et al. | 2016-02-04 |
Lithography Apparatus, Determination Method, And Method Of Manufacturing Article
App 20150338751 - Ogura; Masahiro ; et al. | 2015-11-26 |
Imprint apparatus, imprint method, and device manufacturing method
Grant 9,188,855 - Maeda , et al. November 17, 2 | 2015-11-17 |
Detection Apparatus, Imprint Apparatus, And Method Of Manufacturing Products
App 20150235880 - Inada; Hiroshi ; et al. | 2015-08-20 |
Exposure Apparatus, Exposure Method, And Device Manufacturing Method
App 20150092169 - Takenaka; Tsutomu ; et al. | 2015-04-02 |
Detection Apparatus, Lithography Apparatus And Method Of Manufacturing Article
App 20150062553 - MIYAHARU; Takafumi ; et al. | 2015-03-05 |
Lithography Apparatus, Alignment Method, And Method Of Manufacturing Article
App 20150049317 - Mishima; Kazuhiko ; et al. | 2015-02-19 |
Detector, imprint apparatus, and article manufacturing method
Grant 8,922,786 - Iwai , et al. December 30, 2 | 2014-12-30 |
Detector, imprint apparatus, and article manufacturing method
Grant 08922786 - | 2014-12-30 |
Position Detection Apparatus, Imprint Apparatus, And Position Detection Method
App 20140346694 - Minoda; Ken ; et al. | 2014-11-27 |
Position detection apparatus, imprint apparatus, and position detection method
Grant 8,842,294 - Minoda , et al. September 23, 2 | 2014-09-23 |
Detection apparatus, exposure apparatus, and device fabrication method
Grant 8,659,743 - Mishima February 25, 2 | 2014-02-25 |
Detector, Imprint Apparatus And Method Of Manufacturing Article
App 20130221556 - Miyaharu; Takafumi ; et al. | 2013-08-29 |
Imprint Lithography Apparatus And Device Manufacturing Method Therefor
App 20130161868 - Maeda; Hironori ; et al. | 2013-06-27 |
Detector, Imprint Apparatus, And Article Manufacturing Method
App 20130100459 - Iwai; Toshiki ; et al. | 2013-04-25 |
Position Detection Apparatus, Imprint Apparatus, And Position Detection Method
App 20120328725 - Minoda; Ken ; et al. | 2012-12-27 |
Imprint Apparatus, Imprint Method, And Device Manufacturing Method
App 20120292801 - Maeda; Hironori ; et al. | 2012-11-22 |
Exposure apparatus
Grant 7,986,396 - Mishima July 26, 2 | 2011-07-26 |
Detection Apparatus, Exposure Apparatus, And Device Fabrication Method
App 20110033790 - MISHIMA; Kazuhiko | 2011-02-10 |
Exposure Apparatus, Exposure Method, And Device Manufacturing Method
App 20100208228 - Koga; Shinichiro ; et al. | 2010-08-19 |
Exposure Apparatus And Method Of Manufacturing Device
App 20090310106 - Mishima; Kazuhiko | 2009-12-17 |
Exposure Apparatus
App 20090263735 - Mishima; Kazuhiko | 2009-10-22 |
Exposure Apparatus
App 20090214962 - Mishima; Kazuhiko | 2009-08-27 |
Position sensor
Grant 7,551,281 - Sato , et al. June 23, 2 | 2009-06-23 |
Position Sensor
App 20090040489 - SATO; Hiroshi ; et al. | 2009-02-12 |
Position sensor
Grant 7,450,249 - Sato , et al. November 11, 2 | 2008-11-11 |
Position Sensor
App 20080094641 - SATO; HIROSHI ; et al. | 2008-04-24 |
Exposure Apparatus
App 20080049203 - Mishima; Kazuhiko | 2008-02-28 |
Position sensor
Grant 7,298,500 - Sato , et al. November 20, 2 | 2007-11-20 |
Position detection method and apparatus, and exposure method and apparatus
Grant 7,230,706 - Mishima June 12, 2 | 2007-06-12 |
Position detector, position detecting method, and exposure apparatus having the same
Grant 7,142,284 - Mishima November 28, 2 | 2006-11-28 |
Position detection method and apparatus, and exposure method and apparatus
Grant 7,019,836 - Mishima March 28, 2 | 2006-03-28 |
Position detection method and apparatus, and exposure method and apparatus
App 20050179898 - Mishima, Kazuhiko | 2005-08-18 |
Position detection apparatus and method, exposure apparatus, and device manufacturing method
Grant 6,930,016 - Mishima , et al. August 16, 2 | 2005-08-16 |
Position detector, position detecting method, and exposure apparatus having the same
App 20050117140 - Mishima, Kazuhiko | 2005-06-02 |
Position detection apparatus, alignment apparatus and methods therefor, and exposure apparatus and device manufacturing method
Grant 6,870,623 - Tanaka , et al. March 22, 2 | 2005-03-22 |
Exposure apparatus
App 20050002035 - Mishima, Kazuhiko | 2005-01-06 |
Position sensor
App 20040165195 - Sato, Hiroshi ; et al. | 2004-08-26 |
Detection apparatus and exposure apparatus using the same
Grant 6,707,533 - Mishima March 16, 2 | 2004-03-16 |
Position detection method and apparatus, and exposure method and apparatus
App 20030053057 - Mishima, Kazuhiko | 2003-03-20 |
Position detection apparatus and method, exposure apparatus, and device manufacturing method
App 20030053059 - Mishima, Kazuhiko ; et al. | 2003-03-20 |
Position detection apparatus, alignment apparatus and methods therefor, and exposure apparatus and device manufacturing method
App 20030054574 - Tanaka, Hiroshi ; et al. | 2003-03-20 |
Detection apparatus and exposure apparatus using the same
App 20020097386 - Mishima, Kazuhiko | 2002-07-25 |
Scan type projection exposure apparatus and device manufacturing method using the same
App 20020048006 - Mishima, Kazuhiko | 2002-04-25 |
Scan Type Projection Exposure Apparatus And Device Manufacturing Method Using The Same
App 20010012098 - MISHIMA, KAZUHIKO | 2001-08-09 |
Position detecting method and position detecting system using the same
Grant 5,943,135 - Mishima August 24, 1 | 1999-08-24 |
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