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Fuel cell Grant 11,417,892 - Sakuma , et al. August 16, 2 | 2022-08-16 |
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Fuel Cell App 20210408556 - SAKUMA; Noriyuki ;   et al. | 2021-12-30 |
CMOS semiconductor device and method for manufacturing the same Grant 8,698,249 - Mise , et al. April 15, 2 | 2014-04-15 |
Method of manufacturing semiconductor device, and semiconductor device Grant 8,466,053 - Matsuki , et al. June 18, 2 | 2013-06-18 |
Method of manufacturing semiconductor device and substrate processing system Grant 8,404,603 - Ogawa , et al. March 26, 2 | 2013-03-26 |
Cmos Semiconductor Device And Method For Manufacturing The Same App 20130034953 - Mise; Nobuyuki ;   et al. | 2013-02-07 |
Method of manufacturing semiconductor device and semiconductor device Grant 8,288,221 - Eimori , et al. October 16, 2 | 2012-10-16 |
Method Of Manufacturing Semiconductor Device, And Semiconductor Device App 20110241087 - MATSUKI; Takeo ;   et al. | 2011-10-06 |
Semiconductor device and manufacturing method of the semiconductor device Grant 7,968,396 - Watanabe , et al. June 28, 2 | 2011-06-28 |
Method of nickel disilicide formation and method of nickel disilicate source/drain formation Grant 7,947,560 - Watanabe , et al. May 24, 2 | 2011-05-24 |
Method Of Manufacturing Semiconductor Device And Substrate Processing System App 20110003482 - Ogawa; Arito ;   et al. | 2011-01-06 |
Manufacturing method of semiconductor device Grant 7,863,127 - Mise , et al. January 4, 2 | 2011-01-04 |
Cmos Semiconductor Device And Method For Manufacturing The Same App 20100258878 - Mise; Nobuyuki ;   et al. | 2010-10-14 |
Semiconductor device and manufacturing method of the semiconductor device App 20100072551 - Watanabe; Yukimune ;   et al. | 2010-03-25 |
Metal insulator semiconductor transistor using a gate insulator including a high dielectric constant film Grant 7,671,426 - Mise , et al. March 2, 2 | 2010-03-02 |
Method Of Manufacturing Semiconductor Device And Semiconductor Device App 20100038729 - EIMORI; Takahisa ;   et al. | 2010-02-18 |
Semiconductor device and manufacturing method of the semiconductor device Grant 7,645,655 - Watanabe , et al. January 12, 2 | 2010-01-12 |
Manufacturing Method Of Semiconductor Device App 20090291538 - MISE; Nobuyuki ;   et al. | 2009-11-26 |
Semiconductor device and manufacturing method thereof App 20090173998 - Mise; Nobuyuki ;   et al. | 2009-07-09 |
Semiconductor device and manufacturing method thereof Grant 7,507,632 - Mise , et al. March 24, 2 | 2009-03-24 |
Semiconductor device and manufacturing method thereof App 20080083956 - Mise; Nobuyuki ;   et al. | 2008-04-10 |
Semiconductor device and manufacturing method of the same App 20080067590 - Mise; Nobuyuki ;   et al. | 2008-03-20 |
Method for forming silicide and method for fabricating semiconductor device App 20070202692 - Watanabe; Yukimune ;   et al. | 2007-08-30 |
Semiconductor device and manufacturing method of the semiconductor device App 20060284220 - Watanabe; Yukimune ;   et al. | 2006-12-21 |
Semiconductor device and manufacturing method of the semiconductor device App 20060281273 - Watanabe; Yukimune ;   et al. | 2006-12-14 |
Process monitoring methods in a plasma processing apparatus, monitoring units, and a sample processing method using the monitoring units App 20060000800 - Usui; Tatehito ;   et al. | 2006-01-05 |
Process monitoring methods in a plasma processing apparatus, monitoring units, and a sample processing method using the monitoring units Grant 6,967,109 - Usui , et al. November 22, 2 | 2005-11-22 |
Etching method of hardly-etched material and semiconductor fabricating method and apparatus using the method Grant 6,835,665 - Mise , et al. December 28, 2 | 2004-12-28 |
Process monitoring methods in a plasma processing apparatus, monitoring units, and a sample processing method using the monitoring units App 20040235310 - Usui, Tatehito ;   et al. | 2004-11-25 |
Process monitoring methods in a plasma processing apparatus, monitoring units, and a sample processing method using the monitoring units Grant 6,759,253 - Usui , et al. July 6, 2 | 2004-07-06 |
Ion current density measuring method and instrument, and semiconductor device manufacturing method App 20040092044 - Mise, Nobuyuki ;   et al. | 2004-05-13 |
Ion current density measuring method and instrument, and semiconductor device manufacturing method Grant 6,656,752 - Mise , et al. December 2, 2 | 2003-12-02 |
Etching method of hardly-etched material and semiconductor fabricating method and apparatus using the method App 20030170998 - Mise, Nobuyuki ;   et al. | 2003-09-11 |
Process monitoring methods in a plasma processing apparatus, monitoring units, and a sample processing method using the monitoring units App 20010014520 - Usui, Tatehito ;   et al. | 2001-08-16 |
Plasma treatment method and apparatus Grant 5,242,539 - Kumihashi , et al. September 7, 1 | 1993-09-07 |